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The traditional capacitance formula used in macro-scale systems design could not meet the requirement of micro-scale field because the fringe effects of capacitors have great contribution to the total measured capacitance under a few millimeters of separation distance. In this paper, the theoretical equation of capacitance with fringe effects is utilized to design the sensitivity and nonlinearity of a capacitive micro accelerometer. The proposed analytical method provides a quantitative evaluation of sensing capacitance of micro accelerometers. Experimental results indicate that the theoretical design with fringe effects has a better agreement with experiments than ideal parallel-plate capacitor principle.<\/jats:p>","DOI":"10.1177\/0142331217711245","type":"journal-article","created":{"date-parts":[[2017,6,26]],"date-time":"2017-06-26T11:16:43Z","timestamp":1498475803000},"page":"2881-2886","update-policy":"https:\/\/doi.org\/10.1177\/sage-journals-update-policy","source":"Crossref","is-referenced-by-count":6,"title":["Consideration of the fringe effects of capacitors in micro accelerometer design"],"prefix":"10.1177","volume":"40","author":[{"given":"Wu","family":"Zhou","sequence":"first","affiliation":[{"name":"School of Mechatronics Engineering, University of Electronic Science and Technology of China, China"},{"name":"Center for Robotics, University of Electronic Science and Technology of China, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hongfang","family":"Lan","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, University of Electronic Science and Technology of China, China"},{"name":"Center for Robotics, University of Electronic Science and Technology of China, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Huijun","family":"Yu","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, University of Electronic Science and Technology of China, China"},{"name":"Center for Robotics, University of Electronic Science and Technology of China, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Liushan","family":"Lai","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, University of Electronic Science and Technology of China, China"},{"name":"Center for Robotics, University of Electronic Science and Technology of China, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bei","family":"Peng","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, University of Electronic Science and Technology of China, China"},{"name":"Center for Robotics, University of Electronic Science and Technology of China, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaoping","family":"He","sequence":"additional","affiliation":[{"name":"Institute of Electronic Engineering, China Academy of Engineering Physic, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"179","published-online":{"date-parts":[[2017,6,26]]},"reference":[{"key":"bibr1-0142331217711245","doi-asserted-by":"publisher","DOI":"10.2174\/1876402911002010043"},{"key":"bibr2-0142331217711245","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-014-2243-3"},{"key":"bibr3-0142331217711245","author":"Gao CM","year":"2008","journal-title":"Xi\u2019an University of Electronic Science and Technology"},{"key":"bibr4-0142331217711245","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.2007.4300425"},{"key":"bibr5-0142331217711245","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-013-1955-0"},{"key":"bibr6-0142331217711245","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-015-2412-z"},{"key":"bibr7-0142331217711245","unstructured":"Huang ZX, Wang XJ (1996) Theory and technology of microwave transmission. 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