{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,18]],"date-time":"2026-06-18T16:01:46Z","timestamp":1781798506344,"version":"3.54.5"},"reference-count":0,"publisher":"IBM","issue":"6","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IBM J. Res. & Dev."],"published-print":{"date-parts":[[2008,11]]},"DOI":"10.1147\/jrd.2008.5388564","type":"journal-article","created":{"date-parts":[[2010,4,5]],"date-time":"2010-04-05T14:34:14Z","timestamp":1270478054000},"page":"553-569","source":"Crossref","is-referenced-by-count":454,"title":["Three-dimensional silicon integration"],"prefix":"10.1147","volume":"52","author":[{"given":"J. U.","family":"Knickerbocker","sequence":"first","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"P. S.","family":"Andry","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"B.","family":"Dang","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"R. R.","family":"Horton","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"M. J.","family":"Interrante","sequence":"additional","affiliation":[{"name":"IBM Systems and Technology Group, Microelectronics Division, 2070 Route 52, Hopewell Junction, New York 12533, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"C. S.","family":"Patel","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"R. J.","family":"Polastre","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"K.","family":"Sakuma","sequence":"additional","affiliation":[{"name":"IBM Research Division, IBM Tokyo Research Laboratory, 1623-14 Shimo-tsuruma, Yamato-shi, Kanagawa-ken 242-8502, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"R.","family":"Sirdeshmukh","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"E. J.","family":"Sprogis","sequence":"additional","affiliation":[{"name":"IBM Systems and Technology Group, 1000 River Street, Essex Junction, Vermont 05452, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"S. M.","family":"Sri-Jayantha","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"A. M.","family":"Stephens","sequence":"additional","affiliation":[{"name":"IBM Research Division, 11501 Burnet Road, Austin, Texas 78758, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"A. W.","family":"Topol","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"C. K.","family":"Tsang","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"B. C.","family":"Webb","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"S. L.","family":"Wright","sequence":"additional","affiliation":[{"name":"IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"3082","container-title":["IBM Journal of Research and Development"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5288520\/5388557\/05388564.pdf?arnumber=5388564","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,20]],"date-time":"2025-10-20T17:50:20Z","timestamp":1760982620000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/5388564\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2008,11]]},"references-count":0,"journal-issue":{"issue":"6"},"URL":"https:\/\/doi.org\/10.1147\/jrd.2008.5388564","relation":{},"ISSN":["0018-8646","0018-8646"],"issn-type":[{"value":"0018-8646","type":"print"},{"value":"0018-8646","type":"electronic"}],"subject":[],"published":{"date-parts":[[2008,11]]}}}