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In this work, a complete formulation for analysis of a CPS with a square diaphragm having a linkage film has been presented. A comprehensive study of sensor parameters like capacitance, deflection of the diaphragms, capacitive and mechanical sensitivity has been formulated to aid the choice of sensor characteristics. This work also focuses on the method to determine the fundamental design parameters for optimal operation. Complex and resource-expensive methods have been used in the past for the analysis of MEMS capacitive pressure sensors. MATLAB and ANSYS have been used to compute and simulate the results. <\/jats:p>","DOI":"10.1142\/s021812662350130x","type":"journal-article","created":{"date-parts":[[2022,10,14]],"date-time":"2022-10-14T09:02:21Z","timestamp":1665738141000},"source":"Crossref","is-referenced-by-count":5,"title":["Characteristic Analysis of a Square Diaphragm Capacitive Pressure Sensor with Linkage Film"],"prefix":"10.1142","volume":"32","author":[{"given":"P. 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