{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,10]],"date-time":"2026-05-10T02:58:29Z","timestamp":1778381909337,"version":"3.51.4"},"reference-count":24,"publisher":"Wiley","license":[{"start":{"date-parts":[[2012,1,1]],"date-time":"2012-01-01T00:00:00Z","timestamp":1325376000000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"funder":[{"DOI":"10.13039\/501100001868","name":"National Science Council","doi-asserted-by":"publisher","award":["NSC95-3114-P-001-008?MY3"],"award-info":[{"award-number":["NSC95-3114-P-001-008?MY3"]}],"id":[{"id":"10.13039\/501100001868","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Journal of Sensors"],"published-print":{"date-parts":[[2012]]},"abstract":"<jats:p>We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80\u2009MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568\u2009nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS.<\/jats:p>","DOI":"10.1155\/2012\/580939","type":"journal-article","created":{"date-parts":[[2011,10,24]],"date-time":"2011-10-24T15:02:38Z","timestamp":1319468558000},"page":"1-7","source":"Crossref","is-referenced-by-count":10,"title":["An Astigmatic Detection System for Polymeric Cantilever-Based Sensors"],"prefix":"10.1155","volume":"2012","author":[{"given":"En-Te","family":"Hwu","sequence":"first","affiliation":[{"name":"Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan"}]},{"given":"Hsien-Shun","family":"Liao","sequence":"additional","affiliation":[{"name":"Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan"},{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}]},{"given":"Filippo G.","family":"Bosco","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, 2800 Lyngby, Denmark"}]},{"given":"Ching-Hsiu","family":"Chen","sequence":"additional","affiliation":[{"name":"Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan"}]},{"given":"Stephan Sylvest","family":"Keller","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, 2800 Lyngby, Denmark"}]},{"given":"Anja","family":"Boisen","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, 2800 Lyngby, Denmark"}]},{"given":"Kuang-Yuh","family":"Huang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}]}],"member":"311","reference":[{"key":"1","doi-asserted-by":"publisher","DOI":"10.1039\/b718174d"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200701667"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1039\/b707401h"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1126\/science.288.5464.316"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2008.275"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1063\/1.1763252"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1063\/1.342563"},{"issue":"2","key":"8","doi-asserted-by":"crossref","first-page":"901","DOI":"10.1116\/1.589171","volume":"14","year":"1996","journal-title":"Journal of Vacuum Science and Technology B"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1063\/1.108593"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/4\/4\/007"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1016\/S0304-3991(03)00063-9"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1016\/S0925-4005(01)00856-5"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1016\/S0956-5663(03)00035-6"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1063\/1.2817750"},{"issue":"3","key":"15","doi-asserted-by":"crossref","first-page":"1595","DOI":"10.3390\/s8031595","volume":"8","year":"2008","journal-title":"Sensors"},{"issue":"14","key":"16","doi-asserted-by":"crossref","first-page":"2411","DOI":"10.1039\/c1lc20116f","volume":"11","year":"2011","journal-title":"Lab on a Chip"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/19\/11\/115501"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1063\/1.2336115"},{"key":"19","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2011.02.093"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1021\/ma801539m"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1021\/bm049395v"},{"key":"22","doi-asserted-by":"publisher","DOI":"10.1023\/A:1020862129948"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1111\/j.1460-2695.2005.00873.x"},{"key":"24","doi-asserted-by":"publisher","DOI":"10.1016\/j.bios.2005.12.026"}],"container-title":["Journal of Sensors"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2012\/580939.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2012\/580939.xml","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2012\/580939.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T04:31:53Z","timestamp":1497933113000},"score":1,"resource":{"primary":{"URL":"http:\/\/www.hindawi.com\/journals\/js\/2012\/580939\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012]]},"references-count":24,"alternative-id":["580939","580939"],"URL":"https:\/\/doi.org\/10.1155\/2012\/580939","relation":{},"ISSN":["1687-725X","1687-7268"],"issn-type":[{"value":"1687-725X","type":"print"},{"value":"1687-7268","type":"electronic"}],"subject":[],"published":{"date-parts":[[2012]]}}}