{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,7,30]],"date-time":"2025-07-30T12:50:05Z","timestamp":1753879805486,"version":"3.41.2"},"reference-count":33,"publisher":"American Vacuum Society","issue":"6","funder":[{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["CTTI-31\/18 - C.F. (2) junior researcher contract"],"award-info":[{"award-number":["CTTI-31\/18 - C.F. (2) junior researcher contract"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002322","name":"Coordena\u00e7\u00e3o de Aperfei\u00e7oamento de Pessoal de N\u00edvel Superior","doi-asserted-by":"publisher","award":["8887.573100\/2020-00"],"award-info":[{"award-number":["8887.573100\/2020-00"]}],"id":[{"id":"10.13039\/501100002322","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2022,12,1]]},"abstract":"<jats:p>The present work reports on the development of piezoresistive chromium oxynitride (CrN1\u2212xOx) thin films deposited on flexible polymeric substrates. The relationship between the reactive gas supply (composed of 15% O2 and 85% N2) and the electromechanical response was analyzed in CrN1\u2212xOx thin films, produced by glancing angle deposition (GLAD) in a sputtering DC-reactive environment. GLAD was used to modify the normal columnar growth microstructure into an inclined (zigzaglike) architecture, allowing us to the tune of the mechanical and electrical responses of the films. The piezoresistive response was quantified by the gauge factor (GF), reaching values from 2.3\u00b10.1 up to 32.4\u00b10.4 as the reactive gas was increased. The highest values of the GF of the CrN1\u2212xOx films were found in the samples with hardness values in the order of 15.5\u2009GPa and elastic modulus close to 173\u2009GPa. This work shows that the change of characteristics, such as microstructure and the zigzag architecture of the films, can be powerful tools to improve the sensibility by the GF of the CrN1\u2212xOx films and turn Cr-based thin films into an interesting multifunctional system with protective and sensing capabilities.<\/jats:p>","DOI":"10.1116\/6.0002060","type":"journal-article","created":{"date-parts":[[2022,10,24]],"date-time":"2022-10-24T12:38:45Z","timestamp":1666615125000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":3,"title":["Flexible multifunctional hard coatings based on chromium oxynitride for pressure-sensing applications"],"prefix":"10.1116","volume":"40","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5294-0112","authenticated-orcid":false,"given":"A.","family":"Ferreira","sequence":"first","affiliation":[{"name":"Centro de F\u00edsica das Universidades do Minho e do Porto (CF-UM-UP), Universidade do Minho 1 , 4710-057 Braga, Portugal"},{"name":"LaPMET\u2014Laborat\u00f3rio de F\u00edsica para Materiais e Tecnologias Emergentes, Universidade do Minho 2 , 4710-057 Braga, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8904-4151","authenticated-orcid":false,"given":"M. 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