{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,18]],"date-time":"2025-06-18T04:19:52Z","timestamp":1750220392166,"version":"3.41.0"},"publisher-location":"New York, NY, USA","reference-count":7,"publisher":"ACM","license":[{"start":{"date-parts":[[2021,7,23]],"date-time":"2021-07-23T00:00:00Z","timestamp":1626998400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.acm.org\/publications\/policies\/copyright_policy#Background"}],"content-domain":{"domain":["dl.acm.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2021,7,23]]},"DOI":"10.1145\/3478905.3478957","type":"proceedings-article","created":{"date-parts":[[2021,9,28]],"date-time":"2021-09-28T15:56:17Z","timestamp":1632844577000},"page":"260-267","update-policy":"https:\/\/doi.org\/10.1145\/crossmark-policy","source":"Crossref","is-referenced-by-count":0,"title":["Study on Temperature Control Model and Algorithm for the Discharge Cavity of Excimer Laser"],"prefix":"10.1145","author":[{"given":"Yan","family":"He","sequence":"first","affiliation":[{"name":"Shanghai Normal University Tianhua College AI School, China"}]},{"given":"Longwei","family":"Sun","sequence":"additional","affiliation":[{"name":"OPPO Guangdong Mobile Communications Co., Ltd., China"}]},{"given":"Xiaoping","family":"Li","sequence":"additional","affiliation":[{"name":"Huazhong University of Science and Technology, China"}]},{"given":"Hongfei","family":"Nie","sequence":"additional","affiliation":[{"name":"Shanghai Microelectronics Equipment Group Co., Ltd., China"}]}],"member":"320","published-online":{"date-parts":[[2021,9,28]]},"reference":[{"volume-title":"Research on Key Technologies of High Repeatability ArF Excimer Laser [D]","author":"Nengwei Zhu","unstructured":"Zhu Nengwei . 2017. Research on Key Technologies of High Repeatability ArF Excimer Laser [D] . University of Science and Technology of China . Zhu Nengwei. 2017. Research on Key Technologies of High Repeatability ArF Excimer Laser [D]. University of Science and Technology of China.","key":"e_1_3_2_1_1_1"},{"volume-title":"Excimer Laser Technology [M]","author":"Basting D","unstructured":"D Basting , G Marowsky . 2005. Excimer Laser Technology [M] . Berlin : Springer ,90-97. D Basting, G Marowsky. 2005. Excimer Laser Technology [M]. Berlin: Springer,90-97.","key":"e_1_3_2_1_2_1"},{"issue":"04","key":"e_1_3_2_1_3_1","first-page":"431","article-title":"Design of temperature control system for excimer lasers such as [J]","volume":"32","author":"Mingqing Hu","year":"2015","unstructured":"Hu Mingqing , Han Xiaoquan , Zhou Yi . 2015 . Design of temperature control system for excimer lasers such as [J] . Journal of Quantum Electronics , 32 ( 04 ): 431 - 437 . Hu Mingqing, Han Xiaoquan, Zhou Yi. 2015. Design of temperature control system for excimer lasers such as [J]. Journal of Quantum Electronics, 32(04):431-437.","journal-title":"Journal of Quantum Electronics"},{"key":"e_1_3_2_1_4_1","volume-title":"May 08, 2013.","author":"Lijia Zhang","year":"2013","unstructured":"Zhang Lijia , Wu Xiaobin , Zhao Jiangshan . 2013 . A method and system for temperature control of excimer lasers [P] . May 08, 2013. Zhang Lijia, Wu Xiaobin, Zhao Jiangshan. 2013. A method and system for temperature control of excimer lasers [P]. May 08, 2013."},{"unstructured":"Zhang Pengliang Zhang Lichen. 2016. Design of Temperature Control System for Semiconductor Laser Based on PID Algorithm [J]. Electronic science and technology 03(05):543-545.  Zhang Pengliang Zhang Lichen. 2016. Design of Temperature Control System for Semiconductor Laser Based on PID Algorithm [J]. Electronic science and technology 03(05):543-545.","key":"e_1_3_2_1_5_1"},{"doi-asserted-by":"publisher","key":"e_1_3_2_1_6_1","DOI":"10.1166\/asl.2016.7003"},{"doi-asserted-by":"crossref","unstructured":"A Mittal P Jain T K Saxena 2013. Genetic algorithm-based Neuro Fuzzy tuning of PID controller for a nonlinear temperature water bath with feedforward control[M]. 34-38.  A Mittal P Jain T K Saxena 2013. Genetic algorithm-based Neuro Fuzzy tuning of PID controller for a nonlinear temperature water bath with feedforward control[M]. 34-38.","key":"e_1_3_2_1_7_1","DOI":"10.1109\/ICAES.2013.6659356"}],"event":{"acronym":"DSIT 2021","name":"DSIT 2021: 2021 4th International Conference on Data Science and Information Technology","location":"Shanghai China"},"container-title":["2021 4th International Conference on Data Science and Information Technology"],"original-title":[],"link":[{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3478905.3478957","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/dl.acm.org\/doi\/pdf\/10.1145\/3478905.3478957","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,6,17]],"date-time":"2025-06-17T20:18:37Z","timestamp":1750191517000},"score":1,"resource":{"primary":{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3478905.3478957"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,7,23]]},"references-count":7,"alternative-id":["10.1145\/3478905.3478957","10.1145\/3478905"],"URL":"https:\/\/doi.org\/10.1145\/3478905.3478957","relation":{},"subject":[],"published":{"date-parts":[[2021,7,23]]},"assertion":[{"value":"2021-09-28","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}