{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,23]],"date-time":"2026-07-23T17:14:44Z","timestamp":1784826884623,"version":"3.55.0"},"publisher-location":"New York, NY, USA","reference-count":13,"publisher":"ACM","license":[{"start":{"date-parts":[[2026,5,21]],"date-time":"2026-05-21T00:00:00Z","timestamp":1779321600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by-nc-nd\/4.0\/legalcode"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["625B2043"],"award-info":[{"award-number":["625B2043"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Future Industry Challenge-Based Innovation Mission","award":["01-05-01-071"],"award-info":[{"award-number":["01-05-01-071"]}]}],"content-domain":{"domain":["dl.acm.org"],"crossmark-restriction":true},"short-container-title":[],"published-print":{"date-parts":[[2026,5,21]]},"DOI":"10.1145\/3820709.3820711","type":"proceedings-article","created":{"date-parts":[[2026,7,23]],"date-time":"2026-07-23T16:58:41Z","timestamp":1784825921000},"page":"1-6","update-policy":"https:\/\/doi.org\/10.1145\/crossmark-policy","source":"Crossref","is-referenced-by-count":0,"title":["A 6-DOF Force\/Torque Sensor with an Improved Cross-Beam Elastomer Using Thin-Film Sputtering Technology"],"prefix":"10.1145","author":[{"ORCID":"https:\/\/orcid.org\/0009-0003-8914-697X","authenticated-orcid":false,"given":"Jingjing","family":"Xu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Bioelectronics and the Jiangsu Key Laboratory of Robot Perception and Control, School of Instrument Science & Engineering, Southeast University, Nanjing, Jiangsu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1982-6780","authenticated-orcid":false,"given":"Aiguo","family":"Song","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Bioelectronics and the Jiangsu Key Laboratory of Robot Perception and Control, School of Instrument Science & Engineering, Southeast University, Nanjing, Jiangsu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0003-0090-7569","authenticated-orcid":false,"given":"Ziyi","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Bioelectronics and the Jiangsu Key Laboratory of Robot Perception and Control, School of Instrument Science & Engineering, Southeast University, Nanjing, Jiangsu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0005-8586-053X","authenticated-orcid":false,"given":"Xingxing","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Bioelectronics and the Jiangsu Key Laboratory of Robot Perception and Control, School of Instrument Science & Engineering, Southeast University, Nanjing, Jiangsu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0006-7160-6204","authenticated-orcid":false,"given":"Ziheng","family":"Qiu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Bioelectronics and the Jiangsu Key Laboratory of Robot Perception and Control, School of Instrument Science & Engineering, Southeast University, Nanjing, Jiangsu, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"320","published-online":{"date-parts":[[2026,7,23]]},"reference":[{"key":"e_1_3_3_1_2_2","doi-asserted-by":"crossref","unstructured":"Qian Mao Zijian Liao Shiqiang Liu Jinfeng Yuan and Rong Zhu. An ultralight tiny flexible six-axis force\/torque sensor enables dexterous fingertip manipulations. Nature Communications 16(1):5693 2025.","DOI":"10.1038\/s41467-025-60861-8"},{"key":"e_1_3_3_1_3_2","doi-asserted-by":"crossref","unstructured":"Uikyum Kim Dong-Hyuk Lee Yong\u00a0Bum Kim Dong-Yeop Seok and Hyouk\u00a0Ryeol Choi. A novel six-axis force\/torque sensor for robotic applications. IEEE\/ASME Transactions on Mechatronics 22(3):1381\u20131391 2017.","DOI":"10.1109\/TMECH.2016.2640194"},{"key":"e_1_3_3_1_4_2","unstructured":"Enfeng Zhang Yonghong Li and Fengying Yue. Design and performance analysis of sputtering thin-film tension sensor. Science Technology and Engineering 17(4):230\u2013233 249 2017."},{"key":"e_1_3_3_1_5_2","unstructured":"Yanwen Han Wen-ge Wu Yuntao Zhang Yunping Cheng and Lijuan Liu. Research on cantilever beam triaxial force measurement technology embedded in thin film sensor. Chinese Journal of Applied Mechanics 37(1):411\u2013417 497 2020."},{"key":"e_1_3_3_1_6_2","doi-asserted-by":"crossref","unstructured":"M.M. Nayak K.\u00a0Rajanna N.\u00a0Gunasekaran A.E. Muthunayagam S.\u00a0Mohan and K.\u00a0Mohan\u00a0Ram. Sputtered thin-film strain gauges for differential pressure measurement. IEEE Transactions on Instrumentation and Measurement 45(1):335\u2013339 1996.","DOI":"10.1109\/19.481365"},{"key":"e_1_3_3_1_7_2","doi-asserted-by":"crossref","unstructured":"Rico Ottermann Dennis Kowalke Berend Denkena Michael Korbacher Matthias M\u00fcller and Marc Christopher\u00a0Wurz. Directly deposited thin-film strain gauges for force measurement at guide carriages. IEEE Sensors Journal 24(24):40471\u201340484 2024.","DOI":"10.1109\/JSEN.2024.3478821"},{"key":"e_1_3_3_1_8_2","doi-asserted-by":"crossref","unstructured":"Xugang Zhang and Xiaochun Li. Design and characterization of thin-film system for microsensors embedding in ti6al4v alloys. IEEE Sensors Journal 10(4):839\u2013846 2010.","DOI":"10.1109\/JSEN.2009.2035369"},{"key":"e_1_3_3_1_9_2","doi-asserted-by":"crossref","unstructured":"Jingjing Xu Aiguo Song Yuhan Chen and Wenxuan Qu. Research on a sixaxis force\/torque sensor based on thin film sputtering technology and its decoupling for space robot. Measurement 256:117978 2025.","DOI":"10.1016\/j.measurement.2025.117978"},{"key":"e_1_3_3_1_10_2","unstructured":"Qi\u00a0Li Wen-ge Wu Yunping Cheng and Xuerui Li. Design and research of a embedded thin film sensor to measure cutting forces. Modular Machine Tool and Automatic Manufacturing Technique (1):80\u201382 2014."},{"key":"e_1_3_3_1_11_2","unstructured":"Xuerui Li. Research on key technology of thin film sensor for tool embedded cutting force measurement. Master\u2019s thesis North University of China 2014."},{"key":"e_1_3_3_1_12_2","doi-asserted-by":"crossref","unstructured":"Jiali Wang Hong Liu Li\u00a0Jiang and Xiaohui Gao. Miniature six-axis force\/torque sensor based on thin film. Instrument Technique and Sensor (6):12\u201315 2008.","DOI":"10.3901\/JME.2008.12.118"},{"key":"e_1_3_3_1_13_2","unstructured":"Jiali Wang. Study on miniature six-axis force\/torque sensor and its auto-calibration. Master\u2019s thesis Harbin Institute of Technology 2007."},{"key":"e_1_3_3_1_14_2","unstructured":"Jizhuang Fan Jie Zhao Baifeng Gu and Hegao Cai. Elastic body analysis of foot force sensor on a three-limb robot. Chinese Journal of Sensors and Actuators (3):519\u2013522 2007."}],"event":{"name":"RobCE 2026: 2026 6th International Conference on Robotics and Control Engineering","location":"Hong Kong Hong Kong","acronym":"RobCE 2026"},"container-title":["Proceedings of the 6th International Conference on Robotics and Control Engineering"],"original-title":[],"link":[{"URL":"https:\/\/dl.acm.org\/doi\/pdf\/10.1145\/3820709.3820711","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,23]],"date-time":"2026-07-23T16:59:23Z","timestamp":1784825963000},"score":1,"resource":{"primary":{"URL":"https:\/\/dl.acm.org\/doi\/10.1145\/3820709.3820711"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,5,21]]},"references-count":13,"alternative-id":["10.1145\/3820709.3820711","10.1145\/3820709"],"URL":"https:\/\/doi.org\/10.1145\/3820709.3820711","relation":{},"subject":[],"published":{"date-parts":[[2026,5,21]]},"assertion":[{"value":"2026-07-23","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}