{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,27]],"date-time":"2026-01-27T07:29:16Z","timestamp":1769498956313,"version":"3.49.0"},"reference-count":178,"publisher":"American Vacuum Society","issue":"3","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2012,5,1]]},"abstract":"<jats:p>Nanostructured carbon materials show a tremendous variety in atomic structure, morphology, properties, and applications. As all properties are ultimately determined by the structure of the material, a thorough understanding of the growth mechanisms that give rise to the particular structure is critical. On many occasions, it has been shown that plasma enhanced growth can be strongly beneficial. This review will describe the authors\u2019 current understanding of plasma enhanced growth of carbon nanotubes, the prototypical example of nanostructured carbon materials, as obtained from experiments, simulations, and modeling. Specific emphasis is put on where experiments and computational approaches correspond, and where they differ. Also, the current status on simulating PECVD growth of some other carbon nanomaterials is reviewed, including amorphous carbon, graphene, and metallofullerenes. Finally, computational challenges with respect to the simulation of PECVD growth are identified.<\/jats:p>","DOI":"10.1116\/1.3702806","type":"journal-article","created":{"date-parts":[[2012,4,16]],"date-time":"2012-04-16T22:05:04Z","timestamp":1334613904000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":49,"title":["PECVD growth of carbon nanotubes: From experiment to simulation"],"prefix":"10.1116","volume":"30","author":[{"given":"Erik C.","family":"Neyts","sequence":"first","affiliation":[{"name":"University of Antwerp Research Group PLASMANT, Dept. of Chemistry, , Universiteitsplein 1, 2610 Wilrijk-Antwerp, Belgium"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"20","published-online":{"date-parts":[[2012,4,16]]},"reference":[{"key":"2023070921065333600_c1","doi-asserted-by":"publisher","first-page":"609","DOI":"10.1016\/S0584-8547(01)00406-2","volume":"57","year":"2002","journal-title":"Spectrochim. Acta, Part B"},{"key":"2023070921065333600_c2","volume-title":"Cold Plasma in Materials Fabrication: From Fundamentals to Applications","year":"1994"},{"key":"2023070921065333600_c3","volume-title":"Plasma Nanoscience","year":"2008"},{"key":"2023070921065333600_c4","volume-title":"Glow Discharge Processes","year":"1980"},{"key":"2023070921065333600_c5","doi-asserted-by":"publisher","first-page":"345","DOI":"10.1002\/cvde.200506451","volume":"12","year":"2006","journal-title":"Chem. Vap. Deposition"},{"key":"2023070921065333600_c6","doi-asserted-by":"publisher","first-page":"1256","DOI":"10.1021\/ja2096317","volume":"134","year":"2012","journal-title":"J. Am. Chem. Soc."},{"key":"2023070921065333600_c7","volume-title":"Principles of Plasma Discharges and Materials Processing","year":"1994"},{"key":"2023070921065333600_c8","doi-asserted-by":"publisher","first-page":"6027","DOI":"10.1063\/1.1465101","volume":"91","year":"2002","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c9","doi-asserted-by":"publisher","first-page":"475","DOI":"10.1166\/jnn.2002.133","volume":"2","year":"2002","journal-title":"J. Nanosci. Nanotechnol."},{"key":"2023070921065333600_c10","doi-asserted-by":"publisher","first-page":"2549","DOI":"10.1063\/1.1343887","volume":"8","year":"2001","journal-title":"Phys. Plasmas"},{"key":"2023070921065333600_c11","doi-asserted-by":"publisher","first-page":"1027","DOI":"10.1109\/TPS.2007.896753","volume":"35","year":"2007","journal-title":"IEEE Trans. Plasma Sci."},{"key":"2023070921065333600_c12","doi-asserted-by":"publisher","first-page":"3462","DOI":"10.1063\/1.124128","volume":"74","year":"1999","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c13","doi-asserted-by":"publisher","first-page":"1864","DOI":"10.1116\/1.582437","volume":"18","year":"2000","journal-title":"J. Vac. Sci. Technol. A"},{"key":"2023070921065333600_c14","doi-asserted-by":"publisher","first-page":"85","DOI":"10.1016\/S0040-6090(02)00788-5","volume":"418","year":"2002","journal-title":"Thin Solid Films"},{"key":"2023070921065333600_c15","doi-asserted-by":"publisher","first-page":"124","DOI":"10.1016\/j.tsf.2005.07.283","volume":"492","year":"2005","journal-title":"Thin Solid Films"},{"key":"2023070921065333600_c16","doi-asserted-by":"publisher","first-page":"455602","DOI":"10.1088\/0957-4484\/18\/45\/455602","volume":"18","year":"2007","journal-title":"Nanotechnology"},{"key":"2023070921065333600_c17","doi-asserted-by":"publisher","first-page":"2682","DOI":"10.1021\/nl800967n","volume":"8","year":"2008","journal-title":"Nano Lett."},{"key":"2023070921065333600_c18","doi-asserted-by":"publisher","first-page":"5141","DOI":"10.1021\/cm050889o","volume":"17","year":"2005","journal-title":"Chem. Mater."},{"key":"2023070921065333600_c19","doi-asserted-by":"publisher","first-page":"174007","DOI":"10.1088\/0022-3727\/44\/17\/174007","volume":"44","year":"2011","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c20","doi-asserted-by":"publisher","first-page":"174002","DOI":"10.1088\/0022-3727\/44\/17\/174002","volume":"44","year":"2011","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c21","doi-asserted-by":"publisher","first-page":"56","DOI":"10.1038\/354056a0","volume":"354","year":"1991","journal-title":"Nature (London)"},{"key":"2023070921065333600_c22","doi-asserted-by":"publisher","first-page":"603","DOI":"10.1038\/363603a0","volume":"363","year":"1993","journal-title":"Nature (London)"},{"key":"2023070921065333600_c23","doi-asserted-by":"publisher","first-page":"605","DOI":"10.1038\/363605a0","volume":"363","year":"1993","journal-title":"Nature (London)"},{"key":"2023070921065333600_c24","doi-asserted-by":"publisher","first-page":"509","DOI":"10.1016\/0009-2614(93)85711-V","volume":"215","year":"1993","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c25","doi-asserted-by":"crossref","first-page":"3","DOI":"10.1007\/3-540-39947-X","volume-title":"Carbon Nanotubes: Synthesis, Structure, Properties and Applications","author":"Dresselhaus","year":"2001"},{"key":"2023070921065333600_c26","doi-asserted-by":"publisher","first-page":"637","DOI":"10.1126\/science.287.5453.637","volume":"287","year":"2000","journal-title":"Science"},{"key":"2023070921065333600_c27","doi-asserted-by":"publisher","first-page":"173","DOI":"10.1016\/S0921-5093(01)01807-X","volume":"334","year":"2002","journal-title":"Mater. Sci. Eng., A"},{"key":"2023070921065333600_c28","doi-asserted-by":"publisher","first-page":"033408","DOI":"10.1103\/PhysRevB.65.033408","volume":"65","year":"2002","journal-title":"Phys. Rev. B"},{"key":"2023070921065333600_c29","doi-asserted-by":"publisher","first-page":"207","DOI":"10.1038\/nnano.2007.89","volume":"2","year":"2007","journal-title":"Nat. Nanotechnol."},{"key":"2023070921065333600_c30","doi-asserted-by":"publisher","first-page":"6044","DOI":"10.1073\/pnas.0900155106","volume":"106","year":"2009","journal-title":"Proc. Natl. Acad. Sci. U.S.A."},{"key":"2023070921065333600_c31","doi-asserted-by":"publisher","first-page":"96","DOI":"10.1021\/nl052145f","volume":"6","year":"2006","journal-title":"Nano Lett."},{"key":"2023070921065333600_c32","doi-asserted-by":"publisher","first-page":"787","DOI":"10.1126\/science.1060928","volume":"297","year":"2002","journal-title":"Science"},{"key":"2023070921065333600_c33","doi-asserted-by":"publisher","first-page":"174004","DOI":"10.1088\/0022-3727\/44\/17\/174004","volume":"44","year":"2011","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c34","doi-asserted-by":"publisher","first-page":"483","DOI":"10.1126\/science.273.5274.483","volume":"273","year":"1996","journal-title":"Science"},{"key":"2023070921065333600_c35","doi-asserted-by":"publisher","first-page":"202","DOI":"10.1021\/nn700049q","volume":"1","year":"2007","journal-title":"ACS Nano"},{"key":"2023070921065333600_c36","doi-asserted-by":"publisher","first-page":"89","DOI":"10.1063\/1.1753975","volume":"4","year":"1964","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c37","doi-asserted-by":"publisher","first-page":"51","DOI":"10.1016\/0021-9517(72)90032-2","volume":"26","year":"1972","journal-title":"J. Catal."},{"key":"2023070921065333600_c38","doi-asserted-by":"publisher","first-page":"621","DOI":"10.1021\/ja109018h","volume":"133","year":"2011","journal-title":"J. Am. Chem. Soc."},{"key":"2023070921065333600_c39","doi-asserted-by":"publisher","first-page":"135","DOI":"10.1063\/1.1589187","volume":"83","year":"2003","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c40","doi-asserted-by":"publisher","first-page":"036101","DOI":"10.1103\/PhysRevLett.95.036101","volume":"95","year":"2005","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c41","doi-asserted-by":"publisher","first-page":"2506","DOI":"10.1073\/pnas.0811946106","volume":"106","year":"2009","journal-title":"Proc. Natl. Acad. Sci. U.S.A."},{"key":"2023070921065333600_c42","doi-asserted-by":"publisher","first-page":"174005","DOI":"10.1088\/0022-3727\/44\/17\/174005","volume":"44","year":"2011","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c43","doi-asserted-by":"publisher","first-page":"213001","DOI":"10.1088\/0022-3727\/42\/21\/213001","volume":"42","year":"2009","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c44","doi-asserted-by":"publisher","first-page":"921","DOI":"10.1021\/nl049629g","volume":"4","year":"2004","journal-title":"Nano Lett."},{"key":"2023070921065333600_c45","doi-asserted-by":"publisher","first-page":"4661","DOI":"10.1063\/1.1630167","volume":"83","year":"2003","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c46","doi-asserted-by":"publisher","first-page":"1171","DOI":"10.1016\/j.diamond.2003.11.046","volume":"13","year":"2004","journal-title":"Diamond Relat. Mater."},{"key":"2023070921065333600_c47","doi-asserted-by":"publisher","first-page":"11186","DOI":"10.1021\/ja036622c","volume":"125","year":"2003","journal-title":"J. Am. Chem. Soc."},{"key":"2023070921065333600_c48","doi-asserted-by":"publisher","first-page":"198","DOI":"10.1016\/j.cplett.2004.01.116","volume":"387","year":"2004","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c49","doi-asserted-by":"publisher","first-page":"15770","DOI":"10.1021\/ja077886s","volume":"129","year":"2007","journal-title":"J. Am. Chem. Soc."},{"key":"2023070921065333600_c50","doi-asserted-by":"publisher","first-page":"9570","DOI":"10.1021\/ja103362j","volume":"132","year":"2010","journal-title":"J. Am. Chem. Soc."},{"key":"2023070921065333600_c51","doi-asserted-by":"publisher","first-page":"1107","DOI":"10.1021\/nl060068y","volume":"6","year":"2006","journal-title":"Nano Lett."},{"key":"2023070921065333600_c52","doi-asserted-by":"publisher","first-page":"064304","DOI":"10.1063\/1.3091394","volume":"105","year":"2009","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c53","doi-asserted-by":"publisher","first-page":"6387","DOI":"10.1063\/1.1728293","volume":"95","year":"2004","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c54","doi-asserted-by":"publisher","first-page":"93","DOI":"10.1016\/0925-9635(96)80011-2","volume":"5","year":"1996","journal-title":"Diamond Relat. Mater."},{"key":"2023070921065333600_c55","doi-asserted-by":"publisher","first-page":"882","DOI":"10.1038\/nmat2531","volume":"8","year":"2009","journal-title":"Nature Mater."},{"key":"2023070921065333600_c56","doi-asserted-by":"publisher","first-page":"469","DOI":"10.1016\/j.cplett.2006.01.110","volume":"421","year":"2006","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c57","doi-asserted-by":"publisher","first-page":"334","DOI":"10.1016\/j.diamond.2011.01.031","volume":"20","year":"2011","journal-title":"Diamond Relat. Mater."},{"key":"2023070921065333600_c58","doi-asserted-by":"publisher","first-page":"974","DOI":"10.1126\/science.1133781","volume":"314","year":"2006","journal-title":"Science"},{"key":"2023070921065333600_c59","doi-asserted-by":"publisher","first-page":"5308","DOI":"10.1063\/1.1410322","volume":"90","year":"2001","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c60","doi-asserted-by":"publisher","first-page":"830","DOI":"10.1063\/1.1306658","volume":"77","year":"2000","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c61","doi-asserted-by":"publisher","first-page":"469","DOI":"10.1016\/j.cplett.2004.08.084","volume":"396","year":"2004","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c62","doi-asserted-by":"publisher","first-page":"422","DOI":"10.1016\/j.cplett.2003.10.007","volume":"381","year":"2003","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c63","doi-asserted-by":"publisher","first-page":"242","DOI":"10.1016\/j.cplett.2005.12.105","volume":"421","year":"2006","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c64","doi-asserted-by":"publisher","first-page":"61","DOI":"10.1016\/j.diamond.2008.09.022","volume":"18","year":"2009","journal-title":"Diamond Relat. Mater."},{"key":"2023070921065333600_c65","doi-asserted-by":"publisher","first-page":"255607","DOI":"10.1088\/0957-4484\/19\/25\/255607","volume":"19","year":"2008","journal-title":"Nanotechnology"},{"key":"2023070921065333600_c66","doi-asserted-by":"publisher","first-page":"2601","DOI":"10.1063\/1.1796529","volume":"85","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c67","doi-asserted-by":"publisher","first-page":"317","DOI":"10.1021\/nl035097c","volume":"4","year":"2004","journal-title":"Nano Lett."},{"key":"2023070921065333600_c68","doi-asserted-by":"publisher","first-page":"12498","DOI":"10.1021\/ja054108w","volume":"127","year":"2005","journal-title":"J. Am. Chem. Soc."},{"key":"2023070921065333600_c69","doi-asserted-by":"publisher","first-page":"02BA01","DOI":"10.1143\/JJAP.49.02BA01","volume":"49","year":"2010","journal-title":"Jpn. J. Appl. Phys."},{"key":"2023070921065333600_c70","doi-asserted-by":"publisher","first-page":"315203","DOI":"10.1088\/0022-3727\/43\/31\/315203","volume":"43","year":"2010","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c71","doi-asserted-by":"publisher","first-page":"205201","DOI":"10.1088\/0022-3727\/43\/20\/205201","volume":"43","year":"2010","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c72","doi-asserted-by":"publisher","first-page":"6284","DOI":"10.1063\/1.1568155","volume":"93","year":"2003","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c73","doi-asserted-by":"publisher","first-page":"014302","DOI":"10.1063\/1.2150599","volume":"99","year":"2006","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c74","doi-asserted-by":"publisher","first-page":"8372","DOI":"10.1021\/nn2030989","volume":"5","year":"2011","journal-title":"ACS Nano"},{"key":"2023070921065333600_c75","doi-asserted-by":"publisher","first-page":"2713","DOI":"10.1063\/1.1642762","volume":"95","year":"2004","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c76","doi-asserted-by":"publisher","first-page":"750","DOI":"10.1063\/1.1525854","volume":"93","year":"2003","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c77","doi-asserted-by":"publisher","first-page":"132004","DOI":"10.1088\/0022-3727\/41\/13\/132004","volume":"41","year":"2008","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c78","doi-asserted-by":"publisher","first-page":"2285","DOI":"10.1088\/0022-3727\/40\/8\/S07","volume":"40","year":"2007","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c79","doi-asserted-by":"publisher","first-page":"1819","DOI":"10.1023\/A:1023252432202","volume":"38","year":"2003","journal-title":"J. Mater. Sci."},{"key":"2023070921065333600_c80","doi-asserted-by":"publisher","first-page":"925","DOI":"10.1088\/0957-4484\/16\/6\/050","volume":"16","year":"2005","journal-title":"Nanotechnology"},{"key":"2023070921065333600_c81","doi-asserted-by":"publisher","first-page":"2471","DOI":"10.1103\/PhysRevLett.55.2471","volume":"55","year":"1985","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c82","doi-asserted-by":"publisher","first-page":"275504","DOI":"10.1103\/PhysRevLett.87.275504","volume":"87","year":"2001","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c83","doi-asserted-by":"publisher","first-page":"755","DOI":"10.1007\/s12274-009-9078-8","volume":"2","year":"2009","journal-title":"Nano Res."},{"key":"2023070921065333600_c84","doi-asserted-by":"publisher","first-page":"096103","DOI":"10.1103\/PhysRevLett.95.096103","volume":"95","year":"2005","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c85","doi-asserted-by":"publisher","first-page":"3413","DOI":"10.1021\/nn900784f","volume":"3","year":"2009","journal-title":"ACS Nano"},{"key":"2023070921065333600_c86","doi-asserted-by":"publisher","first-page":"1375","DOI":"10.1021\/ar100064g","volume":"43","year":"2010","journal-title":"Acc. Chem. Res."},{"key":"2023070921065333600_c87","doi-asserted-by":"publisher","first-page":"1437","DOI":"10.1021\/nn8001906","volume":"2","year":"2008","journal-title":"ACS Nano"},{"key":"2023070921065333600_c88","doi-asserted-by":"publisher","first-page":"20198","DOI":"10.1021\/jp9053549","volume":"113","year":"2009","journal-title":"J. Phys. Chem. C"},{"key":"2023070921065333600_c89","doi-asserted-by":"publisher","first-page":"18045","DOI":"10.1021\/jp1045707","volume":"114","year":"2010","journal-title":"J. Phys. Chem. C"},{"key":"2023070921065333600_c90","doi-asserted-by":"publisher","first-page":"15699","DOI":"10.1021\/ja106264q","volume":"132","year":"2010","journal-title":"J. Am. Chem. Soc."},{"key":"2023070921065333600_c91","doi-asserted-by":"publisher","first-page":"6114","DOI":"10.1021\/nn101822s","volume":"4","year":"2010","journal-title":"ACS Nano"},{"key":"2023070921065333600_c92","doi-asserted-by":"publisher","first-page":"6665","DOI":"10.1021\/nn102095y","volume":"4","year":"2010","journal-title":"ACS Nano"},{"key":"2023070921065333600_c93","doi-asserted-by":"publisher","first-page":"17225","DOI":"10.1021\/ja204023c","volume":"133","year":"2011","journal-title":"J. Am. Chem. Soc."},{"key":"2023070921065333600_c94","doi-asserted-by":"publisher","first-page":"511","DOI":"10.1021\/nn800769w","volume":"3","year":"2009","journal-title":"ACS Nano"},{"key":"2023070921065333600_c95","doi-asserted-by":"publisher","first-page":"014109","DOI":"10.1103\/PhysRevB.79.014109","volume":"79","year":"2009","journal-title":"Phys. Rev. B"},{"key":"2023070921065333600_c96","doi-asserted-by":"publisher","first-page":"056105","DOI":"10.1103\/PhysRevLett.100.056105","volume":"100","year":"2008","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c97","doi-asserted-by":"publisher","first-page":"145501","DOI":"10.1103\/PhysRevLett.90.145501","volume":"90","year":"2003","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c98","doi-asserted-by":"publisher","first-page":"2393","DOI":"10.1103\/PhysRevLett.78.2393","volume":"78","year":"1998","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c99","doi-asserted-by":"publisher","first-page":"3193","DOI":"10.1103\/PhysRevLett.85.3193","volume":"85","year":"2000","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c100","doi-asserted-by":"publisher","first-page":"470","DOI":"10.1016\/j.carbon.2009.09.064","volume":"48","year":"2010","journal-title":"Carbon"},{"key":"2023070921065333600_c101","doi-asserted-by":"publisher","first-page":"481","DOI":"10.1016\/j.cplett.2006.03.017","volume":"422","year":"2006","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c102","doi-asserted-by":"publisher","first-page":"2251","DOI":"10.1016\/j.carbon.2005.03.048","volume":"43","year":"2005","journal-title":"Carbon"},{"key":"2023070921065333600_c103","doi-asserted-by":"publisher","first-page":"115419","DOI":"10.1103\/PhysRevB.73.115419","volume":"73","year":"2006","journal-title":"Phys. Rev. B"},{"key":"2023070921065333600_c104","doi-asserted-by":"publisher","first-page":"155","DOI":"10.1080\/03602457708079636","volume":"16","year":"1977","journal-title":"Catal. Rev. - Sci. Eng."},{"key":"2023070921065333600_c105","doi-asserted-by":"publisher","first-page":"17","DOI":"10.1007\/s00214-010-0736-4","volume":"128","year":"2011","journal-title":"Theor. Chem. Acc."},{"key":"2023070921065333600_c106","doi-asserted-by":"publisher","first-page":"426","DOI":"10.1038\/nature02278","volume":"427","year":"2004","journal-title":"Nature (London)"},{"key":"2023070921065333600_c107","doi-asserted-by":"publisher","first-page":"939","DOI":"10.1021\/nn901761u","volume":"4","year":"2010","journal-title":"ACS Nano"},{"key":"2023070921065333600_c108","doi-asserted-by":"publisher","first-page":"014705","DOI":"10.1063\/1.3509387","volume":"134","year":"2011","journal-title":"J. Chem. Phys."},{"key":"2023070921065333600_c109","doi-asserted-by":"publisher","first-page":"2215","DOI":"10.1016\/j.carbon.2005.03.021","volume":"43","year":"2005","journal-title":"Carbon"},{"key":"2023070921065333600_c110","doi-asserted-by":"publisher","first-page":"S575","DOI":"10.1088\/0957-4484\/16\/7\/035","volume":"16","year":"2005","journal-title":"Nanotechnology"},{"key":"2023070921065333600_c111","doi-asserted-by":"publisher","first-page":"224501","DOI":"10.1063\/1.3266947","volume":"131","year":"2009","journal-title":"J. Chem. Phys."},{"key":"2023070921065333600_c112","doi-asserted-by":"publisher","first-page":"187","DOI":"10.1016\/S0921-4526(02)00896-7","volume":"323","year":"2002","journal-title":"Physica B"},{"key":"2023070921065333600_c113","doi-asserted-by":"publisher","first-page":"381","DOI":"10.1016\/j.cplett.2003.10.080","volume":"382","year":"2003","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c114","doi-asserted-by":"publisher","first-page":"1853","DOI":"10.1021\/cm011613t","volume":"14","year":"2002","journal-title":"Chem. Mater."},{"key":"2023070921065333600_c115","doi-asserted-by":"publisher","first-page":"2775","DOI":"10.1063\/1.1770424","volume":"121","year":"2004","journal-title":"J. Chem. Phys."},{"key":"2023070921065333600_c116","doi-asserted-by":"publisher","first-page":"309","DOI":"10.1016\/j.cplett.2004.06.056","volume":"393","year":"2004","journal-title":"Chem. Phys. Lett."},{"key":"2023070921065333600_c117","doi-asserted-by":"publisher","first-page":"5254","DOI":"10.1016\/j.apsusc.2005.12.022","volume":"252","year":"2006","journal-title":"Appl. Surf. Sci."},{"key":"2023070921065333600_c118","doi-asserted-by":"publisher","first-page":"243","DOI":"10.1016\/j.commatsci.2004.08.010","volume":"35","year":"2006","journal-title":"Comput. Mater. Sci."},{"key":"2023070921065333600_c119","doi-asserted-by":"publisher","first-page":"6952","DOI":"10.1021\/jp911905p","volume":"114","year":"2010","journal-title":"J. Phys. Chem. C"},{"key":"2023070921065333600_c120","article-title":"Enhanced carbon nanotube nucleation by low energy ion bombardment"},{"key":"2023070921065333600_c121","doi-asserted-by":"publisher","first-page":"223","DOI":"10.1007\/s00339-005-3256-7","volume":"81","year":"2005","journal-title":"Appl. Phys. A"},{"key":"2023070921065333600_c122","doi-asserted-by":"publisher","first-page":"3454","DOI":"10.1021\/jp911629j","volume":"114","year":"2010","journal-title":"J. Phys. Chem. C"},{"key":"2023070921065333600_c123","doi-asserted-by":"publisher","first-page":"354","DOI":"10.1016\/j.jcat.2005.02.010","volume":"231","year":"2005","journal-title":"J. Catal."},{"key":"2023070921065333600_c124","doi-asserted-by":"publisher","first-page":"1821","DOI":"10.1016\/j.proci.2006.07.224","volume":"31","year":"2007","journal-title":"Proc. Combust. Inst."},{"key":"2023070921065333600_c125","doi-asserted-by":"publisher","first-page":"065304","DOI":"10.1088\/0022-3727\/41\/6\/065304","volume":"41","year":"2008","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c126","doi-asserted-by":"publisher","first-page":"251501","DOI":"10.1063\/1.2750392","volume":"90","year":"2007","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c127","doi-asserted-by":"publisher","first-page":"015208","DOI":"10.1088\/0022-3727\/42\/1\/015208","volume":"42","year":"2009","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c128","doi-asserted-by":"publisher","first-page":"4773","DOI":"10.1021\/jp906893m","volume":"114","year":"2010","journal-title":"J. Phys. Chem. C"},{"key":"2023070921065333600_c129","doi-asserted-by":"publisher","first-page":"90","DOI":"10.1016\/S0169-4332(02)00892-9","volume":"199","year":"2002","journal-title":"Appl. Surf. Sci."},{"key":"2023070921065333600_c130","doi-asserted-by":"publisher","first-page":"165607","DOI":"10.1088\/0957-4484\/19\/16\/165607","volume":"19","year":"2008","journal-title":"Nanotechnology"},{"key":"2023070921065333600_c131","doi-asserted-by":"publisher","first-page":"115605","DOI":"10.1088\/0957-4484\/20\/11\/115605","volume":"20","year":"2009","journal-title":"Nanotechnology"},{"key":"2023070921065333600_c132","doi-asserted-by":"publisher","first-page":"3152","DOI":"10.1002\/aic.11959","volume":"55","year":"2009","journal-title":"AIChE J."},{"key":"2023070921065333600_c133","doi-asserted-by":"publisher","first-page":"063108","DOI":"10.1063\/1.2841845","volume":"92","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c134","doi-asserted-by":"publisher","first-page":"073308","DOI":"10.1063\/1.2996272","volume":"104","year":"2008","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c135","doi-asserted-by":"publisher","first-page":"103501","DOI":"10.1063\/1.2988781","volume":"15","year":"2008","journal-title":"Phys. Plasmas"},{"key":"2023070921065333600_c136","doi-asserted-by":"publisher","first-page":"375603","DOI":"10.1088\/0957-4484\/20\/37\/375603","volume":"20","year":"2009","journal-title":"Nanotechnology"},{"key":"2023070921065333600_c137","doi-asserted-by":"publisher","first-page":"174030","DOI":"10.1088\/0022-3727\/44\/17\/174030","volume":"44","year":"2011","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c138","doi-asserted-by":"publisher","first-page":"666","DOI":"10.1126\/science.1102896","volume":"306","year":"2004","journal-title":"Science"},{"key":"2023070921065333600_c139","doi-asserted-by":"publisher","first-page":"201","DOI":"10.1038\/nature04235","volume":"438","year":"2005","journal-title":"Nature (London)"},{"key":"2023070921065333600_c140","doi-asserted-by":"publisher","first-page":"206805","DOI":"10.1103\/PhysRevLett.98.206805","volume":"98","year":"2007","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c141","doi-asserted-by":"publisher","first-page":"351","DOI":"10.1016\/j.ssc.2008.02.024","volume":"146","year":"2008","journal-title":"Solid State Commun."},{"key":"2023070921065333600_c142","doi-asserted-by":"publisher","first-page":"490","DOI":"10.1126\/science.1136836","volume":"315","year":"2008","journal-title":"Science"},{"key":"2023070921065333600_c143","doi-asserted-by":"publisher","first-page":"706","DOI":"10.1038\/nature07719","volume":"457","year":"2009","journal-title":"Nature (London)"},{"key":"2023070921065333600_c144","doi-asserted-by":"publisher","first-page":"538","DOI":"10.1038\/nnano.2008.210","volume":"3","year":"2008","journal-title":"Nat. Nanotechnol."},{"key":"2023070921065333600_c145","doi-asserted-by":"publisher","first-page":"270","DOI":"10.1038\/nnano.2008.83","volume":"3","year":"2008","journal-title":"Nat. Nanotechnol."},{"key":"2023070921065333600_c146","doi-asserted-by":"publisher","first-page":"1522","DOI":"10.1021\/nn103428k","volume":"5","year":"2011","journal-title":"ACS Nano"},{"key":"2023070921065333600_c147","doi-asserted-by":"publisher","first-page":"113404","DOI":"10.1103\/PhysRevB.73.113404","volume":"73","year":"2006","journal-title":"Phys. Rev. B"},{"key":"2023070921065333600_c148","doi-asserted-by":"publisher","first-page":"77","DOI":"10.1016\/j.susc.2007.09.045","volume":"602","year":"2008","journal-title":"Surf. Sci."},{"key":"2023070921065333600_c149","doi-asserted-by":"publisher","first-page":"17695","DOI":"10.1021\/jp2051454","volume":"115","year":"2011","journal-title":"J. Phys. Chem. C"},{"key":"2023070921065333600_c150","doi-asserted-by":"publisher","first-page":"2953","DOI":"10.1063\/1.1660654","volume":"42","year":"1971","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c151","doi-asserted-by":"publisher","first-page":"129","DOI":"10.1016\/S0927-796X(02)00005-0","volume":"37","year":"2002","journal-title":"Mater. Sci. Eng. R"},{"key":"2023070921065333600_c152","doi-asserted-by":"publisher","first-page":"14067","DOI":"10.1039\/c0cp00637h","volume":"12","year":"2010","journal-title":"Phys. Chem. Chem. Phys."},{"key":"2023070921065333600_c153","doi-asserted-by":"publisher","first-page":"1826","DOI":"10.1063\/1.1536012","volume":"93","year":"2003","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c154","doi-asserted-by":"publisher","first-page":"1283","DOI":"10.1016\/j.jnucmat.2007.01.180","volume":"363","year":"2007","journal-title":"J. Nucl. Mater."},{"key":"2023070921065333600_c155","doi-asserted-by":"publisher","first-page":"270","DOI":"10.1016\/j.jnucmat.2007.11.012","volume":"375","year":"2008","journal-title":"J. Nucl. Mater."},{"key":"2023070921065333600_c156","doi-asserted-by":"publisher","first-page":"1663","DOI":"10.1016\/j.diamond.2006.02.003","volume":"15","year":"2006","journal-title":"Diamond Relat. Mater."},{"key":"2023070921065333600_c157","doi-asserted-by":"publisher","first-page":"014902","DOI":"10.1063\/1.2150149","volume":"99","year":"2006","journal-title":"J. Appl. Phys."},{"key":"2023070921065333600_c158","doi-asserted-by":"publisher","first-page":"315","DOI":"10.1016\/j.nimb.2004.10.063","volume":"228","year":"2005","journal-title":"Nucl. Instrum. Methods Phys. Res. B"},{"key":"2023070921065333600_c159","doi-asserted-by":"publisher","first-page":"032006","DOI":"10.1088\/0022-3727\/41\/3\/032006","volume":"41","year":"2008","journal-title":"J. Phys. D: Appl. Phys."},{"key":"2023070921065333600_c160","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1103\/PhysRevB.68.024201","volume":"68","year":"2003","journal-title":"Phys. Rev. B"},{"key":"2023070921065333600_c161","doi-asserted-by":"publisher","first-page":"16","DOI":"10.1016\/S0927-0256(02)00419-6","volume":"24","year":"2003","journal-title":"Comput. Mater. Sci."},{"key":"2023070921065333600_c162","doi-asserted-by":"publisher","first-page":"2901","DOI":"10.1088\/0953-8984\/14\/11\/308","volume":"14","year":"2002","journal-title":"J. Phys.: Condens. Mater."},{"key":"2023070921065333600_c163","doi-asserted-by":"publisher","first-page":"2150","DOI":"10.1016\/j.physleta.2010.01.059","volume":"374","year":"2010","journal-title":"Phys. Lett. A"},{"key":"2023070921065333600_c164","doi-asserted-by":"publisher","first-page":"088102","DOI":"10.1088\/0256-307X\/27\/8\/088102","volume":"27","year":"2010","journal-title":"Chin. Phys. Lett."},{"key":"2023070921065333600_c165","first-page":"245","volume-title":"Plasma Processing of Nanomaterials","author":"Sankaran","year":"2012"},{"key":"2023070921065333600_c166","doi-asserted-by":"publisher","first-page":"1873","DOI":"10.1016\/j.diamond.2004.05.011","volume":"13","year":"2004","journal-title":"Diamond Relat. Mater."},{"key":"2023070921065333600_c167","doi-asserted-by":"publisher","first-page":"2030","DOI":"10.1039\/b406468m","volume":"14","year":"2004","journal-title":"J. Mater. Chem."},{"key":"2023070921065333600_c168","doi-asserted-by":"publisher","first-page":"141922","DOI":"10.1063\/1.2193803","volume":"88","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"2023070921065333600_c169","doi-asserted-by":"publisher","first-page":"312","DOI":"10.1002\/cvde.200606551","volume":"13","year":"2007","journal-title":"Chem. Vap. Deposition"},{"key":"2023070921065333600_c170","doi-asserted-by":"publisher","first-page":"1352","DOI":"10.1103\/PhysRevLett.69.1352","volume":"69","year":"1992","journal-title":"Phys. Rev. Lett."},{"key":"2023070921065333600_c171","doi-asserted-by":"publisher","first-page":"8370","DOI":"10.1063\/1.475037","volume":"107","year":"1997","journal-title":"J. Chem. Phys."},{"key":"2023070921065333600_c172","doi-asserted-by":"publisher","first-page":"495","DOI":"10.1023\/A:1022524214082","volume":"255","year":"2003","journal-title":"J. Radioanal. Nucl. Chem."},{"key":"2023070921065333600_c173","doi-asserted-by":"publisher","first-page":"3484","DOI":"10.1063\/1.1491898","volume":"117","year":"2002","journal-title":"J. Chem. Phys."},{"key":"2023070921065333600_c174","doi-asserted-by":"publisher","first-page":"1028","DOI":"10.1016\/j.carbon.2008.12.023","volume":"47","year":"2009","journal-title":"Carbon"},{"key":"2023070921065333600_c175","doi-asserted-by":"publisher","first-page":"1013","DOI":"10.1016\/j.carbon.2010.11.009","volume":"49","year":"2011","journal-title":"Carbon"},{"key":"2023070921065333600_c176","doi-asserted-by":"publisher","first-page":"1206015","DOI":"10.1585\/pfr.6.1206015","volume":"6","year":"2011","journal-title":"Plasma Fusion Res.: Rapid Commun."},{"key":"2023070921065333600_c177","doi-asserted-by":"publisher","first-page":"034704","DOI":"10.1063\/1.3058595","volume":"130","year":"2009","journal-title":"J. Chem. Phys."},{"key":"2023070921065333600_c178","doi-asserted-by":"publisher","first-page":"9396","DOI":"10.1021\/jp004368u","volume":"105","year":"2001","journal-title":"J. Phys. Chem. A"}],"container-title":["Journal of Vacuum Science &amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/avs\/jvb\/article-pdf\/doi\/10.1116\/1.3702806\/15677823\/030803_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/avs\/jvb\/article-pdf\/doi\/10.1116\/1.3702806\/15677823\/030803_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,7,9]],"date-time":"2023-07-09T21:07:03Z","timestamp":1688936823000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jvb\/article\/30\/3\/030803\/466918\/PECVD-growth-of-carbon-nanotubes-From-experiment"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,4,16]]},"references-count":178,"journal-issue":{"issue":"3","published-print":{"date-parts":[[2012,5,1]]}},"URL":"https:\/\/doi.org\/10.1116\/1.3702806","relation":{},"ISSN":["2166-2746","2166-2754"],"issn-type":[{"value":"2166-2746","type":"print"},{"value":"2166-2754","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2012,5]]},"published":{"date-parts":[[2012,4,16]]},"article-number":"030803"}}