{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,20]],"date-time":"2025-12-20T22:29:29Z","timestamp":1766269769274},"reference-count":4,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,6,1]],"date-time":"2019-06-01T00:00:00Z","timestamp":1559347200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2019,6,1]],"date-time":"2019-06-01T00:00:00Z","timestamp":1559347200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,6,1]],"date-time":"2019-06-01T00:00:00Z","timestamp":1559347200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,6]]},"DOI":"10.1109\/transducers.2019.8808792","type":"proceedings-article","created":{"date-parts":[[2019,8,22]],"date-time":"2019-08-22T23:48:15Z","timestamp":1566517695000},"page":"2539-2542","source":"Crossref","is-referenced-by-count":1,"title":["Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates"],"prefix":"10.1109","author":[{"given":"Tiago G.","family":"Pestana","sequence":"first","affiliation":[]},{"given":"Rui M. R.","family":"Pinto","sequence":"additional","affiliation":[]},{"given":"Rosana A.","family":"Dias","sequence":"additional","affiliation":[]},{"given":"Marco","family":"Martins","sequence":"additional","affiliation":[]},{"given":"Virginia","family":"Chu","sequence":"additional","affiliation":[]},{"given":"Joao","family":"Gaspar","sequence":"additional","affiliation":[]},{"given":"Joao P.","family":"Conde","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2014.2380440"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1038\/srep02140"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/26\/1\/013001"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.12.022"}],"event":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","start":{"date-parts":[[2019,6,23]]},"location":"Berlin, Germany","end":{"date-parts":[[2019,6,27]]}},"container-title":["2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &amp; Eurosensors XXXIII (TRANSDUCERS &amp; EUROSENSORS XXXIII)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8787960\/8808173\/08808792.pdf?arnumber=8808792","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,17]],"date-time":"2022-07-17T21:49:50Z","timestamp":1658094590000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8808792\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,6]]},"references-count":4,"URL":"https:\/\/doi.org\/10.1109\/transducers.2019.8808792","relation":{},"subject":[],"published":{"date-parts":[[2019,6]]}}}