{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,2]],"date-time":"2025-11-02T16:29:19Z","timestamp":1762100959812},"reference-count":21,"publisher":"American Vacuum Society","issue":"1","content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2010,1,1]]},"abstract":"<jats:p>Film deposition of Ni2MnGa phaselike alloy by radio frequency (rf) magnetron sputtering was performed onto bare Si(100) substrates and LaNiO3\u2215Pb(Ti,Zr)O3 (LNO\/PZT) ferroelectric buffer layer near room temperature. The prepared samples were characterized using conventional x-ray diffraction (XRD), superconducting quantum interference device, and electron dispersive x-ray spectroscopy from scanning electron microscope observations. The optimized films deposited under high rf power and low argon pressure present good surface quality and highly textured phase crystallization. The positioning distance between the substrate and the target-holder axis has some limited effect on the film\u2019s composition due to the specific diffusion behavior of each element in the sputtering plasma. Extended four pole high resolution XRD analysis allowed one to discriminate the intended Ni\u2013Mn\u2013Ga tetragonal martensitic phase induced by the (100) LNO\/PZT oriented buffer. This low temperature process appears to be very promising, allowing separate control of the functional layer\u2019s properties, while trying to achieve high electromagnetoelastic coupling.<\/jats:p>","DOI":"10.1116\/1.3256200","type":"journal-article","created":{"date-parts":[[2009,11,13]],"date-time":"2009-11-13T23:01:57Z","timestamp":1258153317000},"page":"6-10","update-policy":"http:\/\/dx.doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":27,"title":["Study of Ni2\u2013Mn\u2013Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO3\u2215Pb(Ti,Zr)O3 buffer"],"prefix":"10.1116","volume":"28","author":[{"given":"F.","family":"Figueiras","sequence":"first","affiliation":[{"name":"University of Aveiro Department of Physics and CICECO, , 3810-193 Aveiro, Portugal"}]},{"given":"E.","family":"Rauwel","sequence":"additional","affiliation":[{"name":"University of Aveiro Department of Physics and CICECO, , 3810-193 Aveiro, Portugal"}]},{"given":"V. S.","family":"Amaral","sequence":"additional","affiliation":[{"name":"University of Aveiro Department of Physics and CICECO, , 3810-193 Aveiro, Portugal"}]},{"given":"N.","family":"Vyshatko","sequence":"additional","affiliation":[{"name":"University of Aveiro Department of Ceramics and Glass Engineering and CICECO, , 3810-193 Aveiro, Portugal"}]},{"given":"A. L.","family":"Kholkin","sequence":"additional","affiliation":[{"name":"University of Aveiro Department of Ceramics and Glass Engineering and CICECO, , 3810-193 Aveiro, Portugal"}]},{"given":"C.","family":"Soyer","sequence":"additional","affiliation":[{"name":"IENM-DOAE-MIMM-IEMN , 59655 Villeneuve d\u2019Ascq, France"}]},{"given":"D.","family":"Remiens","sequence":"additional","affiliation":[{"name":"IENM-DOAE-MIMM-IEMN , 59655 Villeneuve d\u2019Ascq, France"}]},{"given":"V. V.","family":"Shvartsman","sequence":"additional","affiliation":[{"name":"University of Duisburg-Essen Department of Physics, , Lotharstr. 1, 47057 Duisburg, Germany"}]},{"given":"P.","family":"Borisov","sequence":"additional","affiliation":[{"name":"University of Duisburg-Essen Department of Physics, , Lotharstr. 1, 47057 Duisburg, Germany"}]},{"given":"W.","family":"Kleemann","sequence":"additional","affiliation":[{"name":"University of Duisburg-Essen Department of Physics, , Lotharstr. 1, 47057 Duisburg, Germany"}]}],"member":"20","published-online":{"date-parts":[[2009,11,13]]},"reference":[{"key":"2023062902584121700_c1","doi-asserted-by":"publisher","first-page":"104434","DOI":"10.1103\/PhysRevB.72.104434","volume":"72","year":"2005","journal-title":"Phys. Rev. B"},{"key":"2023062902584121700_c2","doi-asserted-by":"publisher","first-page":"220407","DOI":"10.1103\/PhysRevB.70.220407","volume":"70","year":"2004","journal-title":"Phys. Rev. B"},{"key":"2023062902584121700_c3","doi-asserted-by":"publisher","first-page":"257201","DOI":"10.1103\/PhysRevLett.92.257201","volume":"92","year":"2004","journal-title":"Phys. Rev. Lett."},{"key":"2023062902584121700_c4","doi-asserted-by":"publisher","first-page":"1719","DOI":"10.1126\/science.1080615","volume":"299","year":"2003","journal-title":"Science"},{"key":"2023062902584121700_c5","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1016\/S0038-1098(02)00087-X","volume":"122","year":"2002","journal-title":"Solid State Commun."},{"key":"2023062902584121700_c6","doi-asserted-by":"publisher","first-page":"6082","DOI":"10.1103\/PhysRevB.50.6082","volume":"50","year":"1994","journal-title":"Phys. Rev. B"},{"key":"2023062902584121700_c7","doi-asserted-by":"publisher","first-page":"295","DOI":"10.1080\/13642817408246515","volume":"49","year":"1984","journal-title":"Philos. Mag. B"},{"key":"2023062902584121700_c8","doi-asserted-by":"publisher","first-page":"996","DOI":"10.1016\/S0304-8853(00)01170-7","volume":"226\u2013230","year":"2001","journal-title":"J. Magn. Magn. Mater."},{"key":"2023062902584121700_c9","doi-asserted-by":"publisher","first-page":"1113","DOI":"10.1103\/PhysRevB.59.1113","volume":"59","year":"1999","journal-title":"Phys. Rev. B"},{"key":"2023062902584121700_c10","first-page":"92","volume-title":"Piezoelectric Ceramics","year":"1971"},{"key":"2023062902584121700_c11","doi-asserted-by":"publisher","first-page":"1804","DOI":"10.1063\/1.365983","volume":"82","year":"1997","journal-title":"J. Appl. Phys."},{"key":"2023062902584121700_c12","doi-asserted-by":"publisher","first-page":"3299","DOI":"10.1016\/j.jcrysgro.2008.04.025","volume":"310","year":"2008","journal-title":"J. Cryst. Growth"},{"key":"2023062902584121700_c13","doi-asserted-by":"publisher","first-page":"1287","DOI":"10.1016\/j.scriptamat.2005.12.020","volume":"54","year":"2006","journal-title":"Scr. Mater."},{"key":"2023062902584121700_c14","doi-asserted-by":"publisher","first-page":"370S","DOI":"10.1063\/1.1984753","volume":"31","year":"1960","journal-title":"J. Appl. Phys."},{"key":"2023062902584121700_c15","doi-asserted-by":"publisher","first-page":"137","DOI":"10.1016\/S0925-8388(99)00198-X","volume":"290","year":"1999","journal-title":"J. Alloys Compd."},{"key":"2023062902584121700_c16","doi-asserted-by":"publisher","first-page":"436","DOI":"10.1143\/JPSJ.31.436","volume":"31","year":"1971","journal-title":"J. Phys. Soc. Jpn."},{"key":"2023062902584121700_c17","first-page":"419","volume":"1","year":"1980","journal-title":"Soc. Chim. Fr."},{"key":"2023062902584121700_c18","first-page":"2768","volume":"54","year":"1971","journal-title":"Phys. Chem."},{"key":"2023062902584121700_c19","doi-asserted-by":"publisher","first-page":"8492","DOI":"10.1063\/1.1555976","volume":"93","year":"2003","journal-title":"J. Appl. Phys."},{"key":"2023062902584121700_c20","doi-asserted-by":"publisher","first-page":"8345","DOI":"10.1088\/0953-8984\/16\/46\/020","volume":"16","year":"2004","journal-title":"J. Phys.: Condens. Matter"},{"key":"2023062902584121700_c21","doi-asserted-by":"publisher","first-page":"23","DOI":"10.1016\/j.jallcom.2006.06.003","volume":"432","year":"2007","journal-title":"J. Alloys Compd."}],"container-title":["Journal of Vacuum Science &amp; Technology A: Vacuum, Surfaces, and Films"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/avs\/jva\/article-pdf\/28\/1\/6\/13537991\/6_1_online.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/avs\/jva\/article-pdf\/28\/1\/6\/13537991\/6_1_online.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,6,29]],"date-time":"2023-06-29T02:58:49Z","timestamp":1688007529000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jva\/article\/28\/1\/6\/244188\/Study-of-Ni2-Mn-Ga-phase-formation-by-magnetron"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,11,13]]},"references-count":21,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2010,1,1]]}},"URL":"https:\/\/doi.org\/10.1116\/1.3256200","relation":{},"ISSN":["0734-2101","1520-8559"],"issn-type":[{"value":"0734-2101","type":"print"},{"value":"1520-8559","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2010,1]]},"published":{"date-parts":[[2009,11,13]]}}}