{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2023,4,23]],"date-time":"2023-04-23T06:29:24Z","timestamp":1682231364471},"reference-count":22,"publisher":"Hindawi Limited","license":[{"start":{"date-parts":[[2016,1,1]],"date-time":"2016-01-01T00:00:00Z","timestamp":1451606400000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Journal of Sensors"],"published-print":{"date-parts":[[2016]]},"abstract":"<jats:p>A three-step process has been demonstrated to improve the performance of photodiode by creating nanocone forest on the surface of photodiode as an antireflection layer. This high-throughput, low-cost process has been shown to decrease the reflectivity by 66.1%, enhance the quantum efficiency by 27%, and increase the responsivity by 25.7%. This low-cost manufacture process can be applied to increase the responsivity of silicon based photonic devices.<\/jats:p>","DOI":"10.1155\/2016\/4019864","type":"journal-article","created":{"date-parts":[[2016,4,18]],"date-time":"2016-04-18T21:01:59Z","timestamp":1461013319000},"page":"1-6","source":"Crossref","is-referenced-by-count":5,"title":["Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer"],"prefix":"10.1155","volume":"2016","author":[{"given":"Jing","family":"Jiang","sequence":"first","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhida","family":"Xu","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiahao","family":"Lin","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Gang Logan","family":"Liu","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"98","reference":[{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/S0956-5663(03)00203-3"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1063\/1.2821113"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2013.05.007"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1364\/ao.51.004430"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1039\/c5nr05435d"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1103\/physrevapplied.4.014020"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/16.119035"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1016\/s0927-0248(97)00273-0"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1063\/1.101596"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1063\/1.4908182"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1063\/1.2988893"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1080\/10408436.2012.719131"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1021\/nl500658n"},{"key":"22","doi-asserted-by":"publisher","DOI":"10.1002\/lpor.201400157"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1063\/1.122241"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/25\/30\/305301"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1021\/jp308162c"},{"key":"15","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/46\/46\/464016"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1063\/1.1662868"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1016\/j.mser.2008.07.001"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1016\/0040-6090(77)90197-3"},{"key":"19","volume":"77","year":"2000"}],"container-title":["Journal of Sensors"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2016\/4019864.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2016\/4019864.xml","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2016\/4019864.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2016,7,26]],"date-time":"2016-07-26T16:22:24Z","timestamp":1469550144000},"score":1,"resource":{"primary":{"URL":"http:\/\/www.hindawi.com\/journals\/js\/2016\/4019864\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016]]},"references-count":22,"alternative-id":["4019864","4019864"],"URL":"https:\/\/doi.org\/10.1155\/2016\/4019864","relation":{},"ISSN":["1687-725X","1687-7268"],"issn-type":[{"value":"1687-725X","type":"print"},{"value":"1687-7268","type":"electronic"}],"subject":[],"published":{"date-parts":[[2016]]}}}