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In this paper, a novel high temperature pressure sensor with the PSZ was designed and fabricated. The sensor was designed based on the small deflection theory, which enables its theoretic pressure-capacitance capability up to 60\u2009bar. HTCC process technology was used to fabricate the sensor, which would realize a completely passive LC resonant circuit integrated on the ceramic substrate. According to the coupling principle, noncontact testing is achieved using the designed readout system, with average sensitivity up to 38\u2009kHz Bar<jats:sup>\u22121<\/jats:sup> presented. Compared to the fabrication and measurement of traditional sensors, excellent packaging process is demonstrated, and the sensor can be completely tested from 0 to 60\u2009bar. <\/jats:p>","DOI":"10.1155\/2015\/974742","type":"journal-article","created":{"date-parts":[[2015,1,14]],"date-time":"2015-01-14T21:03:42Z","timestamp":1421269422000},"page":"974742","update-policy":"https:\/\/doi.org\/10.1177\/sage-journals-update-policy","source":"Crossref","is-referenced-by-count":2,"title":["A Wireless Pressure Microsensor Fabricated in HTCC Technology for Dynamic Pressure Monitoring in Harsh Environments"],"prefix":"10.1177","volume":"11","author":[{"given":"Ronghui","family":"Gao","sequence":"first","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yingping","family":"Hong","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Huixin","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenyi","family":"Liu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ting","family":"Liang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wendong","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jijun","family":"Xiong","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"179","published-online":{"date-parts":[[2015,1,14]]},"reference":[{"key":"B1-2015-974742","series-title":"Proceedings of SPIE","first-page":"2","volume-title":"Harsh Environment Sensors II","author":"Cullinane W. 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