{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,8,9]],"date-time":"2024-08-09T12:10:02Z","timestamp":1723205402230},"reference-count":0,"publisher":"Wiley","issue":"1-4","license":[{"start":{"date-parts":[[2000,1,1]],"date-time":"2000-01-01T00:00:00Z","timestamp":946684800000},"content-version":"vor","delay-in-days":730,"URL":"http:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":["onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["VLSI Design"],"published-print":{"date-parts":[[1998,1]]},"abstract":"<jats:p>The next generation of semiconductor process and device modeling codes will require 3\u2010D\nmesh capabilities including moving volume and surface grids, adaptive mesh refinement and\nadaptive mesh smoothing. To illustrate the value of these techniques, a time dependent process\nsimulation model was constructed using analytic functions to return time dependent\ndopant concentration and time dependent SiO<jats:sub>2<\/jats:sub> volume and surface velocities. Adaptive mesh\nrefinement and adaptive mesh smoothing techniques were used to resolve the moving boron\ndopant diffusion front in the Si substrate. The adaptive mesh smoothing technique involves\nminimizing the L<jats:sub>2<\/jats:sub> norm of the gradient of the error between the true dopant concentration\nand the piecewise linear approximation over the tetrahedral mesh thus assuring that the mesh\nis optimal for representing evolving solution gradients. Also implemented is constrained\nboundary smoothing, wherein the moving SiO<jats:sub>2<\/jats:sub>\/Si interface is represented by moving nodes\nthat correctly track the interface motion, and which use their remaining degrees of freedom to\nminimize the aforementioned error norm. Thus, optimal tetrahedral shape and alignment is\nobtained even in the neighborhood of a moving boundary. If desired, a topological \u201creconnection\u201d\nstep maintains a Delaunay mesh at all times. The combination of adaptive refinement,\nadaptive smoothing, and mesh reconnection gives excellent front tracking, feature resolution,\nand grid quality for finite volume\/finite element computation.<\/jats:p>","DOI":"10.1155\/1998\/15828","type":"journal-article","created":{"date-parts":[[2007,9,18]],"date-time":"2007-09-18T12:57:27Z","timestamp":1190120247000},"page":"373-378","update-policy":"http:\/\/dx.doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Moving Adaptive Unstructured 3\u2010D Meshes inSemiconductor Process Modeling Applications"],"prefix":"10.1155","volume":"6","author":[{"given":"Andrew","family":"Kuprat","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Denise","family":"George","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Eldon","family":"Linnebur","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Harold","family":"Trease","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"R. Kent","family":"Smith","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"311","published-online":{"date-parts":[[1998,1]]},"container-title":["VLSI Design"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/downloads.hindawi.com\/archive\/1998\/015828.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1155\/1998\/15828","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,9]],"date-time":"2024-08-09T11:33:54Z","timestamp":1723203234000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1155\/1998\/15828"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1998,1]]},"references-count":0,"journal-issue":{"issue":"1-4","published-print":{"date-parts":[[1998,1]]}},"alternative-id":["10.1155\/1998\/15828"],"URL":"https:\/\/doi.org\/10.1155\/1998\/15828","archive":["Portico"],"relation":{},"ISSN":["1065-514X","1563-5171"],"issn-type":[{"type":"print","value":"1065-514X"},{"type":"electronic","value":"1563-5171"}],"subject":[],"published":{"date-parts":[[1998,1]]},"assertion":[{"value":"1998-01-01","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}