{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2022,4,3]],"date-time":"2022-04-03T23:14:12Z","timestamp":1649027652309},"reference-count":11,"publisher":"World Scientific Pub Co Pte Lt","issue":"02","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Int. J. Comp. Eng. Sci."],"published-print":{"date-parts":[[2003,6]]},"DOI":"10.1142\/s1465876303001253","type":"journal-article","created":{"date-parts":[[2004,2,5]],"date-time":"2004-02-05T22:46:30Z","timestamp":1076021190000},"page":"351-354","source":"Crossref","is-referenced-by-count":0,"title":["INFLUENCE OF APPLIED LOAD ON WAFER BONDING IN VACUUM"],"prefix":"10.1142","volume":"04","author":[{"given":"W. B.","family":"YU","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"J.","family":"WEI","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"C. M.","family":"TAN","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"S. S.","family":"DENG","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"M. L.","family":"NAI","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"219","reference":[{"key":"rf1","doi-asserted-by":"publisher","DOI":"10.1149\/1.1477209"},{"key":"rf3","doi-asserted-by":"publisher","DOI":"10.1063\/1.115335"},{"key":"rf4","doi-asserted-by":"publisher","DOI":"10.1149\/1.1390632"},{"key":"rf5","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.37.4197"},{"key":"rf6","doi-asserted-by":"publisher","DOI":"10.1149\/1.2221191"},{"key":"rf7","doi-asserted-by":"publisher","DOI":"10.1149\/1.2050045"},{"key":"rf8","volume-title":"Semiconductor Wafer Bonding: Science and Technology","author":"Tong Q.-Y.","year":"1999"},{"key":"rf9","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(93)85009-5"},{"key":"rf10","doi-asserted-by":"crossref","first-page":"410","DOI":"10.1016\/S0924-4247(98)00028-4","volume":"68","author":"Berthold A.","journal-title":"Sensors and Actuators"},{"key":"rf11","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.28.1735"},{"key":"rf12","doi-asserted-by":"publisher","DOI":"10.1016\/S0254-0584(02)00601-6"}],"container-title":["International Journal of Computational Engineering Science"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/www.worldscientific.com\/doi\/pdf\/10.1142\/S1465876303001253","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,15]],"date-time":"2017-06-15T23:43:11Z","timestamp":1497570191000},"score":1,"resource":{"primary":{"URL":"http:\/\/www.worldscientific.com\/doi\/abs\/10.1142\/S1465876303001253"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,6]]},"references-count":11,"journal-issue":{"issue":"02","published-print":{"date-parts":[[2003,6]]}},"alternative-id":["10.1142\/S1465876303001253"],"URL":"https:\/\/doi.org\/10.1142\/s1465876303001253","relation":{},"ISSN":["1465-8763"],"issn-type":[{"value":"1465-8763","type":"print"}],"subject":[],"published":{"date-parts":[[2003,6]]}}}