{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2022,4,5]],"date-time":"2022-04-05T11:03:55Z","timestamp":1649156635253},"reference-count":6,"publisher":"World Scientific Pub Co Pte Lt","issue":"02","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Int. J. Inf. Acquisition"],"published-print":{"date-parts":[[2004,6]]},"abstract":"<jats:p> This article describes a measurement system designed to evaluate the dynamic characteristics of micromechanical structures. The system is based on Active Homodyne demodulation M-Z optic-fiber interferometer and can measure out-of-plane movement with a sensitivity of 0.1 nm. To validate the system, vibration measurements have been carried on a typical MEMS structure \u2014 the sensitive elements of a kind of uncooled IR imaging system, an array of micromachined bimaterial cantilevers (micron dimensions) \u2014 and the results are compared with the ones from FEM model analysis and another measurement method which can be known as spectrum plane optic filtering. The three results agree with each other. The first natural frequencies of the structures are determined from data obtained by vibrating the structures using a PZT excitation system. The mode shapes and modal damping will be carried out soon after a scanning system is completed. <\/jats:p>","DOI":"10.1142\/s0219878904000185","type":"journal-article","created":{"date-parts":[[2004,9,1]],"date-time":"2004-09-01T06:58:54Z","timestamp":1094021934000},"page":"129-134","source":"Crossref","is-referenced-by-count":0,"title":["AN OPTIC-FIBER INTERFEROMETER FOR THE DYNAMIC CHARACTERIZATION OF MICROSTRUCTURES"],"prefix":"10.1142","volume":"01","author":[{"given":"CHONG","family":"PENG","sequence":"first","affiliation":[{"name":"CAS Key Laboratory of Mechanical Behavior  and Design of Material, University of Science and Technology of China, Hefei, Anhui 230027, P. R. China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"PEIQIANG","family":"ZHANG","sequence":"additional","affiliation":[{"name":"CAS Key Laboratory of Mechanical Behavior  and Design of Material, University of Science and Technology of China, Hefei, Anhui 230027, P. R. China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"219","published-online":{"date-parts":[[2012,1,25]]},"reference":[{"key":"rf1","volume":"20","author":"Duan Z.","journal-title":"Chinese Physics Letter"},{"key":"rf2","volume":"73","author":"Fernandes J. R.","journal-title":"Review of Scientific Instruments"},{"key":"rf3","doi-asserted-by":"publisher","DOI":"10.1109\/84.896761"},{"key":"rf5","doi-asserted-by":"publisher","DOI":"10.1016\/S0030-4018(00)00482-X"},{"key":"rf6","volume":"75","author":"Tyrrell J. W. G.","journal-title":"Review of Scientific Instruments"},{"key":"rf7","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)00075-2"}],"container-title":["International Journal of Information Acquisition"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.worldscientific.com\/doi\/pdf\/10.1142\/S0219878904000185","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,8,7]],"date-time":"2019-08-07T10:04:17Z","timestamp":1565172257000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.worldscientific.com\/doi\/abs\/10.1142\/S0219878904000185"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2004,6]]},"references-count":6,"journal-issue":{"issue":"02","published-online":{"date-parts":[[2012,1,25]]},"published-print":{"date-parts":[[2004,6]]}},"alternative-id":["10.1142\/S0219878904000185"],"URL":"https:\/\/doi.org\/10.1142\/s0219878904000185","relation":{},"ISSN":["0219-8789","1793-6985"],"issn-type":[{"value":"0219-8789","type":"print"},{"value":"1793-6985","type":"electronic"}],"subject":[],"published":{"date-parts":[[2004,6]]}}}