{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,13]],"date-time":"2026-03-13T08:38:56Z","timestamp":1773391136136,"version":"3.50.1"},"publisher-location":"New York, NY, USA","reference-count":52,"publisher":"ACM","license":[{"start":{"date-parts":[[2019,1,21]],"date-time":"2019-01-21T00:00:00Z","timestamp":1548028800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.acm.org\/publications\/policies\/copyright_policy#Background"}],"content-domain":{"domain":["dl.acm.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2019,1,21]]},"DOI":"10.1145\/3287624.3288746","type":"proceedings-article","created":{"date-parts":[[2019,1,18]],"date-time":"2019-01-18T21:45:18Z","timestamp":1547847918000},"page":"292-298","update-policy":"https:\/\/doi.org\/10.1145\/crossmark-policy","source":"Crossref","is-referenced-by-count":27,"title":["LithoROC"],"prefix":"10.1145","author":[{"given":"Wei","family":"Ye","sequence":"first","affiliation":[{"name":"UT Austin"}]},{"given":"Yibo","family":"Lin","sequence":"additional","affiliation":[{"name":"UT Austin"}]},{"given":"Meng","family":"Li","sequence":"additional","affiliation":[{"name":"UT Austin"}]},{"given":"Qiang","family":"Liu","sequence":"additional","affiliation":[{"name":"UT Austin"}]},{"given":"David Z.","family":"Pan","sequence":"additional","affiliation":[{"name":"UT Austin"}]}],"member":"320","published-online":{"date-parts":[[2019,1,21]]},"reference":[{"key":"e_1_3_2_1_1_1","first-page":"1","volume-title":"International Society for Optics and Photonics","author":"Mack C. A.","year":"2004","unstructured":"C. A. Mack , \"Thirty years of lithography simulation,\" in Optical Microlithography XVIII, vol. 5754 . International Society for Optics and Photonics , 2004 , pp. 1 -- 13 . C. A. Mack, \"Thirty years of lithography simulation,\" in Optical Microlithography XVIII, vol. 5754. International Society for Optics and Photonics, 2004, pp. 1--13."},{"key":"e_1_3_2_1_2_1","first-page":"839","volume-title":"Accurate detection for process-hotspots with vias and incomplete specification,\" in IEEE\/ACM International Conference on Computer-Aided Design (ICCAD)","author":"Xu J.","year":"2007","unstructured":"J. Xu , S. Sinha , and C. C. Chiang , \" Accurate detection for process-hotspots with vias and incomplete specification,\" in IEEE\/ACM International Conference on Computer-Aided Design (ICCAD) , 2007 , pp. 839 -- 846 . J. Xu, S. Sinha, and C. C. Chiang, \"Accurate detection for process-hotspots with vias and incomplete specification,\" in IEEE\/ACM International Conference on Computer-Aided Design (ICCAD), 2007, pp. 839--846."},{"key":"e_1_3_2_1_3_1","doi-asserted-by":"publisher","DOI":"10.1145\/2228360.2228576"},{"key":"e_1_3_2_1_4_1","doi-asserted-by":"publisher","DOI":"10.1145\/2463209.2488817"},{"key":"e_1_3_2_1_5_1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2014.2351273"},{"key":"e_1_3_2_1_6_1","volume-title":"A fuzzy pattern matching method based on graph kernel for lithography hotspot detection,\" in Design-Process-Technology Co-optimization for Manufacturability XI","author":"Nitta I.","year":"2017","unstructured":"I. Nitta , Y. Kanazawa , T. Ishida , and K. Banno , \" A fuzzy pattern matching method based on graph kernel for lithography hotspot detection,\" in Design-Process-Technology Co-optimization for Manufacturability XI , vol. 10148 . International Society for Optics and Photonics , 2017 . I. Nitta, Y. Kanazawa, T. Ishida, and K. Banno, \"A fuzzy pattern matching method based on graph kernel for lithography hotspot detection,\" in Design-Process-Technology Co-optimization for Manufacturability XI, vol. 10148. International Society for Optics and Photonics, 2017."},{"key":"e_1_3_2_1_7_1","doi-asserted-by":"publisher","DOI":"10.1145\/1629911.1630053"},{"key":"e_1_3_2_1_8_1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2011.2164537"},{"key":"e_1_3_2_1_9_1","first-page":"263","volume-title":"EPIC: Efficient prediction of IC manufacturing hotspots with a unified meta-classification formulation,\" in IEEE\/ACM Asia and South Pacific Design Automation Conference (ASPDAC)","author":"Ding D.","year":"2012","unstructured":"D. Ding , B. Yu , J. Ghosh , and D. Z. Pan , \" EPIC: Efficient prediction of IC manufacturing hotspots with a unified meta-classification formulation,\" in IEEE\/ACM Asia and South Pacific Design Automation Conference (ASPDAC) , 2012 , pp. 263 -- 270 . D. Ding, B. Yu, J. Ghosh, and D. Z. Pan, \"EPIC: Efficient prediction of IC manufacturing hotspots with a unified meta-classification formulation,\" in IEEE\/ACM Asia and South Pacific Design Automation Conference (ASPDAC), 2012, pp. 263--270."},{"key":"e_1_3_2_1_10_1","doi-asserted-by":"publisher","DOI":"10.1145\/2463209.2488816"},{"key":"e_1_3_2_1_11_1","volume-title":"A new lithography hotspot detection framework based on AdaBoost classifier and simplified feature extraction,\" in Proceedings of SPIE","author":"Matsunawa T.","year":"2015","unstructured":"T. Matsunawa , J.-R. Gao , B. Yu , and D. Z. Pan , \" A new lithography hotspot detection framework based on AdaBoost classifier and simplified feature extraction,\" in Proceedings of SPIE , vol. 9427 , 2015 . T. Matsunawa, J.-R. Gao, B. Yu, and D. Z. Pan, \"A new lithography hotspot detection framework based on AdaBoost classifier and simplified feature extraction,\" in Proceedings of SPIE, vol. 9427, 2015."},{"key":"e_1_3_2_1_12_1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2014.2387858"},{"key":"e_1_3_2_1_13_1","doi-asserted-by":"publisher","DOI":"10.1145\/2966986.2967032"},{"key":"e_1_3_2_1_14_1","first-page":"81","volume-title":"Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation,\" in IEEE\/ACM Asia and South Pacific Design Automation Conference (ASPDAC)","author":"Tomioka Y.","year":"2017","unstructured":"Y. Tomioka , T. Matsunawa , C. Kodama , and S. Nojima , \" Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation,\" in IEEE\/ACM Asia and South Pacific Design Automation Conference (ASPDAC) , 2017 , pp. 81 -- 86 . Y. Tomioka, T. Matsunawa, C. Kodama, and S. Nojima, \"Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation,\" in IEEE\/ACM Asia and South Pacific Design Automation Conference (ASPDAC), 2017, pp. 81--86."},{"key":"e_1_3_2_1_15_1","doi-asserted-by":"publisher","DOI":"10.1145\/3036669.3036673"},{"key":"e_1_3_2_1_16_1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2017.2750068"},{"key":"e_1_3_2_1_17_1","volume-title":"Automatic layout feature extraction for lithography hotspot detection based on deep neural network,\" in SPIE Advanced Lithography","author":"Matsunawa T.","year":"2016","unstructured":"T. Matsunawa , S. Nojima , and T. Kotani , \" Automatic layout feature extraction for lithography hotspot detection based on deep neural network,\" in SPIE Advanced Lithography , vol. 9781 , 2016 . T. Matsunawa, S. Nojima, and T. Kotani, \"Automatic layout feature extraction for lithography hotspot detection based on deep neural network,\" in SPIE Advanced Lithography, vol. 9781, 2016."},{"key":"e_1_3_2_1_18_1","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.15.4.043507"},{"issue":"3","key":"e_1_3_2_1_19_1","first-page":"033504","article-title":"Imbalance aware lithography hotspot detection: a deep learning approach","volume":"16","author":"Yang H.","year":"2017","unstructured":"H. Yang , L. Luo , J. Su , C. Lin , and B. Yu , \" Imbalance aware lithography hotspot detection: a deep learning approach ,\" Journal of Micro\/Nanolithography, MEMS, and MOEMS (JM3) , vol. 16 , no. 3 , p. 033504 , 2017 . H. Yang, L. Luo, J. Su, C. Lin, and B. Yu, \"Imbalance aware lithography hotspot detection: a deep learning approach,\" Journal of Micro\/Nanolithography, MEMS, and MOEMS (JM3), vol. 16, no. 3, p. 033504, 2017.","journal-title":"Journal of Micro\/Nanolithography, MEMS, and MOEMS (JM3)"},{"key":"e_1_3_2_1_20_1","doi-asserted-by":"publisher","DOI":"10.1145\/3061639.3062270"},{"key":"e_1_3_2_1_21_1","volume-title":"Evaluation of diagnostic systems: methods from signal detection theory. New York : Academic Press","author":"Swets J. A.","year":"1982","unstructured":"J. A. Swets and R. M. Pickett , Evaluation of diagnostic systems: methods from signal detection theory. New York : Academic Press , 1982 . J. A. Swets and R. M. Pickett, Evaluation of diagnostic systems: methods from signal detection theory. New York : Academic Press, 1982."},{"key":"e_1_3_2_1_22_1","volume-title":"Signal detection theory and psychophysics. New York : Wiley","author":"Green D. M.","year":"1966","unstructured":"D. M. Green and J. A. Swets , Signal detection theory and psychophysics. New York : Wiley , 1966 . D. M. Green and J. A. Swets, Signal detection theory and psychophysics. New York : Wiley, 1966."},{"key":"e_1_3_2_1_23_1","doi-asserted-by":"publisher","DOI":"10.1177\/0272989X8900900307"},{"key":"e_1_3_2_1_24_1","doi-asserted-by":"publisher","DOI":"10.1111\/1541-0420.00071"},{"key":"e_1_3_2_1_25_1","doi-asserted-by":"publisher","DOI":"10.3233\/IDA-2002-6504"},{"key":"e_1_3_2_1_26_1","first-page":"179","volume-title":"Addressing the curse of imbalanced training sets: Onesided selection,\" in International Conference on Machine Learning (ICML)","author":"Kubat M.","year":"1997","unstructured":"M. Kubat and S. Mattwin , \" Addressing the curse of imbalanced training sets: Onesided selection,\" in International Conference on Machine Learning (ICML) , 1997 , pp. 179 -- 186 . M. Kubat and S. Mattwin, \"Addressing the curse of imbalanced training sets: Onesided selection,\" in International Conference on Machine Learning (ICML), 1997, pp. 179--186."},{"key":"e_1_3_2_1_27_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.neunet.2018.07.011"},{"key":"e_1_3_2_1_28_1","doi-asserted-by":"publisher","DOI":"10.1613\/jair.953"},{"key":"e_1_3_2_1_29_1","doi-asserted-by":"publisher","DOI":"10.1007\/11538059_91"},{"key":"e_1_3_2_1_30_1","doi-asserted-by":"publisher","DOI":"10.1145\/1007730.1007737"},{"key":"e_1_3_2_1_31_1","volume-title":"Imbalance aware lithography hotspot detection: A deep learning approach,\" in SPIE Advanced Lithography","author":"Yang H.","year":"2017","unstructured":"H. Yang , L. Luo , J. Su , C. Lin , and B. Yu , \" Imbalance aware lithography hotspot detection: A deep learning approach,\" in SPIE Advanced Lithography , vol. 10148 , 2017 . H. Yang, L. Luo, J. Su, C. Lin, and B. Yu, \"Imbalance aware lithography hotspot detection: A deep learning approach,\" in SPIE Advanced Lithography, vol. 10148, 2017."},{"key":"e_1_3_2_1_32_1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2018.2864251"},{"key":"e_1_3_2_1_33_1","unstructured":"C. Elkan \"The foundations of cost-sensitive learning \" in International Joint Conference on Artificial Intelligence (IJCAI) 2001 pp. 973--978.   C. Elkan \"The foundations of cost-sensitive learning \" in International Joint Conference on Artificial Intelligence (IJCAI) 2001 pp. 973--978."},{"key":"e_1_3_2_1_34_1","doi-asserted-by":"publisher","DOI":"10.1145\/1007730.1007734"},{"key":"e_1_3_2_1_35_1","unstructured":"Y.-A. Chung H.-T. Lin and S.-W. Yang \"Cost-aware pre-training for multiclass cost-sensitive deep learning \" in International Joint Conference on Artificial Intelligence (IJCAI) 2016 pp. 1411--1417.   Y.-A. Chung H.-T. Lin and S.-W. Yang \"Cost-aware pre-training for multiclass cost-sensitive deep learning \" in International Joint Conference on Artificial Intelligence (IJCAI) 2016 pp. 1411--1417."},{"key":"e_1_3_2_1_36_1","doi-asserted-by":"publisher","DOI":"10.1109\/TNNLS.2017.2732482"},{"key":"e_1_3_2_1_37_1","first-page":"4368","volume-title":"Training deep neural networks on imbalanced data sets,\" in International Joint Conference on Neural Networks (IJCNN)","author":"Wang S.","year":"2016","unstructured":"S. Wang , W. Liu , J. Wu , L. Cao , Q. Meng , and P. J. Kennedy , \" Training deep neural networks on imbalanced data sets,\" in International Joint Conference on Neural Networks (IJCNN) , 2016 , pp. 4368 -- 4374 . S. Wang, W. Liu, J. Wu, L. Cao, Q. Meng, and P. J. Kennedy, \"Training deep neural networks on imbalanced data sets,\" in International Joint Conference on Neural Networks (IJCNN), 2016, pp. 4368--4374."},{"key":"e_1_3_2_1_38_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.media.2016.05.004"},{"key":"e_1_3_2_1_39_1","volume-title":"Pattern Recognition and Machine Learning","author":"Bishop C. M.","year":"2006","unstructured":"C. M. Bishop , Pattern Recognition and Machine Learning . Springer New York , 2006 , vol. 4 , no. 4. C. M. Bishop et al., Pattern Recognition and Machine Learning. Springer New York, 2006, vol. 4, no. 4."},{"key":"e_1_3_2_1_40_1","doi-asserted-by":"publisher","DOI":"10.1214\/aoms\/1177730491"},{"key":"e_1_3_2_1_41_1","doi-asserted-by":"publisher","DOI":"10.2307\/3001968"},{"key":"e_1_3_2_1_42_1","doi-asserted-by":"publisher","DOI":"10.1148\/radiology.143.1.7063747"},{"key":"e_1_3_2_1_43_1","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-540-74958-5_44"},{"key":"e_1_3_2_1_44_1","first-page":"II-906","volume-title":"International Conference on Machine Learning (ICML)","author":"Gao W.","year":"2013","unstructured":"W. Gao , R. Jin , S. Zhu , and Z.-H. Zhou , \"One-pass auc optimization,\" in International Conference on Machine Learning (ICML) , 2013 , pp. I II-906 --III-914. W. Gao, R. Jin, S. Zhu, and Z.-H. Zhou, \"One-pass auc optimization,\" in International Conference on Machine Learning (ICML), 2013, pp. III-906--III-914."},{"key":"e_1_3_2_1_45_1","first-page":"2568","article-title":"An adaptive gradient method for online auc maximization","author":"Ding Y.","year":"2015","unstructured":"Y. Ding , P. Zhao , S. C. H. Hoi , and Y.-S. Ong , \" An adaptive gradient method for online auc maximization ,\" in AAAI Conference on Artificial Intelligence , 2015 , pp. 2568 -- 2574 . Y. Ding, P. Zhao, S. C. H. Hoi, and Y.-S. Ong, \"An adaptive gradient method for online auc maximization,\" in AAAI Conference on Artificial Intelligence, 2015, pp. 2568--2574.","journal-title":"AAAI Conference on Artificial Intelligence"},{"key":"e_1_3_2_1_46_1","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-540-74958-5_33"},{"key":"e_1_3_2_1_47_1","first-page":"233","volume-title":"Online auc maximization,\" in International Conference on Machine Learning (ICML)","author":"Zhao P.","year":"2011","unstructured":"P. Zhao , S. C. H. Hoi , R. Jin , and T. Yang , \" Online auc maximization,\" in International Conference on Machine Learning (ICML) , 2011 , pp. 233 -- 240 . P. Zhao, S. C. H. Hoi, R. Jin, and T. Yang, \"Online auc maximization,\" in International Conference on Machine Learning (ICML), 2011, pp. 233--240."},{"key":"e_1_3_2_1_48_1","doi-asserted-by":"publisher","DOI":"10.5555\/1577069.1755860"},{"key":"e_1_3_2_1_49_1","first-page":"848","volume-title":"Optimizing classifier performance via an approximation to the wilcoxon-mann-whitney statistic,\" in International Conference on Machine Learning (ICML)","author":"Yan L.","year":"2003","unstructured":"L. Yan , R. H. Dodier , M. Mozer , and R. H. Wolniewicz , \" Optimizing classifier performance via an approximation to the wilcoxon-mann-whitney statistic,\" in International Conference on Machine Learning (ICML) , 2003 , pp. 848 -- 855 . L. Yan, R. H. Dodier, M. Mozer, and R. H. Wolniewicz, \"Optimizing classifier performance via an approximation to the wilcoxon-mann-whitney statistic,\" in International Conference on Machine Learning (ICML), 2003, pp. 848--855."},{"key":"e_1_3_2_1_50_1","doi-asserted-by":"publisher","DOI":"10.1111\/j.2517-6161.1952.tb00104.x"},{"key":"e_1_3_2_1_51_1","first-page":"265","volume-title":"Isard et al., \"Tensorflow: a system for large-scale machine learning\" in USENIX Symposium on Operating Systems Design and Implementation (OSDI)","author":"Abadi M.","year":"2016","unstructured":"M. Abadi , P. Barham , J. Chen , Z. Chen , A. Davis , J. Dean , M. Devin , S. Ghemawat , G. Irving , M. Isard et al., \"Tensorflow: a system for large-scale machine learning\" in USENIX Symposium on Operating Systems Design and Implementation (OSDI) , vol. 16 , 2016 , pp. 265 -- 283 . M. Abadi, P. Barham, J. Chen, Z. Chen, A. Davis, J. Dean, M. Devin, S. Ghemawat, G. Irving, M. Isard et al., \"Tensorflow: a system for large-scale machine learning\" in USENIX Symposium on Operating Systems Design and Implementation (OSDI), vol. 16, 2016, pp. 265--283."},{"key":"e_1_3_2_1_52_1","doi-asserted-by":"publisher","DOI":"10.1145\/2429384.2429457"}],"event":{"name":"ASPDAC '19: 24th Asia and South Pacific Design Automation Conference","location":"Tokyo Japan","acronym":"ASPDAC '19","sponsor":["SIGDA ACM Special Interest Group on Design Automation","IEICE ESS Institute of Electronics, Information and Communication Engineers, Engineering Sciences Society","IEEE CAS","IEEE CEDA","IPSJ SIG-SLDM Information Processing Society of Japan, SIG System LSI Design Methodology"]},"container-title":["Proceedings of the 24th Asia and South Pacific Design Automation Conference"],"original-title":[],"link":[{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3287624.3288746","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/dl.acm.org\/doi\/pdf\/10.1145\/3287624.3288746","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,6,18]],"date-time":"2025-06-18T00:57:54Z","timestamp":1750208274000},"score":1,"resource":{"primary":{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3287624.3288746"}},"subtitle":["lithography hotspot detection with explicit ROC optimization"],"short-title":[],"issued":{"date-parts":[[2019,1,21]]},"references-count":52,"alternative-id":["10.1145\/3287624.3288746","10.1145\/3287624"],"URL":"https:\/\/doi.org\/10.1145\/3287624.3288746","relation":{},"subject":[],"published":{"date-parts":[[2019,1,21]]},"assertion":[{"value":"2019-01-21","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}