{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,30]],"date-time":"2025-10-30T22:30:14Z","timestamp":1761863414402,"version":"3.37.3"},"reference-count":21,"publisher":"Wiley","license":[{"start":{"date-parts":[[2014,1,1]],"date-time":"2014-01-01T00:00:00Z","timestamp":1388534400000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"funder":[{"name":"National High Technology Research and Development Program of China","award":["2012AA040507","61327811","61233010","BK2012005"],"award-info":[{"award-number":["2012AA040507","61327811","61233010","BK2012005"]}]},{"name":"Instrument Development Major Program of National Natural Science of China","award":["2012AA040507","61327811","61233010","BK2012005"],"award-info":[{"award-number":["2012AA040507","61327811","61233010","BK2012005"]}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["2012AA040507","61327811","61233010","BK2012005"],"award-info":[{"award-number":["2012AA040507","61327811","61233010","BK2012005"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Jiangsu Natural Science Funds for Distinguished Young Scholar","award":["2012AA040507","61327811","61233010","BK2012005"],"award-info":[{"award-number":["2012AA040507","61327811","61233010","BK2012005"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Journal of Sensors"],"published-print":{"date-parts":[[2014]]},"abstract":"<jats:p>This paper reported a biaxial nanopositioning stage single-driven by piezoelectric motor. The employed piezoelectric motor can perform two different driving modes, namely, AC drive mode to drive in long-stroke and at high-speed and DC scanning mode with the high-resolution of several nanometers, which satisfies the requirements of both long-stroke and nanoresolution. To compensate for the effects of the variable friction force and some unpredictable disturbances, a novel backward error compensation (BEC) positioning control method integrated of the two driving modes and a double closed-loop PID controller system are proposed to obtain a high-accuracy positional motion. The experiment results demonstrate that the nanopositioning stage with large travel range of 300\u2009mm\u2009\u00d7\u2009300\u2009mm has a fine speed characteristic and resolution is 5\u2009nm. In the experiments of different travels up to 15\u2009mm, calibrated by a commercial laser vibrometer, the positioning accuracy is proved within 55\u2009nm in<jats:italic>x<\/jats:italic>-axis and 40\u2009nm in<jats:italic>y<\/jats:italic>-axis with standard deviation less than 40\u2009nm in<jats:italic>x<\/jats:italic>-axis and 30\u2009nm in<jats:italic>y<\/jats:italic>-axis and the final position locking can be limited to 10\u2009nm, meeting the requirements of micromanipulation technology.<\/jats:p>","DOI":"10.1155\/2014\/926314","type":"journal-article","created":{"date-parts":[[2014,11,24]],"date-time":"2014-11-24T16:01:24Z","timestamp":1416844884000},"page":"1-8","source":"Crossref","is-referenced-by-count":8,"title":["Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor"],"prefix":"10.1155","volume":"2014","author":[{"given":"Yong","family":"Wang","sequence":"first","affiliation":[{"name":"School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China"}]},{"given":"Fujun","family":"Sun","sequence":"additional","affiliation":[{"name":"Research Center of Robotics and Microsystem and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215021, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3730-5153","authenticated-orcid":true,"given":"Junhui","family":"Zhu","sequence":"additional","affiliation":[{"name":"Research Center of Robotics and Microsystem and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215021, China"}]},{"given":"Ming","family":"Pang","sequence":"additional","affiliation":[{"name":"College of Automation, Harbin Engineering University, Harbin 150001, China"}]},{"given":"Changhai","family":"Ru","sequence":"additional","affiliation":[{"name":"Research Center of Robotics and Microsystem and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215021, 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