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The microbridges are electrostatically actuated and the resulting deflection is measured optically. The fabricated microbridges show resonance frequencies of the order of \u223c4.4MHz and quality factors \u223c450.<\/jats:p>","DOI":"10.1116\/1.2715972","type":"journal-article","created":{"date-parts":[[2007,4,6]],"date-time":"2007-04-06T22:06:44Z","timestamp":1175897204000},"page":"455-458","update-policy":"http:\/\/dx.doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":5,"title":["Surface micromachining of a thin film microresonator using dry decomposition of a polymer sacrificial layer"],"prefix":"10.1116","volume":"25","author":[{"given":"S. B.","family":"Patil","sequence":"first","affiliation":[{"name":"INESC Microsistemas e Nanotecnologias , Lisbon 1000\u2013029, Portugal"}]},{"given":"V.","family":"Chu","sequence":"additional","affiliation":[{"name":"INESC Microsistemas e Nanotecnologias , Lisbon 1000\u2013029, Portugal"}]},{"given":"J. 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