{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,23]],"date-time":"2025-10-23T10:51:56Z","timestamp":1761216716956},"reference-count":4,"publisher":"World Scientific Pub Co Pte Lt","issue":"03","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Int. J. Comp. Eng. Sci."],"published-print":{"date-parts":[[2003,9]]},"DOI":"10.1142\/s1465876303001599","type":"journal-article","created":{"date-parts":[[2004,2,6]],"date-time":"2004-02-06T03:46:30Z","timestamp":1076039190000},"page":"493-496","source":"Crossref","is-referenced-by-count":3,"title":["A NOVEL Z-AXIS ACCELEROMETER WITH PERFECTLY-ALIGNED, FULLY-OFFSET VERTICAL COMBS FABRICATED USING THE EXTENDED SACRIFICIAL BULK MICROMACHINING PROCESS"],"prefix":"10.1142","volume":"04","author":[{"given":"DONGIL (DAN)","family":"CHO","sequence":"first","affiliation":[]},{"given":"HYOUNGHO","family":"KO","sequence":"additional","affiliation":[]},{"given":"JONGPAL","family":"KIM","sequence":"additional","affiliation":[]},{"given":"SANGJUN","family":"PARK","sequence":"additional","affiliation":[]},{"given":"DONGHUN","family":"KWAK","sequence":"additional","affiliation":[]},{"given":"TAEYONG","family":"SONG","sequence":"additional","affiliation":[]},{"given":"WILLIAM","family":"CARR","sequence":"additional","affiliation":[]},{"given":"JAMES","family":"BUSS","sequence":"additional","affiliation":[]}],"member":"219","reference":[{"key":"rf1","first-page":"1389","volume":"3","author":"Madni A. M.","journal-title":"Intelligent Robots and Systems"},{"key":"rf2","first-page":"1066","author":"Jeong H.","journal-title":"Transducers'99"},{"key":"rf3","doi-asserted-by":"crossref","unstructured":"R. A.\u00a0Conant, A flat highfrequency scanning mirror (Hilton Head, 2000)\u00a0pp. 6\u20139.","DOI":"10.31438\/trf.hh2000.2"},{"key":"rf6","first-page":"653","volume":"1","author":"Kim J.","journal-title":"Sensors and Actuators A"}],"container-title":["International Journal of Computational Engineering Science"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/www.worldscientific.com\/doi\/pdf\/10.1142\/S1465876303001599","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,6,14]],"date-time":"2021-06-14T16:20:33Z","timestamp":1623687633000},"score":1,"resource":{"primary":{"URL":"http:\/\/www.worldscientific.com\/doi\/abs\/10.1142\/S1465876303001599"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,9]]},"references-count":4,"journal-issue":{"issue":"03","published-print":{"date-parts":[[2003,9]]}},"alternative-id":["10.1142\/S1465876303001599"],"URL":"https:\/\/doi.org\/10.1142\/s1465876303001599","relation":{},"ISSN":["1465-8763"],"issn-type":[{"value":"1465-8763","type":"print"}],"subject":[],"published":{"date-parts":[[2003,9]]}}}