{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,15]],"date-time":"2025-11-15T16:51:14Z","timestamp":1763225474676},"reference-count":5,"publisher":"American Vacuum Society","issue":"6","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2004,11,1]]},"abstract":"<jats:p>The variation of current intensity with pressure, at constant voltage, (I-p characteristics), was obtained for planar magnetron discharges in neon, krypton, and xenon on a copper target. The analysis of those curves confirms that an equation of the same type as the one recently obtained by the authors for an argon\u2013copper discharge is an adequate relation to describe the dependence of current intensity on pressure and voltage for planar magnetron discharges in rare gases. That equation accounts for a bimodal behavior corresponding to the sum of a \u201cmagnetron term\u201d and a \u201cdiode term.\u201d<\/jats:p>","DOI":"10.1116\/1.1804982","type":"journal-article","created":{"date-parts":[[2004,11,5]],"date-time":"2004-11-05T23:05:33Z","timestamp":1099695933000},"page":"2361-2364","update-policy":"http:\/\/dx.doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":5,"title":["Current-pressure characteristics of planar magnetron discharges in rare gases"],"prefix":"10.1116","volume":"22","author":[{"given":"M. L.","family":"Escriv\u00e3o","sequence":"first","affiliation":[{"name":"CeFITec, Departamento de F\u00edsica, Faculdade de Ci\u00eancias e Tecnologia da Universidade Nova de Lisboa , Quinta da Torre, 2829-516 Caparica, Portugal"}]},{"given":"P. J. S.","family":"Pereira","sequence":"additional","affiliation":[{"name":"CeFITec, Departamento de F\u00edsica, Faculdade de Ci\u00eancias e Tecnologia da Universidade Nova de Lisboa , Quinta da Torre, 2829-516 Caparica, Portugal"}]},{"given":"M. H.","family":"Cabral","sequence":"additional","affiliation":[{"name":"CeFITec, Departamento de F\u00edsica, Faculdade de Ci\u00eancias e Tecnologia da Universidade Nova de Lisboa , Quinta da Torre, 2829-516 Caparica, Portugal"}]},{"given":"M. R.","family":"Teixeira","sequence":"additional","affiliation":[{"name":"CeFITec, Departamento de F\u00edsica, Faculdade de Ci\u00eancias e Tecnologia da Universidade Nova de Lisboa , Quinta da Torre, 2829-516 Caparica, Portugal"}]},{"given":"M. J. P.","family":"Maneira","sequence":"additional","affiliation":[{"name":"CeFITec, Departamento de F\u00edsica, Faculdade de Ci\u00eancias e Tecnologia da Universidade Nova de Lisboa , Quinta da Torre, 2829-516 Caparica, Portugal"}]}],"member":"20","published-online":{"date-parts":[[2004,10,20]]},"reference":[{"key":"2023070523112783900_c1","doi-asserted-by":"publisher","first-page":"171","DOI":"10.1116\/1.569448","volume":"15","year":"1978","journal-title":"J. Vac. Sci. Technol."},{"key":"2023070523112783900_c2","doi-asserted-by":"crossref","first-page":"300","DOI":"10.1016\/0022-3115(93)90299-E","volume":"200","year":"1993","journal-title":"J. Nucl. Mater."},{"key":"2023070523112783900_c3","doi-asserted-by":"crossref","first-page":"66","DOI":"10.1063\/1.336841","volume":"59","year":"1986","journal-title":"Appl. Phys."},{"key":"2023070523112783900_c4","doi-asserted-by":"publisher","first-page":"375","DOI":"10.1116\/1.1539083","volume":"21","year":"2003","journal-title":"J. Vac. Sci. Technol. A"},{"key":"2023070523112783900_c5","doi-asserted-by":"crossref","first-page":"2733","DOI":"10.1116\/1.578634","volume":"11","year":"1993","journal-title":"J. Vac. Sci. Technol. A"}],"container-title":["Journal of Vacuum Science &amp; Technology A: Vacuum, Surfaces, and Films"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/avs\/jva\/article-pdf\/22\/6\/2361\/15671529\/2361_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/avs\/jva\/article-pdf\/22\/6\/2361\/15671529\/2361_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,1,15]],"date-time":"2024-01-15T00:44:56Z","timestamp":1705279496000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jva\/article\/22\/6\/2361\/381892\/Current-pressure-characteristics-of-planar"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2004,10,20]]},"references-count":5,"journal-issue":{"issue":"6","published-print":{"date-parts":[[2004,11,1]]}},"URL":"https:\/\/doi.org\/10.1116\/1.1804982","relation":{},"ISSN":["0734-2101","1520-8559"],"issn-type":[{"value":"0734-2101","type":"print"},{"value":"1520-8559","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2004,11]]},"published":{"date-parts":[[2004,10,20]]}}}