{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,18]],"date-time":"2025-06-18T04:29:08Z","timestamp":1750220948538,"version":"3.41.0"},"publisher-location":"New York, NY, USA","reference-count":21,"publisher":"ACM","license":[{"start":{"date-parts":[[2019,6,2]],"date-time":"2019-06-02T00:00:00Z","timestamp":1559433600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.acm.org\/publications\/policies\/copyright_policy#Background"}],"content-domain":{"domain":["dl.acm.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2019,6,2]]},"DOI":"10.1145\/3316781.3317871","type":"proceedings-article","created":{"date-parts":[[2019,5,23]],"date-time":"2019-05-23T18:07:13Z","timestamp":1558634833000},"page":"1-6","update-policy":"https:\/\/doi.org\/10.1145\/crossmark-policy","source":"Crossref","is-referenced-by-count":4,"title":["Novel Guiding Template and Mask Assignment for DSA-MP Hybrid Lithography Using Multiple BCP Materials"],"prefix":"10.1145","author":[{"given":"Yi-Ting","family":"Lin","sequence":"first","affiliation":[{"name":"Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Iris Hui-Ru","family":"Jiang","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"320","published-online":{"date-parts":[[2019,6,2]]},"reference":[{"key":"e_1_3_2_1_1_1","doi-asserted-by":"publisher","DOI":"10.5555\/3299534"},{"issue":"4","key":"e_1_3_2_1_2_1","doi-asserted-by":"crossref","first-page":"235","DOI":"10.1515\/aot-2015-0036","article-title":"ITRS lithography roadmap: 2015 challenges","volume":"4","author":"Neisser M.","year":"2015","journal-title":"Adv. Opt. Techn."},{"key":"e_1_3_2_1_3_1","first-page":"186","volume-title":"ICCAD","author":"Du Y.","year":"2013"},{"volume-title":"Challenges and opportunities in applying graphoepitaxy DSA lithography to metal cut and contact\/via applications,\" Proc. EMLC","year":"2014","author":"Ma Y.","key":"e_1_3_2_1_4_1"},{"key":"e_1_3_2_1_5_1","first-page":"904920","volume-title":"SPIE","volume":"9049","author":"Xiao Z.","year":"2014"},{"key":"e_1_3_2_1_6_1","first-page":"942305","volume-title":"SPIE","volume":"9423","author":"Gronheid R.","year":"2015"},{"volume-title":"Design strategy for integrating DSA via patterning in sub-7nm interconnects,\" Proc","year":"2016","author":"Karageorgos I.","key":"e_1_3_2_1_7_1"},{"volume-title":"Incorporating DSA in multi-patterning semiconductor manufacturing technologies,\" Proc","year":"2015","author":"Badr Y.","key":"e_1_3_2_1_8_1"},{"key":"e_1_3_2_1_9_1","doi-asserted-by":"publisher","DOI":"10.1145\/2744769.2744868"},{"key":"e_1_3_2_1_10_1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2016.2614262"},{"key":"e_1_3_2_1_11_1","first-page":"95","article-title":"Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout","author":"Xiao Z","year":"2016","journal-title":"Proc. ASP-DAC"},{"key":"e_1_3_2_1_12_1","first-page":"75","article-title":"Simultaneous template optimization and mask assignment for DSA with multiple patterning","author":"Kuang J.","year":"2016","journal-title":"Proc. ASP-DAC"},{"issue":"6","key":"e_1_3_2_1_13_1","first-page":"1251","article-title":"STOMA: Simultaneous template optimization and mask assignment for directed self-assembly lithography with multiple patterning","volume":"37","author":"Kuang J.","year":"2018","journal-title":"IEEE TCAD"},{"key":"e_1_3_2_1_14_1","doi-asserted-by":"publisher","DOI":"10.1145\/3131847"},{"key":"e_1_3_2_1_15_1","first-page":"403","volume-title":"ICCD","author":"Ou J.","year":"2017"},{"key":"e_1_3_2_1_16_1","first-page":"239","volume-title":"ICCAD","author":"Wu K.-H.","year":"2017"},{"key":"e_1_3_2_1_17_1","unstructured":"D.E. Knuth \"Dancing links \" 2000. Available at: arXiv:cs\/0011047. D.E. Knuth \"Dancing links \" 2000. Available at: arXiv:cs\/0011047."},{"key":"e_1_3_2_1_18_1","doi-asserted-by":"publisher","DOI":"10.1145\/2897937.2898048"},{"issue":"12","key":"e_1_3_2_1_19_1","first-page":"2080","article-title":"Multiple patterning layout decomposition considering complex coloring rules and density balancing","volume":"36","author":"Jiang I. H.-R.","year":"2017","journal-title":"IEEE TCAD"},{"key":"e_1_3_2_1_20_1","unstructured":"Gurobi Optimization Inc. Gurobi Optimizer 7.5.1 2014. {Online} Available: http:\/\/www.gurobi.com Gurobi Optimization Inc. Gurobi Optimizer 7.5.1 2014. {Online} Available: http:\/\/www.gurobi.com"},{"key":"e_1_3_2_1_21_1","doi-asserted-by":"publisher","DOI":"10.1145\/2717764.2723572"}],"event":{"name":"DAC '19: The 56th Annual Design Automation Conference 2019","sponsor":["SIGDA ACM Special Interest Group on Design Automation","IEEE-CEDA","SIGBED ACM Special Interest Group on Embedded Systems"],"location":"Las Vegas NV USA","acronym":"DAC '19"},"container-title":["Proceedings of the 56th Annual Design Automation Conference 2019"],"original-title":[],"link":[{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3316781.3317871","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/dl.acm.org\/doi\/pdf\/10.1145\/3316781.3317871","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,6,17]],"date-time":"2025-06-17T23:53:53Z","timestamp":1750204433000},"score":1,"resource":{"primary":{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3316781.3317871"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,6,2]]},"references-count":21,"alternative-id":["10.1145\/3316781.3317871","10.1145\/3316781"],"URL":"https:\/\/doi.org\/10.1145\/3316781.3317871","relation":{},"subject":[],"published":{"date-parts":[[2019,6,2]]},"assertion":[{"value":"2019-06-02","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}