{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,4]],"date-time":"2026-05-04T13:43:38Z","timestamp":1777902218230,"version":"3.51.4"},"reference-count":14,"publisher":"SAGE Publications","issue":"5","license":[{"start":{"date-parts":[[2011,8,4]],"date-time":"2011-08-04T00:00:00Z","timestamp":1312416000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/journals.sagepub.com\/page\/policies\/text-and-data-mining-license"}],"content-domain":{"domain":["journals.sagepub.com"],"crossmark-restriction":true},"short-container-title":["SIMULATION"],"published-print":{"date-parts":[[2012,5]]},"abstract":"<jats:p>In this paper we present behavioral modeling of a monolithically integrated three-axis capacitive accelerometer using the standard MetalMUMPs process. The behavioral modeling is done in order to verify the design with respect to structural and electrostatic performance of the designed three-axis capacitive accelerometer. The proposed accelerometer is 3.2\u2009mm \u00d7 3.5\u2009mm in size, designed for sensing the acceleration of 25 g in three axes. The mechanical noise floor for in-plane ( x and y) and out-of-plane ( z) axes is 0.291, 0.316, and 2.84\u2009\u00b5 g\/\u221a (Hz), respectively. The total sense capacitance along the x, y, and z axes is 68.5\u2009fF, 100\u2009fF, and 6.19\u2009pF, respectively. Sensitivity of 2.568\u2009fF\/ g, 4\u2009fF\/ g, and 0.252\u2009pF\/ g is obtained for in-plane ( x and y) and out-of-plane ( z) axes, respectively. The resonance frequency for the designed accelerometer is 800 and 2500\u2009Hz for in-plane and out-of-plane axes, respectively. The results obtained by behavioral modeling are compared with the analytical results, which are approximately the same.<\/jats:p>","DOI":"10.1177\/0037549711411355","type":"journal-article","created":{"date-parts":[[2011,8,4]],"date-time":"2011-08-04T21:34:45Z","timestamp":1312493685000},"page":"565-579","update-policy":"https:\/\/doi.org\/10.1177\/sage-journals-update-policy","source":"Crossref","is-referenced-by-count":2,"title":["Behavioral modeling of a monolithically integrated three-axis capacitive accelerometer based on the MetalMUMPs process"],"prefix":"10.1177","volume":"88","author":[{"given":"Abid","family":"Iqbal","sequence":"first","affiliation":[{"name":"Department of Electrical Engineering, COMSATS Institute of Information Technology, Abbottabad, Pakistan"}]},{"given":"Shafaat A.","family":"Bazaz","sequence":"additional","affiliation":[{"name":"Faculty of Computer Science and Engineering, Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Pakistan"}]}],"member":"179","published-online":{"date-parts":[[2011,8,4]]},"reference":[{"key":"bibr1-0037549711411355","first-page":"33","volume":"14","author":"Dosher J","year":"1997","journal-title":"Sensors"},{"key":"bibr2-0037549711411355","unstructured":"Pottenger MD. Design of micromachined inertial sensors. PhD Dissertation, University of California, 2001."},{"key":"bibr3-0037549711411355","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2004.05.008"},{"key":"bibr4-0037549711411355","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1979.19795"},{"key":"bibr5-0037549711411355","doi-asserted-by":"publisher","DOI":"10.1109\/5.704269"},{"key":"bibr6-0037549711411355","doi-asserted-by":"publisher","DOI":"10.1109\/84.896777"},{"key":"bibr7-0037549711411355","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2004.839347"},{"key":"bibr8-0037549711411355","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2008.923582"},{"key":"bibr9-0037549711411355","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-010-1146-1"},{"key":"bibr10-0037549711411355","unstructured":"CoventorWare Architect. Version 2008. MEMS and Microsystems System- Level Design Coventor, Inc."},{"key":"bibr11-0037549711411355","author":"Cowen A","journal-title":"MetalMUMPs design handbook"},{"key":"bibr12-0037549711411355","doi-asserted-by":"publisher","DOI":"10.1201\/9781420027754"},{"key":"bibr13-0037549711411355","volume-title":"Micro mechanical tranducers","volume":"8","author":"Middelhoek S","year":"2000"},{"key":"bibr14-0037549711411355","first-page":"202","volume-title":"Proceedings of the Solid-State Sensors and Actuators Workshop","author":"Jiang X"}],"container-title":["SIMULATION"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/journals.sagepub.com\/doi\/pdf\/10.1177\/0037549711411355","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/journals.sagepub.com\/doi\/pdf\/10.1177\/0037549711411355","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,5,1]],"date-time":"2026-05-01T11:23:13Z","timestamp":1777634593000},"score":1,"resource":{"primary":{"URL":"https:\/\/journals.sagepub.com\/doi\/10.1177\/0037549711411355"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,8,4]]},"references-count":14,"journal-issue":{"issue":"5","published-print":{"date-parts":[[2012,5]]}},"alternative-id":["10.1177\/0037549711411355"],"URL":"https:\/\/doi.org\/10.1177\/0037549711411355","relation":{},"ISSN":["0037-5497","1741-3133"],"issn-type":[{"value":"0037-5497","type":"print"},{"value":"1741-3133","type":"electronic"}],"subject":[],"published":{"date-parts":[[2011,8,4]]}}}