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The anodization of Ti thin films on different substrates and the growth process of anodic titanium oxide are described using the current\u2010time curves. Special attention is paid on the influences of the initial film smoothness on the resulted nanoporous morphologies. The \u201cthreshold barrier layer thickness model\u201d is used to discuss the growth mechanism. As a case study for gas sensing, anodized highly ordered  TiO<jats:sub>2<\/jats:sub> nanotube arrays and nanoporous thin films that show porous surface with an average diameter of 25\u2009nm and interpore distance of 40\u2009nm were prepared. Gas sensors based on such nanotube arrays and nanoporous thin films were fabricated, and their sensing properties were investigated. Excellent H<jats:sub>2<\/jats:sub> gas sensing properties were obtained for sensors prepared from these highly ordered TiO<jats:sub>2<\/jats:sub> nanotube arrays, which present stable response even at a low operating temperature of 90<jats:sup>\u00b0<\/jats:sup>C. Based on our experimental results, \u201cH\u2010induced O<jats:sup>2\u2212<\/jats:sup> desorption\u201d mechanism was used for explaining the hydrogen gas sensing mechanism.<\/jats:p>","DOI":"10.1155\/2009\/402174","type":"journal-article","created":{"date-parts":[[2009,8,12]],"date-time":"2009-08-12T15:00:03Z","timestamp":1250089203000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":32,"title":["Fabrication of TiO<sub>2<\/sub> Nanotube Thin Films and Their Gas Sensing Properties"],"prefix":"10.1155","volume":"2009","author":[{"given":"Yongxiang","family":"Li","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaofeng","family":"Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qunbao","family":"Yang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"311","published-online":{"date-parts":[[2009,8,12]]},"reference":[{"key":"e_1_2_9_1_2","doi-asserted-by":"crossref","first-page":"735","DOI":"10.1007\/s003390100873","article-title":"Strong ultraviolet and violet photoluminescence from Si-based anodic porous alumina films","volume":"72","author":"Wu J. 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