{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2022,4,3]],"date-time":"2022-04-03T14:57:08Z","timestamp":1648997828729},"reference-count":3,"publisher":"World Scientific Pub Co Pte Lt","issue":"03","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Int. J. Comp. Eng. Sci."],"published-print":{"date-parts":[[2003,9]]},"DOI":"10.1142\/s1465876303001587","type":"journal-article","created":{"date-parts":[[2004,2,6]],"date-time":"2004-02-06T03:46:30Z","timestamp":1076039190000},"page":"489-492","source":"Crossref","is-referenced-by-count":1,"title":["DESIGN AND FABRICATION OF <font>SIO<\/font><sub>2<\/sub> MICROMECHANICAL STRUCTURES INSIDE ANISOTROPICALLY ETCHED CAVITY"],"prefix":"10.1142","volume":"04","author":[{"given":"PREM","family":"PAL","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"SUNEET","family":"TULI","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"SUDHIR","family":"CHANDRA","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"219","reference":[{"key":"rf2","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(02)00137-1"},{"key":"rf3","first-page":"1241","volume":"10","author":"Petersen K. E.","journal-title":"IEEE Trans. Electr. Dev."},{"key":"rf4","first-page":"539","volume":"23","author":"Petersen K. E.","journal-title":"IBM J. Res. Develop."}],"container-title":["International Journal of Computational Engineering Science"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/www.worldscientific.com\/doi\/pdf\/10.1142\/S1465876303001587","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2016,12,2]],"date-time":"2016-12-02T03:47:10Z","timestamp":1480650430000},"score":1,"resource":{"primary":{"URL":"http:\/\/www.worldscientific.com\/doi\/abs\/10.1142\/S1465876303001587"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,9]]},"references-count":3,"journal-issue":{"issue":"03","published-print":{"date-parts":[[2003,9]]}},"alternative-id":["10.1142\/S1465876303001587"],"URL":"https:\/\/doi.org\/10.1142\/s1465876303001587","relation":{},"ISSN":["1465-8763"],"issn-type":[{"value":"1465-8763","type":"print"}],"subject":[],"published":{"date-parts":[[2003,9]]}}}