{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,20]],"date-time":"2025-12-20T22:27:58Z","timestamp":1766269678398,"version":"3.37.3"},"reference-count":6,"publisher":"Wiley","license":[{"start":{"date-parts":[[2016,1,1]],"date-time":"2016-01-01T00:00:00Z","timestamp":1451606400000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100003052","name":"Ministry of Trade, Industry and Energy","doi-asserted-by":"publisher","award":["10054578"],"award-info":[{"award-number":["10054578"]}],"id":[{"id":"10.13039\/501100003052","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Journal of Sensors"],"published-print":{"date-parts":[[2016]]},"abstract":"<jats:p>This paper reports on designing a single-structure triaxes MEMS capacitive gyroscope which is capable of measuring the three angular velocities on a single drive. A Z-shaped beam for the support of folded coupling spring has been applied to suppress the unwanted mode and decrease the stress effect at the spring ends. The unique coupling spring has changed the driving motion, due to which slide film damping in the driving mode has been reduced. This reduction can lead to higher performance of the sensor with less requirements on vacuum level which decreases the cost of fabrication. Simulation analysis has been performed in COMSOL Multiphysics and Matlab Simulink to finalize the design for fabrication. After finite element analysis, the driving, <mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\" id=\"M1\"><mml:mrow><mml:mi>x<\/mml:mi><\/mml:mrow><\/mml:math>-sensing, <mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\" id=\"M2\"><mml:mrow><mml:mi>z<\/mml:mi><\/mml:mrow><\/mml:math>-sensing, and <mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\" id=\"M3\"><mml:mrow><mml:mi>y<\/mml:mi><\/mml:mrow><\/mml:math>-sensing are, respectively, found to be 13.30\u2009KHz, 13.40\u2009KHz, 13.47\u2009KHz, and 13.51\u2009KHz.<\/jats:p>","DOI":"10.1155\/2016\/4615389","type":"journal-article","created":{"date-parts":[[2016,12,14]],"date-time":"2016-12-14T18:48:44Z","timestamp":1481741324000},"page":"1-8","source":"Crossref","is-referenced-by-count":13,"title":["Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope"],"prefix":"10.1155","volume":"2016","author":[{"given":"Muhammad Ali","family":"Shah","sequence":"first","affiliation":[{"name":"School of Mechatronics Engineering, Korea University of Technology and Education (KoreaTech), 1600 Chungjeol-ro, Byeongcheon-myeon, Dongnam-gu, Cheonan-si, Chungcheongnam-do 330-708, Republic of Korea"},{"name":"Shinsung Advanced Institute (Shinsung C&T), Gasan 2-ro, Geumcheon-gu, Seoul, Republic of Korea"}]},{"given":"Faisal","family":"Iqbal","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, Korea University of Technology and Education (KoreaTech), 1600 Chungjeol-ro, Byeongcheon-myeon, Dongnam-gu, Cheonan-si, Chungcheongnam-do 330-708, Republic of Korea"}]},{"given":"Ibrar Ali","family":"Shah","sequence":"additional","affiliation":[{"name":"Department of Computer Software Engineering, University of Engineering and Technology Peshawar, Mardan Campus, Khyber Pakhtunkhwa, Pakistan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3918-2705","authenticated-orcid":true,"given":"Byeungleul","family":"Lee","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, Korea University of Technology and Education (KoreaTech), 1600 Chungjeol-ro, Byeongcheon-myeon, Dongnam-gu, Cheonan-si, Chungcheongnam-do 330-708, Republic of Korea"}]}],"member":"311","reference":[{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/5.704269"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2005.852437"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.3390\/s140101394"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1016\/j.proeng.2014.11.321"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1109\/led.2015.2454511"},{"key":"25","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/19\/12\/125015"}],"container-title":["Journal of Sensors"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2016\/4615389.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2016\/4615389.xml","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2016\/4615389.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2016,12,14]],"date-time":"2016-12-14T18:48:47Z","timestamp":1481741327000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.hindawi.com\/journals\/js\/2016\/4615389\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016]]},"references-count":6,"alternative-id":["4615389","4615389"],"URL":"https:\/\/doi.org\/10.1155\/2016\/4615389","relation":{},"ISSN":["1687-725X","1687-7268"],"issn-type":[{"type":"print","value":"1687-725X"},{"type":"electronic","value":"1687-7268"}],"subject":[],"published":{"date-parts":[[2016]]}}}