{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,1,24]],"date-time":"2024-01-24T05:23:48Z","timestamp":1706073828753},"reference-count":7,"publisher":"World Scientific Pub Co Pte Lt","issue":"04","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["J CIRCUIT SYST COMP"],"published-print":{"date-parts":[[2013,4]]},"abstract":"<jats:p> Chemical-mechanical polishing (CMP) is an essential process in deep-submicrometer LSI manufacturing to achieve Chip's planarization. It includes two processes: back-end-of-line (BEOL) and front-end-of-line (FEOL). This paper focuses on the problem of BEOL in 65 nm copper process. Although model-based dummy metal fill has become a tendency recently, the proposed improved rule-based dummy fill is appropriate still. A middle scale design is used for simulation. The metal density, oxide thickness, copper thickness, capacitance variation and variation of layout data size were investigated. The results show that improved rule-based dummy fill and model-based dummy fill have the same planarization, and proposed method has small capacitance variation. The GDS file size of the proposed rule-based fill is less than the model-based fill's. <\/jats:p>","DOI":"10.1142\/s0218126613500217","type":"journal-article","created":{"date-parts":[[2013,4,12]],"date-time":"2013-04-12T11:21:27Z","timestamp":1365765687000},"page":"1350021","source":"Crossref","is-referenced-by-count":1,"title":["AN IMPROVED RULE-BASED DUMMY METAL FILL METHOD FOR 65 NM ASIC DESIGN"],"prefix":"10.1142","volume":"22","author":[{"given":"XIAOMING","family":"CHEN","sequence":"first","affiliation":[{"name":"Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Linggong 2#, Dalian, Liaoning 116023, China"}]},{"given":"LING","family":"XIN","sequence":"additional","affiliation":[{"name":"Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Linggong 2#, Dalian, Liaoning 116023, China"}]},{"given":"JIANWEI","family":"ZHANG","sequence":"additional","affiliation":[{"name":"Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Linggong 2#, Dalian, Liaoning 116023, China"}]},{"given":"SONGSONG","family":"LI","sequence":"additional","affiliation":[{"name":"School of Electronics and Information Engineering, Dalian Ocean University, Heishijiao, Dalian, Liaoning 116024, China"}]}],"member":"219","published-online":{"date-parts":[[2013,5,2]]},"reference":[{"key":"rf1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2007.907061"},{"key":"rf4","doi-asserted-by":"publisher","DOI":"10.1149\/1.1758818"},{"key":"rf5","doi-asserted-by":"publisher","DOI":"10.1109\/43.974138"},{"key":"rf9","doi-asserted-by":"publisher","DOI":"10.1002\/9783527617746"},{"key":"rf10","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2004.834898"},{"key":"rf14","doi-asserted-by":"publisher","DOI":"10.1109\/43.931037"},{"key":"rf15","doi-asserted-by":"publisher","DOI":"10.1109\/66.475179"}],"container-title":["Journal of Circuits, Systems and Computers"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.worldscientific.com\/doi\/pdf\/10.1142\/S0218126613500217","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,8,6]],"date-time":"2019-08-06T20:31:12Z","timestamp":1565123472000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.worldscientific.com\/doi\/abs\/10.1142\/S0218126613500217"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":7,"journal-issue":{"issue":"04","published-online":{"date-parts":[[2013,5,2]]},"published-print":{"date-parts":[[2013,4]]}},"alternative-id":["10.1142\/S0218126613500217"],"URL":"https:\/\/doi.org\/10.1142\/s0218126613500217","relation":{},"ISSN":["0218-1266","1793-6454"],"issn-type":[{"value":"0218-1266","type":"print"},{"value":"1793-6454","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,4]]}}}