{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T14:35:59Z","timestamp":1740148559022,"version":"3.37.3"},"reference-count":16,"publisher":"Wiley","license":[{"start":{"date-parts":[[2018,1,1]],"date-time":"2018-01-01T00:00:00Z","timestamp":1514764800000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Natural Science Foundation of Shenzhen","award":["JCYJ201604291531109 08","2016GY-091"],"award-info":[{"award-number":["JCYJ201604291531109 08","2016GY-091"]}]},{"name":"Science and Technology Development Program of Shaanxi Province","award":["JCYJ201604291531109 08","2016GY-091"],"award-info":[{"award-number":["JCYJ201604291531109 08","2016GY-091"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Journal of Sensors"],"published-print":{"date-parts":[[2018]]},"abstract":"<jats:p>Fourier transform infrared spectroscopy is a widely used instrument to analyze and test different materials including organic and inorganic. Most of current commercial Fourier transform infrared spectrometers are limited in miniaturization and scanning velocity by their macroscopic components. MEMS FTIR spectroscopy is one of the important applications of translational actuator-driven systems by using MEMS technology. The critical component in MEMS FTIRs is the large displacement translating micromirror and its actuator. The paper presents a large displacement and high-surface quality micromirror. The micromirror consists of a micromagnetic actuator and a micromirror plate. The mirror plate and the actuator are fabricated separately and bonded together afterwards, and its size is 3.6\u2009\u00d7\u20093.6\u2009mm<jats:sup>2<\/jats:sup> high-surface quality square mirror plate and a 1cm<jats:sup>2<\/jats:sup> moving part. The microactuator\u2019s moving part is fabricated using MetalMUMPS, and its fixed part includes a ring permanent magnet and a solenoid to realize a large displacement. The mirror plate is fabricated using polished silicon coated with metal layer with high-surface prototypes that are fabricated and experimentally tested. A maximum stroke of 400\u2009<jats:italic>\u03bc<\/jats:italic>m has been achieved in pull-in whereas only 140\u2009<jats:italic>\u03bc<\/jats:italic>m stroke have been measured for a 4 to 5-volt DC-controlled displacement, and the resonance frequency is 10\u2009Hz.<\/jats:p>","DOI":"10.1155\/2018\/1460582","type":"journal-article","created":{"date-parts":[[2018,2,21]],"date-time":"2018-02-21T18:30:51Z","timestamp":1519237851000},"page":"1-6","source":"Crossref","is-referenced-by-count":2,"title":["The Designing of Magnetic-Driven Micromirror for Portable FTIRs"],"prefix":"10.1155","volume":"2018","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0230-2059","authenticated-orcid":true,"given":"Shaoxi","family":"Wang","sequence":"first","affiliation":[{"name":"School of Software & Microelectronics, Northwestern Polytechnical University, Xi\u2019an, Shaanxi, China"},{"name":"School of Mechanical Engineering, Ryerson University, Toronto, ON, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xuan","family":"Yuan","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Ryerson University, Toronto, ON, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"311","reference":[{"year":"1986","key":"1"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1117\/1.2945227"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.13.1.011115"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1117\/12.2038588"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1201\/b10777"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1364\/OL.24.001705"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1364\/OL.29.001437"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2008.12.022"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/2944.991404"},{"year":"2003","key":"11"},{"key":"12","doi-asserted-by":"crossref","first-page":"124","DOI":"10.1117\/12.524130","volume":"5344","year":"2004","journal-title":"Proceedings of SPIE"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/12\/001"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1364\/OE.17.021289"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2016.2522767"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1109\/jmems.2016.2565388"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-017-3432-7"}],"container-title":["Journal of Sensors"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2018\/1460582.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2018\/1460582.xml","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2018\/1460582.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2018,2,21]],"date-time":"2018-02-21T18:30:58Z","timestamp":1519237858000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.hindawi.com\/journals\/js\/2018\/1460582\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018]]},"references-count":16,"alternative-id":["1460582","1460582"],"URL":"https:\/\/doi.org\/10.1155\/2018\/1460582","relation":{},"ISSN":["1687-725X","1687-7268"],"issn-type":[{"type":"print","value":"1687-725X"},{"type":"electronic","value":"1687-7268"}],"subject":[],"published":{"date-parts":[[2018]]}}}