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Using the ECR plasma gun, the authors observed a precision fluorescence spectrum related to 3pD7\u2215204(F=4)\u21923sP5\u221524(F=3) transition of F radicals, which made it possible to experimentally determine the longitudinal velocity distribution and the angular spread of the F radical beam. Based on these measured beam characteristics, the authors extracted a true decay curve of fluorescence intensity as a function of distance from the source and determined the lifetime of F metastable state (3sP5\u221524) as 7.3\u00b10.5\u03bcs.<\/jats:p>","DOI":"10.1116\/1.2357959","type":"journal-article","created":{"date-parts":[[2006,11,16]],"date-time":"2006-11-16T23:06:20Z","timestamp":1163718380000},"page":"2133-2138","update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":4,"title":["Lifetime measurement of metastable fluorine atoms using electron cyclotron resonance plasma source"],"prefix":"10.1116","volume":"24","author":[{"given":"Masao","family":"Shimizu","sequence":"first","affiliation":[{"name":"Yasu Semiconductor Corporation , 686-1 Ichimiyake, Yasu-cho, Yasu-gun, Shiga 520-2632, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hiromasa","family":"Ohmi","sequence":"additional","affiliation":[{"name":"Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hiroaki","family":"Kakiuchi","sequence":"additional","affiliation":[{"name":"Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kiyoshi","family":"Yasutake","sequence":"additional","affiliation":[{"name":"Osaka University Department of Precision Science and Technology, Graduate School of Engineering, , 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"20","published-online":{"date-parts":[[2006,10,12]]},"reference":[{"key":"2023062817553081300_c1","doi-asserted-by":"publisher","first-page":"2321","DOI":"10.1143\/JJAP.37.2321","volume":"37","year":"1998","journal-title":"Jpn. 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