{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,29]],"date-time":"2025-09-29T11:52:41Z","timestamp":1759146761229,"version":"3.41.0"},"publisher-location":"New York, NY, USA","reference-count":13,"publisher":"ACM","license":[{"start":{"date-parts":[[2013,3,24]],"date-time":"2013-03-24T00:00:00Z","timestamp":1364083200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.acm.org\/publications\/policies\/copyright_policy#Background"}],"content-domain":{"domain":["dl.acm.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2013,3,24]]},"DOI":"10.1145\/2451916.2451937","type":"proceedings-article","created":{"date-parts":[[2013,3,25]],"date-time":"2013-03-25T14:14:26Z","timestamp":1364220866000},"page":"69-76","update-policy":"https:\/\/doi.org\/10.1145\/crossmark-policy","source":"Crossref","is-referenced-by-count":5,"title":["A structured routing architecture and its design methodology suitable for high-throughput electron beam direct writing with character projection"],"prefix":"10.1145","author":[{"given":"Rimon","family":"Ikeno","sequence":"first","affiliation":[{"name":"The University of Tokyo, Tokyo, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Takashi","family":"Maruyama","sequence":"additional","affiliation":[{"name":"e-Shuttle, Inc., Yokohama, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Satoshi","family":"Komatsu","sequence":"additional","affiliation":[{"name":"The University of Tokyo, Tokyo, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tetsuya","family":"Iizuka","sequence":"additional","affiliation":[{"name":"The University of Tokyo, Tokyo, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Makoto","family":"Ikeda","sequence":"additional","affiliation":[{"name":"The University of Tokyo, Tokyo, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kunihiro","family":"Asada","sequence":"additional","affiliation":[{"name":"The University of Tokyo, Tokyo, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"320","published-online":{"date-parts":[[2013,3,24]]},"reference":[{"key":"e_1_3_2_1_1_1","doi-asserted-by":"publisher","DOI":"10.1116\/1.569621"},{"key":"e_1_3_2_1_2_1","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1979.19475"},{"key":"e_1_3_2_1_3_1","doi-asserted-by":"crossref","DOI":"10.1116\/1.2976603","article-title":"Electron beams in individual column cells of multicolumn cell system","author":"Yamada A.","year":"2008","unstructured":"Yamada , A. , Yasuda , H. , and Yamabe , M. 2008 . Electron beams in individual column cells of multicolumn cell system . Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 26 ( Nov.\/Dec. 2008), 2025--2031. Yamada, A., Yasuda, H., and Yamabe, M. 2008. Electron beams in individual column cells of multicolumn cell system. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 26 (Nov.\/Dec. 2008), 2025--2031.","journal-title":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 26"},{"volume-title":"Technical Digest of 2000 IEEE International Electron Devices Meeting (San Francisco, CA, December 11-13, 2000). IEDM '00. IEEE, 833--836","author":"Inanami R.","key":"e_1_3_2_1_4_1","unstructured":"Inanami , R. , Magoshi , S. , Kousai , S. , Hamada , M. , Takayanagi , T. , Sugihara , K. , Okumura , K. , and Kuroda , T . 2000. Throughput enhancement strategy of maskless electron beam direct writing for logic device . In Technical Digest of 2000 IEEE International Electron Devices Meeting (San Francisco, CA, December 11-13, 2000). IEDM '00. IEEE, 833--836 . Inanami, R., Magoshi, S., Kousai, S., Hamada, M., Takayanagi, T., Sugihara, K., Okumura, K., and Kuroda, T. 2000. Throughput enhancement strategy of maskless electron beam direct writing for logic device. In Technical Digest of 2000 IEEE International Electron Devices Meeting (San Francisco, CA, December 11-13, 2000). IEDM '00. IEEE, 833--836."},{"key":"e_1_3_2_1_5_1","doi-asserted-by":"crossref","unstructured":"Sugihara M. Takata T. Nakamura K. Inanami R. Hayashi H. Kishimoto K. Hasebe T. Kawano Y. Matsunaga Y. Murakami K. and Okumura K. 2006. Cell library development methodology for throughput enhancement of character projection equipment. IEICE Trans. Electronics E89-C (Mar. 2006) 377--383.  Sugihara M. Takata T. Nakamura K. Inanami R. Hayashi H. Kishimoto K. Hasebe T. Kawano Y. Matsunaga Y. Murakami K. and Okumura K. 2006. Cell library development methodology for throughput enhancement of character projection equipment. IEICE Trans. Electronics E89-C (Mar. 2006) 377--383.","DOI":"10.1093\/ietele\/e89-c.3.377"},{"volume-title":"Proceedings of the 17th IEEE\/SEMI Advanced Semiconductor Manufacturing Conference (Boston, MA, May 22--24, 2006). ASMC 2006. ACM\/IEEE, 253--256","author":"Kosai S.","key":"e_1_3_2_1_6_1","unstructured":"Kosai , S. , Inanami , R. , Hamada , M. , Magoshi , S. , and Hatori , F . 2006. Throughput enhancement in electron beam direct writing by multiple-cell shot technique for logic devices . In Proceedings of the 17th IEEE\/SEMI Advanced Semiconductor Manufacturing Conference (Boston, MA, May 22--24, 2006). ASMC 2006. ACM\/IEEE, 253--256 . Kosai, S., Inanami, R., Hamada, M., Magoshi, S., and Hatori, F. 2006. Throughput enhancement in electron beam direct writing by multiple-cell shot technique for logic devices. In Proceedings of the 17th IEEE\/SEMI Advanced Semiconductor Manufacturing Conference (Boston, MA, May 22--24, 2006). ASMC 2006. ACM\/IEEE, 253--256."},{"key":"e_1_3_2_1_7_1","doi-asserted-by":"publisher","DOI":"10.1093\/ietfec\/e89-a.12.3546"},{"key":"e_1_3_2_1_8_1","doi-asserted-by":"publisher","DOI":"10.1117\/12.916315"},{"key":"e_1_3_2_1_9_1","volume-title":"Proceedings of SPIE 6921: Emerging Lithographic Technologies XII","author":"Minh H. P. D.","year":"2008","unstructured":"Minh , H. P. D. , Iizuka , T. , Ikeda , M. , and Asada , K . 2008. Minimization of electron beam shots to enhance the throughput of character projection electron beam direct writing . In Proceedings of SPIE 6921: Emerging Lithographic Technologies XII ( San Jose, CA , February 26-28, 2008 ). Minh, H. P. D., Iizuka, T., Ikeda, M., and Asada, K. 2008. Minimization of electron beam shots to enhance the throughput of character projection electron beam direct writing. In Proceedings of SPIE 6921: Emerging Lithographic Technologies XII (San Jose, CA, February 26-28, 2008)."},{"key":"e_1_3_2_1_10_1","volume-title":"Proceedings of 17th Asia and South Pacific Design Automation Conference","author":"Du P.","year":"2012","unstructured":"Du , P. , Zhao , W. , Weng , S.-H. , Cheng , C.-K. , and Graham , R . 2012. Character design and stamp algorithms for character projection electron-beam lithography . In Proceedings of 17th Asia and South Pacific Design Automation Conference ( Sydney, Australia, January 30- February 2, 2012 ). ASP-DAC 2012. 725--730. Du, P., Zhao, W., Weng, S.-H., Cheng, C.-K., and Graham, R. 2012. Character design and stamp algorithms for character projection electron-beam lithography. In Proceedings of 17th Asia and South Pacific Design Automation Conference (Sydney, Australia, January 30-February 2, 2012). ASP-DAC 2012. 725--730."},{"key":"e_1_3_2_1_11_1","doi-asserted-by":"publisher","DOI":"10.1109\/ASPDAC.2013.6509605"},{"key":"e_1_3_2_1_12_1","doi-asserted-by":"publisher","DOI":"10.1145\/359094.359101"},{"key":"e_1_3_2_1_13_1","unstructured":"http:\/\/opencores.org  http:\/\/opencores.org"}],"event":{"name":"ISPD'13: International Symposium on Physical Design","sponsor":["SIGDA ACM Special Interest Group on Design Automation"],"location":"Stateline Nevada USA","acronym":"ISPD'13"},"container-title":["Proceedings of the 2013 ACM International symposium on Physical Design"],"original-title":[],"link":[{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/2451916.2451937","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/dl.acm.org\/doi\/pdf\/10.1145\/2451916.2451937","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,6,18]],"date-time":"2025-06-18T08:35:19Z","timestamp":1750235719000},"score":1,"resource":{"primary":{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/2451916.2451937"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,3,24]]},"references-count":13,"alternative-id":["10.1145\/2451916.2451937","10.1145\/2451916"],"URL":"https:\/\/doi.org\/10.1145\/2451916.2451937","relation":{},"subject":[],"published":{"date-parts":[[2013,3,24]]},"assertion":[{"value":"2013-03-24","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}