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A dual-mass decoupled MEMS gyroscope with the integrated electrostatic frequency tuning mechanisms, the quadrature correction electrode, and the feedback electrode is adopted to implement mode-matching control. Compared with the previous mode-matching method of forward excitation calibration, the proposed mode-matching scheme based on feedback calibration has better adaptability to the variation in the frequency of calibration pilot tones and the quality factor of the sense mode. The influences of calibration pilot tone frequency and the amplitude ratio on tuning performance are studied in theory and simulation. The simulation results demonstrate that the tuning error due to the amplitude asymmetry of the sense mode increases with a frequency split between pilot tones and the drive mode and is significantly reduced by the amplitude correction technology of pilot tones. In addition, the influence of key parameters on the stability of the mode-matching system is deduced by using the average analysis method. The MATLAB simulation of the mode-matching control system illustrates that simulation results have a good consistency with theoretical analysis, which verifies the effectiveness of the closed-loop mode-matching control system. The entire mode-matching control system based on a FPGA device is implemented combined with a closed-loop self-excitation drive, closed-loop force feedback control, and quadrature error correction control. Experimental results demonstrate that the mode-matching prototype has a bias instability of 0.63\u00b0\/h and ARW of 0.0056\u00b0\/h<jats:sup>1\/2<\/jats:sup>. Compared with the mode-mismatched MEMS gyroscope, the performances of bias instability and ARW are improved by 3.81 times and 4.20 times, respectively.<\/jats:p>","DOI":"10.1155\/2019\/9894367","type":"journal-article","created":{"date-parts":[[2019,2,5]],"date-time":"2019-02-05T23:33:11Z","timestamp":1549409591000},"page":"1-19","source":"Crossref","is-referenced-by-count":8,"title":["A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope"],"prefix":"10.1155","volume":"2019","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-0404-8119","authenticated-orcid":true,"given":"Bo","family":"Yang","sequence":"first","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Lei","family":"Wu","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Chengfu","family":"Lu","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Gang","family":"Wang","sequence":"additional","affiliation":[{"name":"Aviation Key Laboratory of Science and Technology on Inertia, FACRI, Xi\u2019an 710065, China"}]}],"member":"311","reference":[{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2016.2636080"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2003.809967"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(01)00603-3"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2014.2299234"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2009.2020707"},{"key":"19","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2008.2004794"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2008.2006465"},{"key":"24","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2009.2023985"},{"key":"25","doi-asserted-by":"publisher","DOI":"10.3390\/s16040503"}],"container-title":["Journal of Sensors"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2019\/9894367.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2019\/9894367.xml","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/js\/2019\/9894367.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,5,20]],"date-time":"2020-05-20T22:15:00Z","timestamp":1590012900000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.hindawi.com\/journals\/js\/2019\/9894367\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,2,5]]},"references-count":9,"alternative-id":["9894367","9894367"],"URL":"https:\/\/doi.org\/10.1155\/2019\/9894367","relation":{},"ISSN":["1687-725X","1687-7268"],"issn-type":[{"value":"1687-725X","type":"print"},{"value":"1687-7268","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,2,5]]}}}