{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,2]],"date-time":"2026-04-02T05:56:19Z","timestamp":1775109379942,"version":"3.50.1"},"reference-count":23,"publisher":"Institute of Electrical and Electronics Engineers (IEEE)","issue":"7","license":[{"start":{"date-parts":[[2026,4,1]],"date-time":"2026-04-01T00:00:00Z","timestamp":1775001600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/legalcode"}],"funder":[{"name":"European Structural and Investment Funds in the FEDER Component through the Operational Competitiveness and Internationalization Programme","award":["POCI-01-0247-FEDER-037902"],"award-info":[{"award-number":["POCI-01-0247-FEDER-037902"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEEE Sensors J."],"published-print":{"date-parts":[[2026,4,1]]},"DOI":"10.1109\/jsen.2026.3664170","type":"journal-article","created":{"date-parts":[[2026,2,20]],"date-time":"2026-02-20T21:19:10Z","timestamp":1771622350000},"page":"9988-9997","source":"Crossref","is-referenced-by-count":0,"title":["All-Silicon Multispot 2-D Beam Steering MEMS Mirror"],"prefix":"10.1109","volume":"26","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4605-6961","authenticated-orcid":false,"given":"In\u00eas S.","family":"Garcia","sequence":"first","affiliation":[{"name":"International Iberian Nanotechnology Laboratory (INL), Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9488-5003","authenticated-orcid":false,"given":"Carlos","family":"Ferreira","sequence":"additional","affiliation":[{"name":"International Iberian Nanotechnology Laboratory (INL), Braga, Portugal"}]},{"given":"Jos\u00e9 B.","family":"Queiroz","sequence":"additional","affiliation":[{"name":"Bosch Car Multimédia S.A., Braga, Portugal"}]},{"given":"Carlos","family":"Silva","sequence":"additional","affiliation":[{"name":"International Iberian Nanotechnology Laboratory (INL), Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2846-9014","authenticated-orcid":false,"given":"Alexandre M.","family":"Correia","sequence":"additional","affiliation":[{"name":"Bosch Car Multimédia S.A., Braga, Portugal"}]},{"given":"Andr\u00e9","family":"Albuquerque","sequence":"additional","affiliation":[{"name":"Bosch Car Multimédia S.A., Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6318-9021","authenticated-orcid":false,"given":"Diogo E.","family":"Aguiam","sequence":"additional","affiliation":[{"name":"International Iberian Nanotechnology Laboratory (INL), Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3439-8235","authenticated-orcid":false,"given":"Filipe S.","family":"Alves","sequence":"additional","affiliation":[{"name":"International Iberian Nanotechnology Laboratory (INL), Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3877-0946","authenticated-orcid":false,"given":"Rosana A.","family":"Dias","sequence":"additional","affiliation":[{"name":"International Iberian Nanotechnology Laboratory (INL), Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9954-9746","authenticated-orcid":false,"given":"Jorge","family":"Cabral","sequence":"additional","affiliation":[{"name":"ALGORITMI Center, University of Minho, Guimarães, Portugal"}]},{"given":"Jo\u00e3o","family":"Gaspar","sequence":"additional","affiliation":[{"name":"International Iberian Nanotechnology Laboratory (INL), Braga, Portugal"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/jmems.2013.2295470"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.2139\/ssrn.3604309"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.3390\/mi11050456"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/sas.2019.8706008"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1364\/oe.20.011863"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1364\/oe.24.003479"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1364\/ao.393075"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.3390\/mi13091444"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1364\/ol.36.004770"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1002\/opph.201870416"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1117\/12.2040660"},{"key":"ref12","volume-title":"Diffraction Grating Handbook","author":"Palmer","year":"2020"},{"issue":"2","key":"ref13","first-page":"237","article-title":"A practical algorithm for the determination of the phase from image and diffraction plane pictures","volume":"35","author":"Gerchberg","year":"1972","journal-title":"Optik (Stuttgart)"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6439\/aa85cd"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/20\/8\/085007"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1063\/1.4942973"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1051\/epjap\/2015150285"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1007\/s00216-006-0726-5"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/jmems.2009.2023844"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.3390\/s22197532"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1080\/713819570"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2020.3006746"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/transducers.2019.8808247"}],"container-title":["IEEE Sensors Journal"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/7361\/11466311\/11400666.pdf?arnumber=11400666","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,4,2]],"date-time":"2026-04-02T04:37:58Z","timestamp":1775104678000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11400666\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,4,1]]},"references-count":23,"journal-issue":{"issue":"7"},"URL":"https:\/\/doi.org\/10.1109\/jsen.2026.3664170","relation":{},"ISSN":["1530-437X","1558-1748","2379-9153"],"issn-type":[{"value":"1530-437X","type":"print"},{"value":"1558-1748","type":"electronic"},{"value":"2379-9153","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,4,1]]}}}