{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T19:52:19Z","timestamp":1740167539326,"version":"3.37.3"},"reference-count":0,"publisher":"The Electrochemical Society","issue":"27","license":[{"start":{"date-parts":[[2010,2,22]],"date-time":"2010-02-22T00:00:00Z","timestamp":1266796800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/iopscience.iop.org\/page\/copyright"},{"start":{"date-parts":[[2010,2,22]],"date-time":"2010-02-22T00:00:00Z","timestamp":1266796800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/iopscience.iop.org\/info\/page\/text-and-data-mining"}],"content-domain":{"domain":["iopscience.iop.org"],"crossmark-restriction":false},"short-container-title":["ECS Trans."],"published-print":{"date-parts":[[2010,2,22]]},"abstract":"<jats:p>The results of the study on dielectric properties of TiO<jats:sub>2<\/jats:sub> thin films at high temperature T up to 900\u00baC are reported. High-temperature (Tc ~ 700\u00baC) anomalous behavior of dielectric constant was observed in both anatase and rutile TiO<jats:sub>2<\/jats:sub> thin films. Dielectric properties of TiO<jats:sub>2<\/jats:sub> thin films were studied in air, in controlled Ar\/O<jats:sub>2<\/jats:sub> atmospheres, and in vacuum using silicon-based Metal-Insulator-Semiconductor (MIS) Au\/TiO<jats:sub>2<\/jats:sub>\/Si capacitors. Anatase and rutile TiO<jats:sub>2<\/jats:sub> thin films were prepared by CVD method using Ti(OPri)<jats:sub>4<\/jats:sub> and Ti(dpm)<jats:sub>2<\/jats:sub>(OPri)<jats:sub>2<\/jats:sub> as precursors (dpm = 2,2,6,6-tetramethylheptane-3,5-dione and Pri = isopropyl).<\/jats:p>","DOI":"10.1149\/1.3318502","type":"journal-article","created":{"date-parts":[[2010,2,23]],"date-time":"2010-02-23T15:55:10Z","timestamp":1266940510000},"page":"35-44","update-policy":"https:\/\/doi.org\/10.1088\/crossmark-policy","source":"Crossref","is-referenced-by-count":2,"title":["High Temperature Phase Transitions Observed in Oxygen Deficient TiO<sub>2-x<\/sub> Thin Films"],"prefix":"10.1149","volume":"25","author":[{"given":"Valentin","family":"Bessergenev","sequence":"first","affiliation":[]}],"member":"77","container-title":["ECS Transactions"],"original-title":[],"link":[{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/syndication.highwire.org\/content\/doi\/10.1149\/1.3318502","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502","content-type":"text\/html","content-version":"vor","intended-application":"similarity-checking"},{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502\/pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,12,20]],"date-time":"2021-12-20T14:48:10Z","timestamp":1640011690000},"score":1,"resource":{"primary":{"URL":"https:\/\/iopscience.iop.org\/article\/10.1149\/1.3318502"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,2,22]]},"references-count":0,"journal-issue":{"issue":"27","published-print":{"date-parts":[[2010,2,22]]}},"URL":"https:\/\/doi.org\/10.1149\/1.3318502","relation":{},"ISSN":["1938-5862","1938-6737"],"issn-type":[{"type":"print","value":"1938-5862"},{"type":"electronic","value":"1938-6737"}],"subject":[],"published":{"date-parts":[[2010,2,22]]},"assertion":[{"value":"High Temperature Phase Transitions Observed in Oxygen Deficient TiO2-x Thin Films","name":"article_title","label":"Article Title"},{"value":"ECS Transactions","name":"journal_title","label":"Journal Title"},{"value":"paper","name":"article_type","label":"Article Type"},{"value":"\u00a9 2010 ECS - The Electrochemical Society","name":"copyright_information","label":"Copyright Information"},{"name":"date_received","label":"Date Received","group":{"name":"publication_dates","label":"Publication dates"}},{"name":"date_accepted","label":"Date Accepted","group":{"name":"publication_dates","label":"Publication dates"}},{"name":"date_epub","label":"Online publication date","group":{"name":"publication_dates","label":"Publication dates"}}]}}