{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T05:31:06Z","timestamp":1729661466973,"version":"3.28.0"},"reference-count":21,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/melcon.2006.1653095","type":"proceedings-article","created":{"date-parts":[[2006,8,2]],"date-time":"2006-08-02T20:10:31Z","timestamp":1154549431000},"page":"288-292","source":"Crossref","is-referenced-by-count":3,"title":["A novel seesaw-type RF MEMS switch"],"prefix":"10.1109","author":[{"given":"J.M.","family":"Cabral","sequence":"first","affiliation":[]},{"given":"A.S.","family":"Holmes","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"publisher","DOI":"10.1109\/84.735350"},{"key":"17","article-title":"Excimer laser applications in microsystems technology","author":"holmes","year":"1997","journal-title":"Make it with Lasers Workshop Oxford"},{"key":"18","article-title":"Laser-assisted assembly for hybrid MEMS","author":"holmes","year":"2000","journal-title":"ICALEO"},{"key":"15","first-page":"104","article-title":"End effects of rare gas flow in short channels and in squeezed-film dampers","author":"veijola","year":"2002","journal-title":"Proc Modeling Simulation Microsyst"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1109\/MEMS.2004.1290569"},{"key":"13","doi-asserted-by":"crossref","first-page":"253","DOI":"10.1115\/1.3261594","article-title":"Analysis of Ultra-Thin Gas Film Lubrication Based on Linearized Boltzmann Equation: First Report - Derivation of a Generalized Lubrication Equation Including Thermal Creep Flow, Journal of Tribology, vol","volume":"110","author":"fukui","year":"1988","journal-title":"Trans ASME"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1063\/1.3057516"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2002.1007406"},{"key":"12","first-page":"203","article-title":"A Full-System Dynamic Model for Complex MEMS Structures","volume":"2","author":"rocha","year":"2004","journal-title":"NSTI-Nanotech"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1109\/6104.930961"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/6668.969936"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1063\/1.371816"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/MCS.1991.148080"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.2003.1217118"},{"article-title":"Bulk-Micromachined Capacitive Servo-Accelerometer","year":"1995","author":"kampen","key":"10"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/22.310584"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/22.904744"},{"key":"5","article-title":"RF and current handling performance of electrostatically actuated microswitches","author":"mcgruer","year":"1999","journal-title":"Sensors Exposition"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.1996.511231"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.2002.1011874"},{"article-title":"Equivalent Circuit Models for Micromechanical Inertial Sensors","year":"1999","author":"veijola","key":"8"}],"event":{"name":"MELECON 2006 - 2006 IEEE Mediterranean Electrotechnical Conference","location":"Benalmadena, Spain"},"container-title":["MELECON 2006 - 2006 IEEE Mediterranean Electrotechnical Conference"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/11001\/34649\/01653095.pdf?arnumber=1653095","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,17]],"date-time":"2017-06-17T04:15:59Z","timestamp":1497672959000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1653095\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":21,"URL":"https:\/\/doi.org\/10.1109\/melcon.2006.1653095","relation":{},"subject":[]}}