{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,4]],"date-time":"2026-06-04T11:19:45Z","timestamp":1780571985702,"version":"3.54.1"},"reference-count":204,"publisher":"American Vacuum Society","issue":"4","license":[{"start":{"date-parts":[[2020,10,14]],"date-time":"2020-10-14T00:00:00Z","timestamp":1602633600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"},{"start":{"date-parts":[[2020,10,14]],"date-time":"2020-10-14T00:00:00Z","timestamp":1602633600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100000001","name":"National Science Foundation","doi-asserted-by":"publisher","award":["DMR-1906325"],"award-info":[{"award-number":["DMR-1906325"]}],"id":[{"id":"10.13039\/100000001","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2020,12,1]]},"abstract":"<jats:p>Nonclassical states of light are an essential resource for many emerging quantum technologies and applications ranging from information processing, encrypted communications, and networking to sensing, metrology, and imaging. Nonlinear optical processes in solid-state materials are widely used for generating quantum light, including single photons, entangled-photon pairs, and quadrature-squeezed states. Recent advances in nonlinear photonics have enabled the functionality of benchtop nonlinear instruments to be scaled down to a single chip without sacrificing efficiency or degrading the key performance metrics. The dramatic improvement in the size, weight, power, cost, and stability enabled by photonic integrated circuits has been essential for enabling the chip-scale generation, manipulation, and detection of quantum light at a steadily increasing degree of complexity and scale. Within the last decade, the authors have seen the progression from few-component photonic circuits operating on two photons to arrays of 18 identical heralded single-photon sources and reconfigurable devices operating with more than 650 components for multidimensional entanglement and arbitrary two-photon quantum gates. In this review, the authors summarize the history and recent key technological developments of chip-scale nonlinear quantum light generation based on integrated nonlinear photonics, recent advances in heterogeneous integrated methods, and approaches for system-level integration and demonstrated applications.<\/jats:p>","DOI":"10.1116\/5.0020684","type":"journal-article","created":{"date-parts":[[2020,10,14]],"date-time":"2020-10-14T13:14:44Z","timestamp":1602681284000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":100,"title":["Chip-scale nonlinear photonics for quantum light generation"],"prefix":"10.1116","volume":"2","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-6265-2034","authenticated-orcid":false,"given":"Galan","family":"Moody","sequence":"first","affiliation":[{"name":"Electrical and Computer Engineering Department, University of California 1 , Santa Barbara, California 93106, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lin","family":"Chang","sequence":"additional","affiliation":[{"name":"Electrical and Computer Engineering Department, University of California 1 , Santa Barbara, California 93106, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5308-8857","authenticated-orcid":false,"given":"Trevor J.","family":"Steiner","sequence":"additional","affiliation":[{"name":"Materials Department, University of California 2 , Santa Barbara, California 93106, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"John E.","family":"Bowers","sequence":"additional","affiliation":[{"name":"Electrical and Computer Engineering Department, University of California 1 , Santa Barbara, California 93106, USA"},{"name":"Materials Department, University of California 2 , Santa Barbara, California 93106, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"20","published-online":{"date-parts":[[2020,10,14]]},"reference":[{"key":"2024031517112806600_c1","doi-asserted-by":"publisher","first-page":"687","DOI":"10.1038\/nphoton.2009.229","volume":"3","year":"2009","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c2","doi-asserted-by":"publisher","first-page":"210403","DOI":"10.1103\/PhysRevLett.92.210403","volume":"92","year":"2004","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c3","doi-asserted-by":"publisher","first-page":"2556","DOI":"10.1103\/PhysRevLett.83.2556","volume":"83","year":"1999","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c4","doi-asserted-by":"publisher","first-page":"7479","DOI":"10.1364\/OE.15.007479","volume":"15","year":"2007","journal-title":"Opt. Express"},{"key":"2024031517112806600_c5","doi-asserted-by":"publisher","first-page":"31802","DOI":"10.1103\/PhysRevA.70.031802","volume":"70","year":"2004","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c6","doi-asserted-by":"publisher","first-page":"14870","DOI":"10.1364\/OE.15.014870","volume":"15","year":"2007","journal-title":"Opt. Express"},{"key":"2024031517112806600_c7","doi-asserted-by":"publisher","first-page":"121","DOI":"10.1002\/9781119009719.ch5","volume":"1","year":"2015","journal-title":"Photonics"},{"key":"2024031517112806600_c8","doi-asserted-by":"publisher","first-page":"13522","DOI":"10.1364\/OE.21.013522","volume":"21","year":"2013","journal-title":"Opt. Express"},{"key":"2024031517112806600_c9","doi-asserted-by":"publisher","first-page":"4337","DOI":"10.1103\/PhysRevLett.75.4337","volume":"75","year":"1995","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c10","doi-asserted-by":"publisher","first-page":"4251","DOI":"10.1038\/ncomms5251","volume":"5","year":"2014","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c11","doi-asserted-by":"publisher","first-page":"19309","DOI":"10.1364\/OE.27.019309","volume":"27","year":"2019","journal-title":"Opt. Express"},{"key":"2024031517112806600_c12","doi-asserted-by":"publisher","first-page":"1026","DOI":"10.1038\/nnano.2017.218","volume":"12","year":"2017","journal-title":"Nat. Nanotechnol."},{"key":"2024031517112806600_c13","doi-asserted-by":"publisher","first-page":"631","DOI":"10.1038\/nphoton.2016.186","volume":"10","year":"2016","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c14","doi-asserted-by":"publisher","first-page":"041101","DOI":"10.1063\/5.0003320","volume":"91","year":"2020","journal-title":"Rev. Sci. Instrum."},{"key":"2024031517112806600_c15","doi-asserted-by":"publisher","first-page":"2582","DOI":"10.1038\/ncomms3582","volume":"4","year":"2013","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c16","doi-asserted-by":"publisher","first-page":"7468","DOI":"10.1038\/srep07468","volume":"4","year":"2014","journal-title":"Sci. Rep."},{"key":"2024031517112806600_c17","doi-asserted-by":"publisher","first-page":"13984","DOI":"10.1038\/ncomms13984","volume":"8","year":"2017","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c18","doi-asserted-by":"publisher","first-page":"135","DOI":"10.1103\/RevModPhys.79.135","volume":"79","year":"2007","journal-title":"Rev. Mod. Phys."},{"key":"2024031517112806600_c19","doi-asserted-by":"publisher","first-page":"63828","DOI":"10.1103\/PhysRevA.78.063828","volume":"78","year":"2008","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c20","doi-asserted-by":"publisher","first-page":"613","DOI":"10.1038\/nphoton.2013.177","volume":"7","year":"2013","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c21","doi-asserted-by":"publisher","first-page":"231108","DOI":"10.1103\/PhysRevLett.123.231108","volume":"123","year":"2019","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c22","year":"2015"},{"key":"2024031517112806600_c23","doi-asserted-by":"publisher","first-page":"250402","DOI":"10.1103\/PhysRevLett.115.250402","volume":"115","year":"2015","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c24","doi-asserted-by":"publisher","first-page":"1696","DOI":"10.1103\/PhysRevA.1.1696","volume":"1","year":"1970","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c25","doi-asserted-by":"publisher","first-page":"1881","DOI":"10.1088\/0034-4885\/41\/12\/002","volume":"41","year":"1978","journal-title":"Rep. Prog. Phys."},{"key":"2024031517112806600_c26","doi-asserted-by":"publisher","first-page":"4714","DOI":"10.1103\/PhysRevLett.75.4714","volume":"75","year":"1995","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c27","doi-asserted-by":"publisher","first-page":"646","DOI":"10.1126\/science.1155441","volume":"320","year":"2008","journal-title":"Science"},{"key":"2024031517112806600_c28","doi-asserted-by":"publisher","first-page":"045003","DOI":"10.1088\/1367-2630\/14\/4\/045003","volume":"14","year":"2012","journal-title":"New J. Phys."},{"key":"2024031517112806600_c29","doi-asserted-by":"publisher","first-page":"285","DOI":"10.1126\/science.aar7053","volume":"360","year":"2018","journal-title":"Science"},{"key":"2024031517112806600_c30","doi-asserted-by":"publisher","first-page":"534","DOI":"10.1038\/s41566-018-0236-y","volume":"12","year":"2018","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c31","doi-asserted-by":"publisher","first-page":"104","DOI":"10.1038\/nphoton.2013.339","volume":"8","year":"2014","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c32","doi-asserted-by":"publisher","first-page":"1221","DOI":"10.1126\/science.1173731","volume":"325","year":"2009","journal-title":"Science"},{"key":"2024031517112806600_c33","doi-asserted-by":"publisher","first-page":"1500","DOI":"10.1126\/science.1193515","volume":"329","year":"2010","journal-title":"Science"},{"key":"2024031517112806600_c34","doi-asserted-by":"publisher","first-page":"45","DOI":"10.1038\/nphoton.2011.283","volume":"6","year":"2012","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c35","doi-asserted-by":"publisher","first-page":"060301","DOI":"10.1103\/PhysRevA.84.060301","volume":"84","year":"2011","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c36","doi-asserted-by":"publisher","first-page":"093603","DOI":"10.1103\/PhysRevLett.113.093603","volume":"113","year":"2014","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c37","doi-asserted-by":"publisher","first-page":"545","DOI":"10.1038\/nphoton.2013.112","volume":"7","year":"2013","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c38","doi-asserted-by":"publisher","first-page":"540","DOI":"10.1038\/nphoton.2013.102","volume":"7","year":"2013","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c39","doi-asserted-by":"publisher","first-page":"798","DOI":"10.1126\/science.1231692","volume":"339","year":"2013","journal-title":"Science"},{"key":"2024031517112806600_c40","doi-asserted-by":"publisher","first-page":"621","DOI":"10.1038\/nphoton.2014.152","volume":"8","year":"2014","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c41","doi-asserted-by":"publisher","first-page":"794","DOI":"10.1126\/science.1231440","volume":"339","year":"2013","journal-title":"Science"},{"key":"2024031517112806600_c42","doi-asserted-by":"publisher","first-page":"407","DOI":"10.1364\/OPTICA.3.000407","volume":"3","year":"2016","journal-title":"Optica"},{"key":"2024031517112806600_c43","doi-asserted-by":"publisher","first-page":"711","DOI":"10.1126\/science.aab3642","volume":"349","year":"2015","journal-title":"Science"},{"key":"2024031517112806600_c44","doi-asserted-by":"publisher","first-page":"e1400255","DOI":"10.1126\/sciadv.1400255","volume":"1","year":"2015","journal-title":"Sci. Adv."},{"key":"2024031517112806600_c45","doi-asserted-by":"publisher","first-page":"e16064","DOI":"10.1038\/lsa.2016.64","volume":"5","year":"2016","journal-title":"Light"},{"key":"2024031517112806600_c46","doi-asserted-by":"publisher","first-page":"90","DOI":"10.1364\/OPTICA.4.000090","volume":"4","year":"2017","journal-title":"Optica"},{"key":"2024031517112806600_c47","doi-asserted-by":"publisher","first-page":"3528","DOI":"10.1038\/s41467-019-11489-y","volume":"10","year":"2019","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c48","doi-asserted-by":"publisher","first-page":"925","DOI":"10.1038\/s41567-019-0567-8","volume":"15","year":"2019","journal-title":"Nat. Phys."},{"key":"2024031517112806600_c49","doi-asserted-by":"publisher","first-page":"226","DOI":"10.1038\/s41586-020-2441-3","volume":"583","year":"2020","journal-title":"Nature"},{"key":"2024031517112806600_c50","doi-asserted-by":"publisher","first-page":"083001","DOI":"10.1088\/1367-2630\/14\/8\/083001","volume":"14","year":"2012","journal-title":"New J. Phys."},{"key":"2024031517112806600_c51","doi-asserted-by":"publisher","first-page":"250503","DOI":"10.1103\/PhysRevLett.123.250503","volume":"123","year":"2019","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c52","doi-asserted-by":"publisher","first-page":"163603","DOI":"10.1103\/PhysRevLett.124.163603","volume":"124","year":"2020","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c53","doi-asserted-by":"publisher","first-page":"1800149","DOI":"10.1002\/lpor.201800149","volume":"12","year":"2018","journal-title":"Laser Photonics Rev."},{"key":"2024031517112806600_c54","doi-asserted-by":"publisher","first-page":"1141","DOI":"10.1080\/09500340.2018.1437228","volume":"65","year":"2018","journal-title":"J. Mod. Opt."},{"key":"2024031517112806600_c55","doi-asserted-by":"publisher","first-page":"5489","DOI":"10.1038\/ncomms6489","volume":"5","year":"2014","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c56","doi-asserted-by":"publisher","first-page":"045002","DOI":"10.1088\/0031-8949\/83\/04\/045002","volume":"83","year":"2011","journal-title":"Phys. Scr."},{"key":"2024031517112806600_c57","doi-asserted-by":"publisher","first-page":"40301","DOI":"10.1103\/PhysRevA.61.040301","volume":"61","year":"2000","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c58","doi-asserted-by":"publisher","first-page":"120502","DOI":"10.1103\/PhysRevLett.101.120502","volume":"101","year":"2008","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c59","doi-asserted-by":"publisher","first-page":"158","DOI":"10.1038\/s41566-019-0358-x","volume":"13","year":"2019","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c60","doi-asserted-by":"publisher","first-page":"073003","DOI":"10.1088\/2040-8978\/18\/7\/073003","volume":"18","year":"2016","journal-title":"J. Opt."},{"key":"2024031517112806600_c61","doi-asserted-by":"publisher","first-page":"1139","DOI":"10.3390\/app8071139","volume":"8","year":"2018","journal-title":"Appl. Sci."},{"key":"2024031517112806600_c62","doi-asserted-by":"publisher","first-page":"2505","DOI":"10.1038\/s41467-020-16187-8","volume":"11","year":"2020","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c63","doi-asserted-by":"publisher","first-page":"6299","DOI":"10.1038\/ncomms7299","volume":"6","year":"2015","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c64","doi-asserted-by":"publisher","first-page":"19926","DOI":"10.1364\/OE.394491","volume":"28","year":"2020","journal-title":"Opt. Express"},{"key":"2024031517112806600_c65","doi-asserted-by":"publisher","first-page":"250","DOI":"10.1038\/s41566-020-0589-x","volume":"14","year":"2020","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c66","doi-asserted-by":"publisher","first-page":"081907","DOI":"10.1117\/1.OE.53.8.081907","volume":"53","year":"2014","journal-title":"Opt. Eng."},{"key":"2024031517112806600_c67","doi-asserted-by":"publisher","first-page":"122601","DOI":"10.1063\/1.4896045","volume":"105","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c68","doi-asserted-by":"publisher","first-page":"518","DOI":"10.1038\/nphoton.2010.179","volume":"4","year":"2010","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c69","doi-asserted-by":"publisher","first-page":"884","DOI":"10.1364\/OPTICA.5.000884","volume":"5","year":"2018","journal-title":"Optica"},{"key":"2024031517112806600_c70","article-title":"High-yield wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits"},{"key":"2024031517112806600_c71","doi-asserted-by":"publisher","first-page":"619","DOI":"10.1364\/OPTICA.4.000619","volume":"4","year":"2017","journal-title":"Optica"},{"key":"2024031517112806600_c72","doi-asserted-by":"publisher","first-page":"1164 LP","DOI":"10.1126\/science.1231298","volume":"339","year":"2013","journal-title":"Science"},{"key":"2024031517112806600_c73","doi-asserted-by":"publisher","first-page":"593","DOI":"10.1038\/s41566-019-0464-9","volume":"13","year":"2019","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c74","doi-asserted-by":"publisher","first-page":"373","DOI":"10.1038\/s41567-018-0394-3","volume":"15","year":"2019","journal-title":"Nat. Phys."},{"key":"2024031517112806600_c75","doi-asserted-by":"publisher","first-page":"3878","DOI":"10.1364\/OL.38.003878","volume":"38","year":"2013","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c76","doi-asserted-by":"publisher","first-page":"69","DOI":"10.1109\/2944.826874","volume":"6","year":"2000","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"2024031517112806600_c77","doi-asserted-by":"publisher","first-page":"531","DOI":"10.1364\/OPTICA.3.000531","volume":"3","year":"2016","journal-title":"Optica"},{"key":"2024031517112806600_c78","doi-asserted-by":"publisher","first-page":"101","DOI":"10.1038\/s41586-018-0551-y","volume":"562","year":"2018","journal-title":"Nature"},{"key":"2024031517112806600_c79","doi-asserted-by":"publisher","first-page":"1287","DOI":"10.1515\/nanoph-2020-0013","volume":"9","year":"2020","journal-title":"Nanophotonics"},{"key":"2024031517112806600_c80","doi-asserted-by":"publisher","first-page":"1536","DOI":"10.1364\/OPTICA.4.001536","volume":"4","year":"2017","journal-title":"Optica"},{"key":"2024031517112806600_c81","doi-asserted-by":"publisher","first-page":"380","DOI":"10.1364\/OPTICA.6.000380","volume":"6","year":"2019","journal-title":"Optica"},{"key":"2024031517112806600_c82","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1038\/s41467-018-07882-8","volume":"10","year":"2019","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c83","doi-asserted-by":"publisher","first-page":"1138","DOI":"10.1364\/OPTICA.6.001138","volume":"6","year":"2019","journal-title":"Optica"},{"key":"2024031517112806600_c84","doi-asserted-by":"publisher","first-page":"1455","DOI":"10.1364\/OPTICA.6.001455","volume":"6","year":"2019","journal-title":"Optica"},{"key":"2024031517112806600_c85","doi-asserted-by":"publisher","first-page":"1498","DOI":"10.1364\/OPTICA.6.001498","volume":"6","year":"2019","journal-title":"Optica"},{"key":"2024031517112806600_c86","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1038\/s41377-019-0231-1","volume":"9","year":"2020","journal-title":"Light"},{"key":"2024031517112806600_c87","doi-asserted-by":"publisher","first-page":"20","DOI":"10.1109\/JLT.2015.2465382","volume":"34","year":"2016","journal-title":"J. Lightwave Technol."},{"key":"2024031517112806600_c88","doi-asserted-by":"publisher","first-page":"2000511","DOI":"10.1109\/JQE.2019.2901508","volume":"55","year":"2019","journal-title":"IEEE J. Quantum Electron."},{"key":"2024031517112806600_c89","doi-asserted-by":"publisher","first-page":"9203","DOI":"10.1364\/OE.14.009203","volume":"14","year":"2006","journal-title":"Opt. Express"},{"key":"2024031517112806600_c90","doi-asserted-by":"publisher","first-page":"6000412","DOI":"10.1109\/JSTQE.2018.2854542","volume":"24","year":"2018","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"2024031517112806600_c91","doi-asserted-by":"publisher","first-page":"081105","DOI":"10.1063\/1.5108893","volume":"115","year":"2019","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c92","doi-asserted-by":"publisher","first-page":"3562","DOI":"10.1021\/nl3011885","volume":"12","year":"2012","journal-title":"Nano Lett."},{"key":"2024031517112806600_c93","doi-asserted-by":"publisher","first-page":"10462","DOI":"10.1364\/OE.19.010462","volume":"19","year":"2011","journal-title":"Opt. Express"},{"key":"2024031517112806600_c94","doi-asserted-by":"publisher","first-page":"e16249","DOI":"10.1038\/lsa.2016.249","volume":"6","year":"2017","journal-title":"Light"},{"key":"2024031517112806600_c95","doi-asserted-by":"publisher","first-page":"9521","DOI":"10.1364\/OE.389423","volume":"28","year":"2020","journal-title":"Opt. Express"},{"key":"2024031517112806600_c96","doi-asserted-by":"publisher","first-page":"823","DOI":"10.1364\/OPTICA.3.000823","volume":"3","year":"2016","journal-title":"Optica"},{"key":"2024031517112806600_c97","doi-asserted-by":"publisher","first-page":"57","DOI":"10.1038\/s41566-019-0537-9","volume":"14","year":"2020","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c98","doi-asserted-by":"publisher","first-page":"3464","DOI":"10.1038\/s41467-020-17271-9","volume":"11","year":"2020","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c99","article-title":"Ultrahigh-Q AlGaAs-on-insulator microresonators for integrated nonlinear photonics"},{"key":"2024031517112806600_c100","doi-asserted-by":"publisher","first-page":"218","DOI":"10.1364\/OPTICA.4.000218","volume":"4","year":"2017","journal-title":"Optica"},{"key":"2024031517112806600_c101","doi-asserted-by":"publisher","first-page":"1279","DOI":"10.1364\/OPTICA.5.001279","volume":"5","year":"2018","journal-title":"Optica"},{"key":"2024031517112806600_c102","doi-asserted-by":"publisher","first-page":"041104","DOI":"10.1063\/1.4863223","volume":"104","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c103","doi-asserted-by":"publisher","first-page":"297","DOI":"10.1038\/s41566-018-0132-5","volume":"12","year":"2018","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c104","first-page":"NW2A.3","volume-title":"Nonlinear Optics","year":"2019"},{"key":"2024031517112806600_c105","doi-asserted-by":"publisher","first-page":"587","DOI":"10.1364\/OE.25.000587","volume":"25","year":"2017","journal-title":"Opt. Express"},{"key":"2024031517112806600_c106","doi-asserted-by":"publisher","first-page":"1139","DOI":"10.1364\/OPTICA.394138","volume":"7","year":"2020","journal-title":"Optica"},{"key":"2024031517112806600_c107","doi-asserted-by":"publisher","first-page":"4236","DOI":"10.1364\/OL.37.004236","volume":"37","year":"2012","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c108","doi-asserted-by":"crossref","first-page":"021104","DOI":"10.1063\/1.5080397","volume":"114","year":"2019","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c109","doi-asserted-by":"publisher","first-page":"13","DOI":"10.1038\/s41534-018-0068-0","volume":"4","year":"2018","journal-title":"npj Quantum Inf."},{"key":"2024031517112806600_c110","doi-asserted-by":"crossref","first-page":"063001","DOI":"10.1088\/1367-2630\/12\/6\/063001","volume":"12","year":"2010","journal-title":"New J. Phys."},{"key":"2024031517112806600_c111","doi-asserted-by":"publisher","first-page":"148","DOI":"10.1038\/s41567-019-0727-x","volume":"16","year":"2020","journal-title":"Nat. Phys."},{"key":"2024031517112806600_c112","doi-asserted-by":"publisher","first-page":"788","DOI":"10.1364\/OL.41.000788","volume":"41","year":"2016","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c113","doi-asserted-by":"publisher","first-page":"3638","DOI":"10.1364\/OL.42.003638","volume":"42","year":"2017","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c114","doi-asserted-by":"publisher","first-page":"73","DOI":"10.1364\/OL.45.000073","volume":"45","year":"2020","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c115","doi-asserted-by":"publisher","first-page":"4048","DOI":"10.1364\/OL.393077","article-title":"High spectro-temporal purity single-photons from silicon micro-racetrack resonators using a dual-pulse configuration","volume":"45","year":"2020","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c116","doi-asserted-by":"publisher","first-page":"631","DOI":"10.1038\/nphoton.2016.186","volume":"10","year":"2016","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c117","doi-asserted-by":"publisher","first-page":"340","DOI":"10.1038\/nphoton.2016.23","volume":"10","year":"2016","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c118","doi-asserted-by":"publisher","first-page":"1026","DOI":"10.1038\/nnano.2017.218","volume":"12","year":"2017","journal-title":"Nat. Nanotechnol."},{"key":"2024031517112806600_c119","doi-asserted-by":"publisher","first-page":"770","DOI":"10.1038\/s41566-019-0494-3","volume":"13","year":"2019","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c120","doi-asserted-by":"publisher","first-page":"021309","DOI":"10.1063\/5.0010193","volume":"7","year":"2020","journal-title":"Appl. Phys. Rev."},{"key":"2024031517112806600_c121","doi-asserted-by":"publisher","first-page":"020401","DOI":"10.1103\/PhysRevLett.116.020401","volume":"116","year":"2016","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c122","doi-asserted-by":"publisher","first-page":"8539","DOI":"10.1364\/OE.24.008539","volume":"24","year":"2016","journal-title":"Opt. Express"},{"key":"2024031517112806600_c123","doi-asserted-by":"publisher","first-page":"033001","DOI":"10.1088\/1361-6641\/ab02c8","volume":"34","year":"2019","journal-title":"Semicond. Sci. Technol."},{"key":"2024031517112806600_c124","doi-asserted-by":"publisher","first-page":"1515","DOI":"10.1021\/acsphotonics.0c00310","volume":"7","year":"2020","journal-title":"ACS Photonics"},{"key":"2024031517112806600_c125","doi-asserted-by":"publisher","first-page":"982","DOI":"10.1021\/nl404400d","volume":"14","year":"2014","journal-title":"Nano Lett."},{"key":"2024031517112806600_c126","doi-asserted-by":"publisher","first-page":"663","DOI":"10.1038\/s41563-018-0109-2","volume":"17","year":"2018","journal-title":"Nat. Mater."},{"key":"2024031517112806600_c127","doi-asserted-by":"publisher","first-page":"577","DOI":"10.1038\/nphoton.2017.119","volume":"11","year":"2017","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c128","doi-asserted-by":"publisher","first-page":"740","DOI":"10.3762\/bjnano.11.61","volume":"11","year":"2020","journal-title":"Beilstein J. Nanotechnol."},{"key":"2024031517112806600_c129","doi-asserted-by":"publisher","first-page":"37","DOI":"10.1038\/nnano.2015.242","volume":"11","year":"2016","journal-title":"Nat. Nanotechnol."},{"key":"2024031517112806600_c130","doi-asserted-by":"publisher","first-page":"497","DOI":"10.1038\/nnano.2015.75","volume":"10","year":"2015","journal-title":"Nat. Nanotechnol."},{"key":"2024031517112806600_c131","doi-asserted-by":"publisher","first-page":"7567","DOI":"10.1021\/acs.nanolett.5b03312","volume":"15","year":"2015","journal-title":"Nano Lett."},{"key":"2024031517112806600_c132","doi-asserted-by":"publisher","first-page":"497","DOI":"10.1038\/nnano.2015.75","volume":"10","year":"2015","journal-title":"Nat. Nanotechnol."},{"key":"2024031517112806600_c133","doi-asserted-by":"publisher","first-page":"055017","DOI":"10.1088\/1367-2630\/13\/5\/055017","volume":"13","year":"2011","journal-title":"New J. Phys."},{"key":"2024031517112806600_c134","doi-asserted-by":"publisher","first-page":"025012","DOI":"10.1088\/1367-2630\/13\/2\/025012","volume":"13","year":"2011","journal-title":"New J. Phys."},{"key":"2024031517112806600_c135","doi-asserted-by":"publisher","first-page":"151","DOI":"10.1038\/nmat3806","volume":"13","year":"2014","journal-title":"Nat. Mater."},{"key":"2024031517112806600_c136","doi-asserted-by":"publisher","first-page":"949","DOI":"10.1021\/nl204010e","volume":"12","year":"2012","journal-title":"Nano Lett."},{"key":"2024031517112806600_c137","first-page":"1","volume":"5","year":"2014","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c138","doi-asserted-by":"publisher","first-page":"6535","DOI":"10.1364\/OE.22.006535","volume":"22","year":"2014","journal-title":"Opt. Express"},{"key":"2024031517112806600_c139","doi-asserted-by":"publisher","first-page":"32995","DOI":"10.1364\/OE.25.032995","volume":"25","year":"2017","journal-title":"Opt. Express"},{"key":"2024031517112806600_c140","unstructured":"S.\u2008Ramelow, A.\u2008Farsi, S.\u2008Clemmen, D.\u2008Orquiza, K.\u2008Luke, M.\u2008Lipson, and A. L.\u2008Gaeta, arXiv:1508.04358 (2015)."},{"key":"2024031517112806600_c141","first-page":"1","volume":"4","year":"2013","journal-title":"Nat. Commun."},{"key":"2024031517112806600_c142","doi-asserted-by":"publisher","first-page":"13804","DOI":"10.1103\/PhysRevA.82.013804","volume":"82","year":"2010","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c143","doi-asserted-by":"publisher","first-page":"88","DOI":"10.1364\/OPTICA.2.000088","volume":"2","year":"2015","journal-title":"Optica"},{"key":"2024031517112806600_c144","doi-asserted-by":"publisher","first-page":"52312","DOI":"10.1103\/PhysRevA.64.052312","volume":"64","year":"2001","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c145","doi-asserted-by":"publisher","first-page":"2","DOI":"10.1038\/s41534-018-0121-z","volume":"5","year":"2019","journal-title":"npj Quantum Inf."},{"key":"2024031517112806600_c146","doi-asserted-by":"publisher","first-page":"19","DOI":"10.1016\/j.revip.2016.11.003","volume":"2","year":"2017","journal-title":"Rev. Phys."},{"key":"2024031517112806600_c147","doi-asserted-by":"publisher","first-page":"1825","DOI":"10.1364\/OE.26.001825","volume":"26","year":"2018","journal-title":"Opt. Express"},{"key":"2024031517112806600_c148","doi-asserted-by":"publisher","first-page":"105","DOI":"10.1016\/S1049-250X(05)52003-2","volume":"52","year":"2005","journal-title":"Adv. At. Mol. Opt. Phys."},{"key":"2024031517112806600_c149","doi-asserted-by":"publisher","first-page":"145","DOI":"10.1103\/RevModPhys.74.145","volume":"74","year":"2002","journal-title":"Rev. Mod. Phys."},{"key":"2024031517112806600_c150","doi-asserted-by":"publisher","first-page":"180502","DOI":"10.1103\/PhysRevLett.93.180502","volume":"93","year":"2004","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c151","doi-asserted-by":"publisher","first-page":"62322","DOI":"10.1103\/PhysRevA.87.062322","volume":"87","year":"2013","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c152","doi-asserted-by":"publisher","first-page":"2205","DOI":"10.1103\/PhysRevLett.62.2205","volume":"62","year":"1989","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c153","doi-asserted-by":"publisher","first-page":"251115","DOI":"10.1063\/1.4851095","volume":"103","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c154","doi-asserted-by":"publisher","first-page":"229","DOI":"10.1038\/nphoton.2012.346","volume":"7","year":"2013","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c155","doi-asserted-by":"publisher","first-page":"1893","DOI":"10.1364\/OL.22.001893","volume":"22","year":"1997","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c156","doi-asserted-by":"publisher","first-page":"1330 LP","DOI":"10.1126\/science.1104149","volume":"306","year":"2004","journal-title":"Science"},{"key":"2024031517112806600_c157","doi-asserted-by":"publisher","first-page":"3020","DOI":"10.1103\/PhysRevLett.68.3020","volume":"68","year":"1992","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c158","doi-asserted-by":"publisher","first-page":"513","DOI":"10.1103\/RevModPhys.77.513","volume":"77","year":"2005","journal-title":"Rev. Mod. Phys."},{"key":"2024031517112806600_c159","doi-asserted-by":"publisher","first-page":"2409","DOI":"10.1103\/PhysRevLett.55.2409","volume":"55","year":"1985","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c160","doi-asserted-by":"publisher","first-page":"113901","DOI":"10.1103\/PhysRevLett.106.113901","volume":"106","year":"2011","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c161","doi-asserted-by":"publisher","first-page":"185","DOI":"10.1038\/nature12307","volume":"500","year":"2013","journal-title":"Nature"},{"key":"2024031517112806600_c162","doi-asserted-by":"publisher","first-page":"223","DOI":"10.1364\/OL.41.000223","volume":"41","year":"2016","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c163","doi-asserted-by":"publisher","first-page":"044005","DOI":"10.1103\/PhysRevApplied.3.044005","volume":"3","year":"2015","journal-title":"Phys. Rev. Appl."},{"key":"2024031517112806600_c164","doi-asserted-by":"publisher","first-page":"4653","DOI":"10.1364\/OL.36.004653","volume":"36","year":"2011","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c165","doi-asserted-by":"publisher","first-page":"110801","DOI":"10.1103\/PhysRevLett.117.110801","volume":"117","year":"2016","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c166","doi-asserted-by":"publisher","first-page":"193601","DOI":"10.1103\/PhysRevLett.124.193601","volume":"124","year":"2020","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c167","doi-asserted-by":"publisher","first-page":"A36","DOI":"10.1364\/PRJ.7.000A36","volume":"7","year":"2019","journal-title":"Photonics Res."},{"key":"2024031517112806600_c168","doi-asserted-by":"publisher","first-page":"036104","DOI":"10.1063\/1.5142437","volume":"5","year":"2020","journal-title":"APL Photonics"},{"key":"2024031517112806600_c169","doi-asserted-by":"publisher","first-page":"4415","DOI":"10.1103\/PhysRevA.50.4415","volume":"50","year":"1994","journal-title":"Phys. Rev. A"},{"key":"2024031517112806600_c170","article-title":"Single-mode quadrature squeezing using dual-pump four-wave mixing in an integrated nanophotonic device"},{"key":"2024031517112806600_c171","doi-asserted-by":"publisher","first-page":"855","DOI":"10.1007\/s003400100723","volume":"73","year":"2001","journal-title":"Appl. Phys. B"},{"key":"2024031517112806600_c172","doi-asserted-by":"publisher","first-page":"559","DOI":"10.1134\/S1054660X07040408","volume":"17","year":"2007","journal-title":"Laser Phys."},{"key":"2024031517112806600_c173","doi-asserted-by":"publisher","first-page":"469","DOI":"10.1088\/1464-4266\/1\/4\/319","volume":"1","year":"1999","journal-title":"J. Opt. B"},{"key":"2024031517112806600_c174","doi-asserted-by":"publisher","first-page":"1728","DOI":"10.1103\/PhysRevLett.74.1728","volume":"74","year":"1995","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c175","doi-asserted-by":"publisher","first-page":"251102","DOI":"10.1103\/PhysRevLett.104.251102","volume":"104","year":"2010","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c176","doi-asserted-by":"publisher","first-page":"712","DOI":"10.1364\/OL.23.000712","volume":"23","year":"1998","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c177","article-title":"Development of quantum interConnects (QuICs) for next-generation information technologies"},{"key":"2024031517112806600_c178","doi-asserted-by":"publisher","first-page":"563","DOI":"10.1364\/OPTICA.6.000563","volume":"6","year":"2019","journal-title":"Optica"},{"key":"2024031517112806600_c179","doi-asserted-by":"publisher","first-page":"1438","DOI":"10.1364\/OPTICA.5.001438","volume":"5","year":"2018","journal-title":"Optica"},{"key":"2024031517112806600_c180","doi-asserted-by":"publisher","first-page":"667","DOI":"10.1038\/nphoton.2012.221","volume":"6","year":"2012","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c181","doi-asserted-by":"publisher","first-page":"406","DOI":"10.1038\/nphoton.2016.64","volume":"10","year":"2016","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c182","doi-asserted-by":"publisher","first-page":"031109","DOI":"10.1063\/1.4940242","volume":"108","year":"2016","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c183","doi-asserted-by":"publisher","first-page":"1126","DOI":"10.1364\/OPTICA.3.001126","volume":"3","year":"2016","journal-title":"Optica"},{"key":"2024031517112806600_c184","doi-asserted-by":"publisher","first-page":"59","DOI":"10.1038\/s41534-019-0173-8","volume":"5","year":"2019","journal-title":"npj Quantum Inf."},{"key":"2024031517112806600_c185","doi-asserted-by":"publisher","first-page":"123902","DOI":"10.1103\/PhysRevLett.117.123902","volume":"117","year":"2016","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c186","doi-asserted-by":"publisher","first-page":"034026","DOI":"10.1103\/PhysRevApplied.11.034026","volume":"11","year":"2019","journal-title":"Phys. Rev. Appl."},{"key":"2024031517112806600_c187","year":"2018"},{"key":"2024031517112806600_c188","doi-asserted-by":"publisher","first-page":"131102","DOI":"10.1063\/1.5042506","volume":"113","year":"2018","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c189","doi-asserted-by":"publisher","first-page":"014002","DOI":"10.1103\/PhysRevApplied.6.014002","volume":"6","year":"2016","journal-title":"Phys. Rev. Appl."},{"key":"2024031517112806600_c190","doi-asserted-by":"publisher","first-page":"21","DOI":"10.1038\/s41566-018-0297-y","volume":"13","year":"2019","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c191","doi-asserted-by":"publisher","first-page":"153901","DOI":"10.1103\/PhysRevLett.104.153901","volume":"104","year":"2010","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c192","first-page":"4","volume":"92","year":"2004","journal-title":"Phys. Rev. Lett."},{"key":"2024031517112806600_c193","doi-asserted-by":"publisher","first-page":"106","DOI":"10.1364\/OL.44.000106","volume":"44","year":"2019","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c194","doi-asserted-by":"publisher","first-page":"1077","DOI":"10.1063\/1.1599044","volume":"83","year":"2003","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c195","doi-asserted-by":"publisher","first-page":"1339","DOI":"10.1364\/OL.44.001339","volume":"44","year":"2019","journal-title":"Opt. Lett."},{"key":"2024031517112806600_c196","doi-asserted-by":"publisher","first-page":"770","DOI":"10.1038\/nphoton.2014.217","volume":"8","year":"2014","journal-title":"Nat. Photonics"},{"key":"2024031517112806600_c197","doi-asserted-by":"publisher","first-page":"141101","DOI":"10.1063\/1.4994692","volume":"111","year":"2017","journal-title":"Appl. Phys. Lett."},{"key":"2024031517112806600_c198","doi-asserted-by":"publisher","first-page":"1893","DOI":"10.1038\/srep01893","volume":"3","year":"2013","journal-title":"Sci. Rep."},{"key":"2024031517112806600_c199","doi-asserted-by":"publisher","first-page":"291","DOI":"10.1364\/OPTICA.384118","volume":"7","year":"2020","journal-title":"Optica"},{"key":"2024031517112806600_c200","doi-asserted-by":"publisher","first-page":"1246","DOI":"10.1364\/OPTICA.6.001246","volume":"6","year":"2019","journal-title":"Optica"},{"key":"2024031517112806600_c201","doi-asserted-by":"publisher","first-page":"16130","DOI":"10.1364\/OE.25.016130","volume":"25","year":"2017","journal-title":"Opt. Express"},{"key":"2024031517112806600_c202","doi-asserted-by":"publisher","first-page":"19530","DOI":"10.1364\/OE.21.019530","volume":"21","year":"2013","journal-title":"Opt. Express"},{"key":"2024031517112806600_c203","doi-asserted-by":"publisher","first-page":"7503","DOI":"10.1021\/acsanm.9b01453","volume":"2","year":"2019","journal-title":"ACS Appl. Nano Mater."},{"key":"2024031517112806600_c204","doi-asserted-by":"publisher","first-page":"1668","DOI":"10.1063\/1.1788882","volume":"85","year":"2004","journal-title":"Appl. Phys. Lett."}],"container-title":["AVS Quantum Science"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/avs\/aqs\/article-pdf\/doi\/10.1116\/5.0020684\/19738937\/041702_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/pubs.aip.org\/avs\/aqs\/article-pdf\/doi\/10.1116\/5.0020684\/19738937\/041702_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/avs\/aqs\/article-pdf\/doi\/10.1116\/5.0020684\/19738937\/041702_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,4,22]],"date-time":"2025-04-22T13:25:47Z","timestamp":1745328347000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/aqs\/article\/2\/4\/041702\/997293\/Chip-scale-nonlinear-photonics-for-quantum-light"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,10,14]]},"references-count":204,"journal-issue":{"issue":"4","published-print":{"date-parts":[[2020,12,1]]}},"URL":"https:\/\/doi.org\/10.1116\/5.0020684","relation":{},"ISSN":["2639-0213"],"issn-type":[{"value":"2639-0213","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2020,12]]},"published":{"date-parts":[[2020,10,14]]},"article-number":"041702"}}