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MEMS devices are more complex and extremely diverse due to the immersion of multidomains. Their failure modes are distinctive under different circumstances. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical, physical, chemical, and optical stimuli. Currently, test systems developed for MEMS devices have to be customized due to their nondeterministic behavior and complexity. The accurate measurement of test systems for MEMS is difficult to quantify in the production phase. The complexity of the device to be tested required maturity in the test technique which increases the cost of test development; this practice is directly imposed on the device cost. This factor causes a delay in time-to-market.<\/jats:p>","DOI":"10.1155\/2016\/1639805","type":"journal-article","created":{"date-parts":[[2016,2,21]],"date-time":"2016-02-21T16:01:12Z","timestamp":1456070472000},"page":"1-14","source":"Crossref","is-referenced-by-count":51,"title":["A Review on Key Issues and Challenges in Devices Level MEMS Testing"],"prefix":"10.1155","volume":"2016","author":[{"given":"Muhammad","family":"Shoaib","sequence":"first","affiliation":[{"name":"Department of Electrical & Electronic Engineering, Universiti Teknologi PETRONAS, 32610 Bandar Seri Iskandar, Perak Darul Ridzuan, Malaysia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Nor Hisham","family":"Hamid","sequence":"additional","affiliation":[{"name":"Department of Electrical & Electronic Engineering, Universiti Teknologi PETRONAS, 32610 Bandar Seri Iskandar, Perak Darul Ridzuan, Malaysia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Aamir 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