{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,24]],"date-time":"2026-07-24T04:17:46Z","timestamp":1784866666682,"version":"3.55.0"},"publisher-location":"New York, NY, USA","reference-count":7,"publisher":"ACM","license":[{"start":{"date-parts":[[2016,8,8]],"date-time":"2016-08-08T00:00:00Z","timestamp":1470614400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.acm.org\/publications\/policies\/copyright_policy#Background"}],"content-domain":{"domain":["dl.acm.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2016,8,8]]},"DOI":"10.1145\/2934583.2934622","type":"proceedings-article","created":{"date-parts":[[2016,7,29]],"date-time":"2016-07-29T14:51:46Z","timestamp":1469803906000},"page":"76-81","update-policy":"https:\/\/doi.org\/10.1145\/crossmark-policy","source":"Crossref","is-referenced-by-count":16,"title":["Physical Design Solutions to Tackle FEOL\/BEOL Degradation in Gate-level Monolithic 3D ICs"],"prefix":"10.1145","author":[{"given":"Bon Woong","family":"Ku","sequence":"first","affiliation":[{"name":"School of ECE, Georgia Institute of Technology, Atlanta, GA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Peter","family":"Debacker","sequence":"additional","affiliation":[{"name":"IMEC, Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dragomir","family":"Milojevic","sequence":"additional","affiliation":[{"name":"IMEC, Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Praveen","family":"Raghavan","sequence":"additional","affiliation":[{"name":"IMEC, Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Diederik","family":"Verkest","sequence":"additional","affiliation":[{"name":"IMEC, Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Aaron","family":"Thean","sequence":"additional","affiliation":[{"name":"IMEC, Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sung Kyu","family":"Lim","sequence":"additional","affiliation":[{"name":"School of ECE, Georgia Institute of Technology, Atlanta, GA"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"320","published-online":{"date-parts":[[2016,8,8]]},"reference":[{"key":"e_1_3_2_1_1_1","doi-asserted-by":"publisher","DOI":"10.1109\/IITC.2014.6831837"},{"key":"e_1_3_2_1_2_1","doi-asserted-by":"publisher","DOI":"10.1109\/ISLPED.2015.7273514"},{"key":"e_1_3_2_1_3_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.nimb.2015.12.021"},{"key":"e_1_3_2_1_4_1","first-page":"90481R","volume-title":"Proc. SPIE","volume":"9048","author":"Mallik A.","year":"2014","unstructured":"A. Mallik The economic impact of EUV lithography on critical process modules . In Proc. SPIE , volume 9048 , pages 90481R -- 90481R --12, 2014 . A. Mallik et al. The economic impact of EUV lithography on critical process modules. In Proc. SPIE, volume 9048, pages 90481R--90481R--12, 2014."},{"key":"e_1_3_2_1_5_1","doi-asserted-by":"publisher","DOI":"10.1145\/2627369.2627642"},{"key":"e_1_3_2_1_6_1","doi-asserted-by":"publisher","DOI":"10.1145\/2593069.2593188"},{"key":"e_1_3_2_1_7_1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2014.2387827"}],"event":{"name":"ISLPED '16: International Symposium on Low Power Electronics and Design","location":"San Francisco Airport CA USA","acronym":"ISLPED '16","sponsor":["SIGDA ACM Special Interest Group on Design Automation"]},"container-title":["Proceedings of the 2016 International Symposium on Low Power Electronics and Design"],"original-title":[],"link":[{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/2934583.2934622","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/dl.acm.org\/doi\/pdf\/10.1145\/2934583.2934622","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,6,18]],"date-time":"2025-06-18T04:56:19Z","timestamp":1750222579000},"score":1,"resource":{"primary":{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/2934583.2934622"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,8,8]]},"references-count":7,"alternative-id":["10.1145\/2934583.2934622","10.1145\/2934583"],"URL":"https:\/\/doi.org\/10.1145\/2934583.2934622","relation":{},"subject":[],"published":{"date-parts":[[2016,8,8]]},"assertion":[{"value":"2016-08-08","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}