{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,3]],"date-time":"2026-03-03T12:00:21Z","timestamp":1772539221884,"version":"3.50.1"},"reference-count":50,"publisher":"American Vacuum Society","issue":"4","license":[{"start":{"date-parts":[[2023,6,23]],"date-time":"2023-06-23T00:00:00Z","timestamp":1687478400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"},{"start":{"date-parts":[[2023,6,23]],"date-time":"2023-06-23T00:00:00Z","timestamp":1687478400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["CERN\/FIS-TEC\/0039\/2019"],"award-info":[{"award-number":["CERN\/FIS-TEC\/0039\/2019"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["UIDB\/00068\/2020"],"award-info":[{"award-number":["UIDB\/00068\/2020"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["UIDP\/00068\/2020"],"award-info":[{"award-number":["UIDP\/00068\/2020"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["pubs.aip.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2023,7,1]]},"abstract":"<jats:p>Amorphous carbon (a-C) films, having low secondary electron yield (SEY), are used at CERN to suppress electron multipacting in the beam pipes of particle accelerators. It was already demonstrated that hydrogen impurities increase the SEY of a-C films. In this work, a systematic characterization of a set of a-C coatings, deliberately contaminated by deuterium during the magnetron sputtering deposition, by scanning electron microscopy, ion beam analysis, secondary ion mass spectrometry, and optical absorption spectroscopy was performed to establish a correlation between the hydrogen content and the secondary electron emission properties. In parallel, the mechanisms of contamination were also investigated. Adding deuterium allows resolving the contributions of intentional and natural contamination. The results enabled us to quantify the relative deuterium\/hydrogen (D\/H) amounts and relate them with the maximum SEY (SEYmax). The first step of incorporation appears to be formation of D\/H atoms in the discharge. An increase in both the flux of deposited carbon atoms and the discharge current with a D2 fraction in the gas discharge can be explained by target poisoning with deuterium species followed by etching of CxDy clusters, mainly by physical sputtering. For overall relative D\/H amounts between 11% and 47% in the discharge gas, the SEYmax increases almost linearly from 0.99 to 1.38. An abrupt growth of SEYmax from 1.38 to 2.12 takes place in the narrow range of D\/H relative content of 47%\u201354%, for which the nature of the deposited films changes to a polymer-like layer.<\/jats:p>","DOI":"10.1116\/6.0002759","type":"journal-article","created":{"date-parts":[[2023,6,25]],"date-time":"2023-06-25T18:24:17Z","timestamp":1687717457000},"update-policy":"https:\/\/doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":10,"title":["Amorphous carbon thin films: Mechanisms of hydrogen incorporation\n                    during magnetron sputtering and consequences for the secondary electron\n                    emission"],"prefix":"10.1116","volume":"41","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-1298-1793","authenticated-orcid":false,"given":"C. F.","family":"Adame","sequence":"first","affiliation":[{"name":"Departament of Physics, CEFITEC, Nova School of Science and Technology 1 2829-516 Caparica, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0633-8937","authenticated-orcid":false,"given":"E.","family":"Alves","sequence":"additional","affiliation":[{"name":"DECN, Instituto Superior T\u00e9cnico, University of Lisbon 2 , 2695-066 Bobadela, Portugal"},{"name":"IPFN, Instituto Superior T\u00e9cnico, University of Lisbon 3 , 1049-001 Lisbon, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7795-8573","authenticated-orcid":false,"given":"N. P.","family":"Barradas","sequence":"additional","affiliation":[{"name":"DECN, Instituto Superior T\u00e9cnico, University of Lisbon 2 , 2695-066 Bobadela, Portugal"},{"name":"IPFN, Instituto Superior T\u00e9cnico, University of Lisbon 3 , 1049-001 Lisbon, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0009-0004-2759-1813","authenticated-orcid":false,"given":"P.","family":"Costa Pinto","sequence":"additional","affiliation":[{"name":"European Organization for Nuclear Research, CERN 4 , 1211 Geneva 23, Switzerland"}]},{"given":"Y.","family":"Delaup","sequence":"additional","affiliation":[{"name":"European Organization for Nuclear Research, CERN 4 , 1211 Geneva 23, Switzerland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8838-0364","authenticated-orcid":false,"given":"I. M. M.","family":"Ferreira","sequence":"additional","affiliation":[{"name":"Materials Science Department, i3N\/CENIMAT, Nova School of Science and Technology 5 , 2829-516 Caparica, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0009-0004-2916-3433","authenticated-orcid":false,"given":"H.","family":"Neupert","sequence":"additional","affiliation":[{"name":"European Organization for Nuclear Research, CERN 4 , 1211 Geneva 23, Switzerland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8833-044X","authenticated-orcid":false,"given":"M.","family":"Himmerlich","sequence":"additional","affiliation":[{"name":"European Organization for Nuclear Research, CERN 4 , 1211 Geneva 23, Switzerland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2085-0390","authenticated-orcid":false,"given":"S.","family":"Pfeiffer","sequence":"additional","affiliation":[{"name":"European Organization for Nuclear Research, CERN 4 , 1211 Geneva 23, Switzerland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2036-3648","authenticated-orcid":false,"given":"M.","family":"Rimoldi","sequence":"additional","affiliation":[{"name":"European Organization for Nuclear Research, CERN 4 , 1211 Geneva 23, Switzerland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9514-1022","authenticated-orcid":false,"given":"M.","family":"Taborelli","sequence":"additional","affiliation":[{"name":"European Organization for Nuclear Research, CERN 4 , 1211 Geneva 23, Switzerland"}]},{"given":"O. M. N. D.","family":"Teodoro","sequence":"additional","affiliation":[{"name":"Departament of Physics, CEFITEC, Nova School of Science and Technology 1 2829-516 Caparica, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5958-2282","authenticated-orcid":false,"given":"N.","family":"Bundaleski","sequence":"additional","affiliation":[{"name":"Departament of Physics, CEFITEC, Nova School of Science and Technology 1 2829-516 Caparica, Portugal"}]}],"member":"20","published-online":{"date-parts":[[2023,6,23]]},"reference":[{"key":"2023080301404762500_c1","year":"1977"},{"key":"2023080301404762500_c2","doi-asserted-by":"publisher","first-page":"014801","DOI":"10.1103\/PhysRevLett.93.014801","volume":"93","year":"2004","journal-title":"Phys. Rev.\n                        Lett."},{"key":"2023080301404762500_c3","doi-asserted-by":"publisher","first-page":"2120","DOI":"10.1063\/1.872883","volume":"5","year":"1998","journal-title":"Phys. Plasmas"},{"key":"2023080301404762500_c4","doi-asserted-by":"crossref","first-page":"305","DOI":"10.1007\/1-4020-3638-8","article-title":"A multipactor threshold in waveguides theory and\n                        experiment","volume-title":"Quasi-Optical Control of\n                            Intense Microwave Transmission","author":"Hirshfield","year":"2005"},{"key":"2023080301404762500_c5","year":"2017)"},{"key":"2023080301404762500_c6","doi-asserted-by":"publisher","first-page":"849","DOI":"10.1140\/epjp\/s13360-022-02929-8","volume":"137","year":"2022","journal-title":"Eur. Phys. J. Plus"},{"key":"2023080301404762500_c7","first-page":"1","author":"Cimino","year":"2020"},{"key":"2023080301404762500_c8","doi-asserted-by":"publisher","first-page":"041002","DOI":"10.1103\/PhysRevSTAB.11.041002","volume":"11","year":"2008","journal-title":"Phys. Rev. Spec. Top.\u2013Accel. Beams"},{"key":"2023080301404762500_c9","doi-asserted-by":"publisher","first-page":"071001","DOI":"10.1103\/PhysRevSTAB.14.071001","volume":"14","year":"2011","journal-title":"Phys. Rev. Spec. Top.\u2013Accel. Beams"},{"key":"2023080301404762500_c10","doi-asserted-by":"publisher","first-page":"148552","DOI":"10.1016\/j.apsusc.2020.148552","volume":"542","year":"2021","journal-title":"Appl. Surf.\n                        Sci."},{"key":"2023080301404762500_c11","first-page":"1603","article-title":"Vacuum characterisation\n                        of a woven carbon fiber cryosorber in presence of\n                    H2,","year":"2004"},{"key":"2023080301404762500_c12","first-page":"2639942","year":"2020"},{"key":"2023080301404762500_c13","volume-title":"Electron-Energy\n                            Loss Spectroscopy in the Electron Microscope","year":"2011"},{"key":"2023080301404762500_c14","doi-asserted-by":"publisher","first-page":"1875","DOI":"10.1016\/j.nimb.2007.10.044","volume":"266","year":"2008","journal-title":"Nucl. Instrum. Methods\n                        Phys. Res. B"},{"key":"2023080301404762500_c15","volume-title":"The Stopping and\n                            Range of Ions in Matter","year":"2008"},{"key":"2023080301404762500_c16","doi-asserted-by":"publisher","first-page":"27","DOI":"10.1016\/j.nimb.2015.09.035","volume":"371","year":"2016","journal-title":"Nucl. Instrum. Methods\n                        Phys. Res. B"},{"key":"2023080301404762500_c17","doi-asserted-by":"publisher","first-page":"378","DOI":"10.1016\/j.nimb.2004.10.074","volume":"228","year":"2005","journal-title":"Nucl. Instrum.\n                        Methods Phys. Res. B"},{"key":"2023080301404762500_c18","doi-asserted-by":"publisher","first-page":"232","DOI":"10.1002\/xrs.903","volume":"35","year":"2006","journal-title":"X-Ray Spectrom."},{"key":"2023080301404762500_c19","doi-asserted-by":"publisher","first-page":"31","DOI":"10.1016\/S0040-6090(98)01681-2","volume":"343\u2013344","year":"1999","journal-title":"Thin Solid Films"},{"key":"2023080301404762500_c20","doi-asserted-by":"publisher","first-page":"780","DOI":"10.1016\/j.nimb.2006.03.190","volume":"249","year":"2006","journal-title":"Nucl. Instrum. Methods\n                        Phys. Res. B"},{"key":"2023080301404762500_c21","doi-asserted-by":"publisher","first-page":"569","DOI":"10.1016\/0022-3093(72)90194-9","volume":"8\u201310","year":"1972","journal-title":"J. Non-Cryst.\n                        Solids"},{"key":"2023080301404762500_c22","doi-asserted-by":"publisher","first-page":"95","DOI":"10.4236\/ajcm.2012.22013","volume":"2","year":"2012","journal-title":"Am. J. Comput.\n                        Math."},{"key":"2023080301404762500_c23","doi-asserted-by":"publisher","first-page":"104904","DOI":"10.1063\/1.3021149","volume":"104","year":"2008","journal-title":"J. Appl. Phys."},{"key":"2023080301404762500_c24","first-page":"160","article-title":"Magnetron plasma\n                        deposition processes","volume-title":"Handbook of Plasma\n                            Processing Technology","author":"Rossnagel","year":"1990"},{"key":"2023080301404762500_c25","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1016\/0092-640X(84)90016-0","volume":"31","year":"1984","journal-title":"At. Data Nucl. Data\n                        Tables"},{"key":"2023080301404762500_c26","doi-asserted-by":"publisher","first-page":"2956","DOI":"10.1063\/1.471116","volume":"104","year":"1996","journal-title":"J. Chem. Phys."},{"key":"2023080301404762500_c27","doi-asserted-by":"publisher","first-page":"1115","DOI":"10.1103\/PhysRevA.52.1115","volume":"52","year":"1995","journal-title":"Phys. Rev. A"},{"key":"2023080301404762500_c28","doi-asserted-by":"publisher","first-page":"109907","DOI":"10.1016\/j.vacuum.2020.109907","volume":"184","year":"2021","journal-title":"Vacuum"},{"key":"2023080301404762500_c29","doi-asserted-by":"publisher","first-page":"R21","DOI":"10.1088\/0963-0252\/8\/3\/201","volume":"8","year":"1999","journal-title":"Plasma Sources Sci.\n                        Technol."},{"key":"2023080301404762500_c30","doi-asserted-by":"publisher","first-page":"991","DOI":"10.1103\/PhysRevA.16.991","volume":"16","year":"1977","journal-title":"Phys. Rev. A"},{"key":"2023080301404762500_c31","doi-asserted-by":"publisher","first-page":"2217","DOI":"10.1088\/0741-3335\/44\/10\/309","volume":"44","year":"2002","journal-title":"Plasma Phys. Controlled\n                        Fusion"},{"key":"2023080301404762500_c32","doi-asserted-by":"publisher","first-page":"357","DOI":"10.1088\/0022-3700\/11\/2\/019","volume":"11","year":"1978","journal-title":"J. Phys. B: At. Mol.\n                        Phys."},{"key":"2023080301404762500_c33","doi-asserted-by":"publisher","first-page":"116401","DOI":"10.1088\/0034-4885\/73\/11\/116401","volume":"73","year":"2010","journal-title":"Rep. Prog. Phys."},{"key":"2023080301404762500_c34","doi-asserted-by":"publisher","first-page":"525","DOI":"10.1039\/f29757100525","volume":"71","year":"1975","journal-title":"J. Chem. Soc. Faraday Trans.\n                        2"},{"key":"2023080301404762500_c35","doi-asserted-by":"publisher","first-page":"913","DOI":"10.1063\/1.2838023","volume":"37","year":"2008","journal-title":"J. Phys. Chem. Ref.\n                        Data"},{"key":"2023080301404762500_c36","first-page":"329","article-title":"Chemical\n                        sputtering","volume-title":"Sputtering by Particle\n                            Bombardment Experiments and Computer Calculations from Threshold to MeV\n                            Energies","author":"Behrisch","year":"2007"},{"key":"2023080301404762500_c37","doi-asserted-by":"publisher","first-page":"2373","DOI":"10.1063\/1.1594273","volume":"94","year":"2003","journal-title":"J. Appl. Phys."},{"key":"2023080301404762500_c38","doi-asserted-by":"publisher","first-page":"085401","DOI":"10.1103\/PhysRevB.72.085401","volume":"72","year":"2005","journal-title":"Phys. Rev. B"},{"key":"2023080301404762500_c39","doi-asserted-by":"publisher","first-page":"14095","DOI":"10.1103\/PhysRevB.61.14095","volume":"61","year":"2000","journal-title":"Phys. Rev. B"},{"key":"2023080301404762500_c40","doi-asserted-by":"publisher","first-page":"202","DOI":"10.1016\/j.carbon.2015.06.055","volume":"94","year":"2015","journal-title":"Carbon"},{"key":"2023080301404762500_c41","doi-asserted-by":"publisher","first-page":"32","DOI":"10.1088\/0031-8949\/2006\/T124\/007","volume":"T124","year":"2006","journal-title":"Phys. Scr."},{"key":"2023080301404762500_c42","doi-asserted-by":"publisher","first-page":"053037","DOI":"10.1088\/1367-2630\/10\/5\/053037","volume":"10","year":"2008","journal-title":"New J. Phys."},{"key":"2023080301404762500_c43","doi-asserted-by":"publisher","first-page":"1246","DOI":"10.1103\/PhysRevA.12.1246","volume":"12","year":"1975","journal-title":"Phys. Rev. A"},{"key":"2023080301404762500_c44","doi-asserted-by":"publisher","first-page":"9145","DOI":"10.1016\/j.ijhydene.2013.05.016","volume":"38","year":"2013","journal-title":"Int. J. Hydrogen\n                        Energy"},{"key":"2023080301404762500_c45","doi-asserted-by":"publisher","first-page":"321","DOI":"10.1016\/S0010-2180(70)80046-3","volume":"14","year":"1970","journal-title":"Combust. Flame"},{"key":"2023080301404762500_c46","doi-asserted-by":"publisher","first-page":"195102","DOI":"10.1088\/0022-3727\/49\/19\/195102","volume":"49","year":"2016","journal-title":"J. Phys. D: Appl.\n                        Phys."},{"key":"2023080301404762500_c47","doi-asserted-by":"publisher","first-page":"136","DOI":"10.1016\/j.cattod.2017.03.016","volume":"300","year":"2018","journal-title":"Catal. Today"},{"key":"2023080301404762500_c48","first-page":"141","article-title":"Carbon coating of the SPS dipole\n                        chambers","volume-title":"CERN Yellow Reports Conference\n                            Proceedings 2","author":"Cimino","year":"2013"},{"key":"2023080301404762500_c49","doi-asserted-by":"publisher","first-page":"37","DOI":"10.1016\/j.vacuum.2012.11.005","volume":"98","year":"2013","journal-title":"Vacuum"},{"key":"2023080301404762500_c50","unstructured":"See the supplementary material\n                    online for derivation of the expressions for\n                        Rtheor(\u03bb,n,\u03ba,dI)\n                    and\n                        Ttheor(\u03bb,n,\u03ba,dI)."}],"container-title":["Journal of Vacuum Science &amp; Technology A"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.aip.org\/avs\/jva\/article-pdf\/doi\/10.1116\/6.0002759\/18072048\/043412_1_6.0002759.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/pubs.aip.org\/avs\/jva\/article-pdf\/doi\/10.1116\/6.0002759\/18072048\/043412_1_6.0002759.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.aip.org\/avs\/jva\/article-pdf\/doi\/10.1116\/6.0002759\/18072048\/043412_1_6.0002759.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,4,22]],"date-time":"2025-04-22T19:47:12Z","timestamp":1745351232000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.aip.org\/jva\/article\/41\/4\/043412\/2900158\/Amorphous-carbon-thin-films-Mechanisms-of-hydrogen"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,6,23]]},"references-count":50,"journal-issue":{"issue":"4","published-print":{"date-parts":[[2023,7,1]]}},"URL":"https:\/\/doi.org\/10.1116\/6.0002759","relation":{},"ISSN":["0734-2101","1520-8559"],"issn-type":[{"value":"0734-2101","type":"print"},{"value":"1520-8559","type":"electronic"}],"subject":[],"published-other":{"date-parts":[[2023,7]]},"published":{"date-parts":[[2023,6,23]]},"article-number":"043412"}}