{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T06:12:54Z","timestamp":1729663974907,"version":"3.28.0"},"reference-count":9,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,1]]},"DOI":"10.1109\/memsys.2012.6170168","type":"proceedings-article","created":{"date-parts":[[2012,3,26]],"date-time":"2012-03-26T21:46:16Z","timestamp":1332798376000},"page":"440-443","source":"Crossref","is-referenced-by-count":0,"title":["Identification of fatigue crack extension process in zero-tension cyclic stress test of polysilicon films"],"prefix":"10.1109","author":[{"given":"Vu","family":"Le Huy","sequence":"first","affiliation":[]},{"given":"Shoji","family":"Kamiya","sequence":"additional","affiliation":[]},{"given":"Joao","family":"Gaspar","sequence":"additional","affiliation":[]},{"given":"Oliver","family":"Paul","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/j.actamat.2009.03.004"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1016\/S1359-6454(02)00158-1"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/j.cossms.2003.12.002"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1016\/j.actamat.2009.03.004"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2007.892920"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2008.4443685"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/18\/1\/015026"},{"journal-title":"Mechanical Behavior of Ceramics","year":"1979","author":"davidge","key":"9"},{"key":"8","doi-asserted-by":"crossref","first-page":"5465","DOI":"10.1023\/A:1004873029495","article-title":"Investigating the influence of fabrication process and crystal orientation on shear strength of silicon micro-components","volume":"56","author":"chen","year":"2000","journal-title":"Journal of Materials Science"}],"event":{"name":"2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)","start":{"date-parts":[[2012,1,29]]},"location":"Paris, France","end":{"date-parts":[[2012,2,2]]}},"container-title":["2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6165525\/6170071\/06170168.pdf?arnumber=6170168","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T16:08:25Z","timestamp":1497974905000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6170168\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,1]]},"references-count":9,"URL":"https:\/\/doi.org\/10.1109\/memsys.2012.6170168","relation":{},"subject":[],"published":{"date-parts":[[2012,1]]}}}