{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,23]],"date-time":"2025-09-23T13:03:13Z","timestamp":1758632593234,"version":"3.41.0"},"publisher-location":"New York, NY, USA","reference-count":10,"publisher":"ACM","license":[{"start":{"date-parts":[[2009,7,26]],"date-time":"2009-07-26T00:00:00Z","timestamp":1248566400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.acm.org\/publications\/policies\/copyright_policy#Background"}],"content-domain":{"domain":["dl.acm.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2009,7,26]]},"DOI":"10.1145\/1629911.1630054","type":"proceedings-article","created":{"date-parts":[[2009,10,13]],"date-time":"2009-10-13T15:11:11Z","timestamp":1255446671000},"page":"551-556","update-policy":"https:\/\/doi.org\/10.1145\/crossmark-policy","source":"Crossref","is-referenced-by-count":7,"title":["Variability analysis under layout pattern-dependent rapid-thermal annealing process"],"prefix":"10.1145","author":[{"given":"Yun","family":"Ye","sequence":"first","affiliation":[{"name":"Arizona State University, Tempe, AZ"}]},{"given":"Frank","family":"Liu","sequence":"additional","affiliation":[{"name":"IBM Austin Research Laboratory, Austin, TX"}]},{"given":"Min","family":"Chen","sequence":"additional","affiliation":[{"name":"Arizona State University, Tempe, AZ"}]},{"given":"Yu","family":"Cao","sequence":"additional","affiliation":[{"name":"Arizona State University, Tempe, AZ"}]}],"member":"320","published-online":{"date-parts":[[2009,7,26]]},"reference":[{"key":"e_1_3_2_1_1_1","first-page":"170","volume-title":"VLSI Symposium on Technology","author":"Ahsan I.","year":"2006","unstructured":"I. Ahsan , Driven Intra-Die Variations in Stage Delay , and Parametric Sensitivities for 65nm Technology ,\" VLSI Symposium on Technology , pp. 170 -- 171 , 2006 . I. Ahsan, et al., \"RTA-Driven Intra-Die Variations in Stage Delay, and Parametric Sensitivities for 65nm Technology,\" VLSI Symposium on Technology, pp. 170--171, 2006."},{"key":"e_1_3_2_1_2_1","doi-asserted-by":"publisher","DOI":"10.1109\/RTP.2007.4383832"},{"key":"e_1_3_2_1_3_1","first-page":"47","article-title":"Millisecond Annealing with Flashlamps: Tool and Process Challenges","author":"Gebel T.","year":"2006","unstructured":"T. Gebel , L. Rebohle , R. Fendler , W. Hentsch , W. Skorupa , M. Voelskow , W. Anwand , R. A. Yankov , \" Millisecond Annealing with Flashlamps: Tool and Process Challenges ,\" RTP , pp. 47 -- 55 , 2006 . T. Gebel, L. Rebohle, R. Fendler, W. Hentsch, W. Skorupa, M. Voelskow, W. Anwand, R. A. Yankov, \"Millisecond Annealing with Flashlamps: Tool and Process Challenges,\" RTP, pp. 47--55, 2006.","journal-title":"RTP"},{"key":"e_1_3_2_1_4_1","volume-title":"Proc.","volume":"912","author":"Timans P.","year":"2006","unstructured":"P. Timans , J. Gelpey , S. McCoy , W. Lerch , S. Paul , \" Millisecond Annealing : Past, Present and Future,\" Mater. Res. Soc. Symp . Proc. vol. 912 , 2006 . P. Timans, J. Gelpey, S. McCoy, W. Lerch, S. Paul, \"Millisecond Annealing: Past, Present and Future,\" Mater. Res. Soc. Symp. Proc. vol. 912, 2006."},{"key":"e_1_3_2_1_5_1","first-page":"251","article-title":"High-Activation Laser Anneal Process for the 45nm CMOS Technology Platform","author":"Bidaud M.","year":"2007","unstructured":"M. Bidaud , \" High-Activation Laser Anneal Process for the 45nm CMOS Technology Platform ,\" RTP , pp. 251 -- 256 , 2007 . M. Bidaud, \"High-Activation Laser Anneal Process for the 45nm CMOS Technology Platform,\" RTP, pp. 251--256, 2007.","journal-title":"RTP"},{"key":"e_1_3_2_1_6_1","first-page":"321","article-title":"First Quantitative Observation of Local Temperature Fluctuation in Millisecond Annealing","author":"Kubo T.","year":"2007","unstructured":"T. Kubo , T. Sukegawa , E. Takii , T. Yamamoto , S. Satoh and M. Kase , \" First Quantitative Observation of Local Temperature Fluctuation in Millisecond Annealing ,\" RTP , pp. 321 -- 326 , 2007 . T. Kubo, T. Sukegawa, E. Takii, T. Yamamoto, S. Satoh and M. Kase, \"First Quantitative Observation of Local Temperature Fluctuation in Millisecond Annealing,\" RTP, pp. 321--326, 2007.","journal-title":"RTP"},{"key":"e_1_3_2_1_7_1","first-page":"25","volume-title":"International Workshop on Junction Technology","author":"Feng L. M.","year":"2006","unstructured":"L. M. Feng , Y. Wang , D. A. Markle , \" Minimizing Pattern Dependency in Millisecond Annealing ,\" International Workshop on Junction Technology , pp. 25 -- 30 , 2006 . L. M. Feng, Y. Wang, D. A. Markle, \"Minimizing Pattern Dependency in Millisecond Annealing,\" International Workshop on Junction Technology, pp. 25--30, 2006."},{"key":"e_1_3_2_1_8_1","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2002.1013274"},{"key":"e_1_3_2_1_9_1","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2002.805232"},{"key":"e_1_3_2_1_10_1","doi-asserted-by":"publisher","DOI":"10.1109\/ISQED.2006.91"}],"event":{"name":"DAC '09: The 46th Annual Design Automation Conference 2009","sponsor":["EDAC Electronic Design Automation Consortium","SIGDA ACM Special Interest Group on Design Automation","IEEE-CAS Circuits & Systems"],"location":"San Francisco California","acronym":"DAC '09"},"container-title":["Proceedings of the 46th Annual Design Automation Conference"],"original-title":[],"link":[{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/1629911.1630054","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/dl.acm.org\/doi\/pdf\/10.1145\/1629911.1630054","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,6,18]],"date-time":"2025-06-18T12:23:16Z","timestamp":1750249396000},"score":1,"resource":{"primary":{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/1629911.1630054"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,7,26]]},"references-count":10,"alternative-id":["10.1145\/1629911.1630054","10.1145\/1629911"],"URL":"https:\/\/doi.org\/10.1145\/1629911.1630054","relation":{},"subject":[],"published":{"date-parts":[[2009,7,26]]},"assertion":[{"value":"2009-07-26","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}