{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,13]],"date-time":"2026-03-13T08:39:04Z","timestamp":1773391144156,"version":"3.50.1"},"publisher-location":"New York, NY, USA","reference-count":30,"publisher":"ACM","license":[{"start":{"date-parts":[[2022,10,30]],"date-time":"2022-10-30T00:00:00Z","timestamp":1667088000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.acm.org\/publications\/policies\/copyright_policy#Background"}],"content-domain":{"domain":["dl.acm.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2022,10,30]]},"DOI":"10.1145\/3508352.3549350","type":"proceedings-article","created":{"date-parts":[[2022,12,22]],"date-time":"2022-12-22T12:10:54Z","timestamp":1671711054000},"page":"1-9","update-policy":"https:\/\/doi.org\/10.1145\/crossmark-policy","source":"Crossref","is-referenced-by-count":13,"title":["LayouTransformer"],"prefix":"10.1145","author":[{"given":"Liangjian","family":"Wen","sequence":"first","affiliation":[{"name":"Huawei Noah's Ark Lab"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yi","family":"Zhu","sequence":"additional","affiliation":[{"name":"Huawei Noah's Ark Lab"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lei","family":"Ye","sequence":"additional","affiliation":[{"name":"Huawei Noah's Ark Lab"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guojin","family":"Chen","sequence":"additional","affiliation":[{"name":"CUHK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bei","family":"Yu","sequence":"additional","affiliation":[{"name":"CUHK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jianzhuang","family":"Liu","sequence":"additional","affiliation":[{"name":"Huawei Noah's Ark Lab"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chunjing","family":"Xu","sequence":"additional","affiliation":[{"name":"Huawei Noah's Ark Lab"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"320","published-online":{"date-parts":[[2022,12,22]]},"reference":[{"key":"e_1_3_2_1_1_1","volume-title":"Mosaic: Mask optimizing solution with process window aware inverse correction,\" in 51st ACM\/EDAC\/IEEE Design Automation Conference (DAC)","author":"Gao J.-R.","year":"2014","unstructured":"J.-R. Gao, X. Xu, B. Yu, and D. Z. Pan, \"Mosaic: Mask optimizing solution with process window aware inverse correction,\" in 51st ACM\/EDAC\/IEEE Design Automation Conference (DAC), 2014."},{"key":"e_1_3_2_1_2_1","first-page":"223","article-title":"Enhanced opc recipe coverage and early hotspot detection through automated layout generation and analysis","volume":"10147","author":"Hamouda A.","year":"2017","unstructured":"A. Hamouda, M. Bahnas, D. Schumacher, I. Graur, A. Chen, K. Madkour, H. Ali, J. Meiring, N. Lafferty, and C. McGinty, \"Enhanced opc recipe coverage and early hotspot detection through automated layout generation and analysis,\" in Optical Microlithography, vol. 10147, 2017, pp. 223--231.","journal-title":"Optical Microlithography"},{"key":"e_1_3_2_1_3_1","doi-asserted-by":"crossref","unstructured":"B. Jiang H. Zhang J. Yang and E. F. Y. Young \"A fast machine learning-based mask printability predictor for opc acceleration \" in the 24th Asia and South Pacific Design Automation Conference 2019 pp. 412--419.","DOI":"10.1145\/3287624.3287682"},{"key":"e_1_3_2_1_4_1","first-page":"1591","volume-title":"Automation Test in Europe Conference Exhibition (DATE)","author":"Kuang J.","year":"2015","unstructured":"J. Kuang, W.-K. Chow, and E. F. Y. Young, \"A robust approach for process variation aware mask optimization,\" in Design, Automation Test in Europe Conference Exhibition (DATE), 2015, pp. 1591--1594."},{"key":"e_1_3_2_1_5_1","volume-title":"Faster region-based hotspot detection,\" in 56th ACM\/IEEE Design Automation Conference (DAC)","author":"Chen R.","year":"2019","unstructured":"R. Chen, W. Zhong, H. Yang, H. Geng, X. Zeng, and B. Yu, \"Faster region-based hotspot detection,\" in 56th ACM\/IEEE Design Automation Conference (DAC), 2019."},{"key":"e_1_3_2_1_6_1","first-page":"233","volume-title":"From shallow to deep learning,\" in 30th IEEE International System-on-Chip Conference (SOCC)","author":"Yang H.","year":"2017","unstructured":"H. Yang, Y. Lin, B. Yu, and E. F. Y. Young, \"Lithography hotspot detection: From shallow to deep learning,\" in 30th IEEE International System-on-Chip Conference (SOCC), 2017, pp. 233--238."},{"key":"e_1_3_2_1_7_1","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2018.2837078"},{"key":"e_1_3_2_1_8_1","volume-title":"Enabling online learning in lithography hotspot detection with information-theoretic feature optimization,\" in IEEE\/ACM International Conference on Computer-Aided Design (ICCAD)","author":"Zhang H.","year":"2016","unstructured":"H. Zhang, B. Yu, and E. F. Young, \"Enabling online learning in lithography hotspot detection with information-theoretic feature optimization,\" in IEEE\/ACM International Conference on Computer-Aided Design (ICCAD), 2016."},{"key":"e_1_3_2_1_9_1","first-page":"75","volume-title":"Simultaneous template optimization and mask assignment for dsa with multiple patterning,\" in 21st Asia and South Pacific Design Automation Conference (ASP-DAC)","author":"Kuang J.","year":"2016","unstructured":"J. Kuang, J. Ye, and E. F. Young, \"Simultaneous template optimization and mask assignment for dsa with multiple patterning,\" in 21st Asia and South Pacific Design Automation Conference (ASP-DAC), 2016, pp. 75--82."},{"key":"e_1_3_2_1_10_1","doi-asserted-by":"crossref","unstructured":"J. Kuang and E. F. Y. Young \"An efficient layout decomposition approach for triple patterning lithography \" in 50th ACM\/EDAC\/IEEE Design Automation Conference (DAC) 2013.","DOI":"10.1145\/2463209.2488818"},{"key":"e_1_3_2_1_11_1","doi-asserted-by":"publisher","DOI":"10.1145\/3316781.3317852"},{"key":"e_1_3_2_1_12_1","volume-title":"Machine learning-based hotspot detection: Fallacies, pitfalls and marching orders,\" in IEEE\/ACM International Conference on Computer-Aided Design (ICCAD)","author":"Reddy G. R.","year":"2019","unstructured":"G. R. Reddy, K. Madkour, and Y. Makris, \"Machine learning-based hotspot detection: Fallacies, pitfalls and marching orders,\" in IEEE\/ACM International Conference on Computer-Aided Design (ICCAD), 2019."},{"key":"e_1_3_2_1_13_1","volume-title":"Enhanced hotspot detection through synthetic pattern generation and design of experiments,\" in IEEE 36th VLSI Test Symposium (VTS)","author":"Reddy G. R.","year":"2018","unstructured":"G. R. Reddy, C. Xanthopoulos, and Y. Makris, \"Enhanced hotspot detection through synthetic pattern generation and design of experiments,\" in IEEE 36th VLSI Test Symposium (VTS), 2018."},{"key":"e_1_3_2_1_14_1","doi-asserted-by":"publisher","DOI":"10.1145\/3287624.3288746"},{"key":"e_1_3_2_1_15_1","volume-title":"Conditional generative adversarial nets,\" arXiv preprint arXiv:1411.1784","author":"Mirza M.","year":"2014","unstructured":"M. Mirza and S. Osindero, \"Conditional generative adversarial nets,\" arXiv preprint arXiv:1411.1784, 2014."},{"key":"e_1_3_2_1_16_1","volume-title":"Generative adversarial nets,\" in Advances in Neural Information Processing Systems","author":"Goodfellow I.","year":"2014","unstructured":"I. Goodfellow, J. Pouget-Abadie, M. Mirza, B. Xu, D. Warde-Farley, S. Ozair, A. Courville, and Y. Bengio, \"Generative adversarial nets,\" in Advances in Neural Information Processing Systems, vol. 27, 2014."},{"key":"e_1_3_2_1_17_1","doi-asserted-by":"publisher","DOI":"10.1145\/3316781.3317795"},{"key":"e_1_3_2_1_18_1","first-page":"832","article-title":"Topology design using squish patterns","volume":"8","author":"Gennari F. E.","year":"2014","unstructured":"F. E. Gennari and Y.-C. La, \"Topology design using squish patterns,\" US Patent 8,832,621., 2014.","journal-title":"US Patent"},{"key":"e_1_3_2_1_19_1","volume-title":"Language models are few-shot learners,\" in Advances in Neural Information Processing Systems","author":"Brown T. B.","year":"2020","unstructured":"T. B. Brown, B. Mann, N. Ryder, M. Subbiah, J. Kaplan, P. Dhariwal, A. Neelakantan, P. Shyam, G. Sastry, A. Askell, S. Agarwal, A. Herbert-Voss, G. Krueger, T. Henighan, R. Child, A. Ramesh, D. M. Ziegler, J. Wu, C. Winter, C. Hesse, M. Chen, E. Sigler, M. Litwin, S. Gray, B. Chess, J. Clark, C. Berner, S. McCandlish, A. Radford, I. Sutskever, and D. Amodei, \"Language models are few-shot learners,\" in Advances in Neural Information Processing Systems, 2020."},{"key":"e_1_3_2_1_20_1","first-page":"4171","volume-title":"BERT: pre-training of deep bidirectional transformers for language understanding,\" in the North American","author":"Devlin J.","year":"2019","unstructured":"J. Devlin, M. Chang, K. Lee, and K. Toutanova, \"BERT: pre-training of deep bidirectional transformers for language understanding,\" in the North American Chapter of the Association for Computational Linguistics: Human Language Technologies, J. Burstein, C. Doran, and T. Solorio, Eds., 2019, pp. 4171--4186."},{"key":"e_1_3_2_1_21_1","first-page":"5754","article-title":"Xlnet: Generalized autoregressive pretraining for language understanding","volume":"32","author":"Yang Z.","year":"2019","unstructured":"Z. Yang, Z. Dai, Y. Yang, J. G. Carbonell, R. Salakhutdinov, and Q. V. Le, \"Xlnet: Generalized autoregressive pretraining for language understanding,\" in Advances in Neural Information Processing Systems 32, 2019, pp. 5754--5764.","journal-title":"Advances in Neural Information Processing Systems"},{"key":"e_1_3_2_1_22_1","first-page":"2978","volume-title":"Transformer-xl: Attentive language models beyond a fixed-length context,\" in the 57th Conference of the Association for Computational Linguistics","author":"Dai Z.","year":"2019","unstructured":"Z. Dai, Z. Yang, Y. Yang, J. G. Carbonell, Q. V. Le, and R. Salakhutdinov, \"Transformer-xl: Attentive language models beyond a fixed-length context,\" in the 57th Conference of the Association for Computational Linguistics, 2019, pp. 2978--2988."},{"key":"e_1_3_2_1_23_1","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2020.2982989"},{"key":"e_1_3_2_1_24_1","volume-title":"Layout pattern generation and legalization with generative learning models,\" in IEEE\/ACM International Conference On Computer Aided Design (ICCAD)","author":"Zhang X.","year":"2020","unstructured":"X. Zhang, J. Shiely, and E. F. Young, \"Layout pattern generation and legalization with generative learning models,\" in IEEE\/ACM International Conference On Computer Aided Design (ICCAD), 2020."},{"key":"e_1_3_2_1_25_1","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2021.3052302"},{"key":"e_1_3_2_1_26_1","volume-title":"Adversarial autoencoders,\" arXiv preprint arXiv:1511.05644","author":"Makhzani A.","year":"2015","unstructured":"A. Makhzani, J. Shlens, N. Jaitly, I. Goodfellow, and B. Frey, \"Adversarial autoencoders,\" arXiv preprint arXiv:1511.05644, 2015."},{"key":"e_1_3_2_1_27_1","doi-asserted-by":"publisher","DOI":"10.1002\/j.1538-7305.1948.tb01338.x"},{"key":"e_1_3_2_1_28_1","first-page":"5998","article-title":"Attention is all you need","author":"Vaswani A.","year":"2017","unstructured":"A. Vaswani, N. Shazeer, N. Parmar, J. Uszkoreit, L. Jones, A. N. Gomez, L. Kaiser, and I. Polosukhin, \"Attention is all you need,\" in Advances in Neural Information Processing Systems, 2017, pp. 5998--6008.","journal-title":"Advances in Neural Information Processing Systems"},{"key":"e_1_3_2_1_29_1","volume-title":"The curious case of neural text degeneration,\" in 8th International Conference on Learning Representations","author":"Holtzman A.","year":"2020","unstructured":"A. Holtzman, J. Buys, L. Du, M. Forbes, and Y. Choi, \"The curious case of neural text degeneration,\" in 8th International Conference on Learning Representations, 2020."},{"key":"e_1_3_2_1_30_1","volume-title":"Antiga et al., \"Pytorch: An imperative style, high-performance deep learning library,\" in Advances in Neural Information Processing Systems","author":"Paszke A.","year":"2019","unstructured":"A. Paszke, S. Gross, F. Massa, A. Lerer, J. Bradbury, G. Chanan, T. Killeen, Z. Lin, N. Gimelshein, L. Antiga et al., \"Pytorch: An imperative style, high-performance deep learning library,\" in Advances in Neural Information Processing Systems, vol. 32, 2019."}],"event":{"name":"ICCAD '22: IEEE\/ACM International Conference on Computer-Aided Design","location":"San Diego California","acronym":"ICCAD '22","sponsor":["SIGDA ACM Special Interest Group on Design Automation","IEEE-EDS Electronic Devices Society","IEEE CAS","IEEE CEDA"]},"container-title":["Proceedings of the 41st IEEE\/ACM International Conference on Computer-Aided Design"],"original-title":[],"link":[{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3508352.3549350","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/dl.acm.org\/doi\/pdf\/10.1145\/3508352.3549350","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,6,17]],"date-time":"2025-06-17T19:30:23Z","timestamp":1750188623000},"score":1,"resource":{"primary":{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3508352.3549350"}},"subtitle":["Generating Layout Patterns with Transformer via Sequential Pattern Modeling"],"short-title":[],"issued":{"date-parts":[[2022,10,30]]},"references-count":30,"alternative-id":["10.1145\/3508352.3549350","10.1145\/3508352"],"URL":"https:\/\/doi.org\/10.1145\/3508352.3549350","relation":{},"subject":[],"published":{"date-parts":[[2022,10,30]]},"assertion":[{"value":"2022-12-22","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}