{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,2]],"date-time":"2026-05-02T10:00:39Z","timestamp":1777716039937,"version":"3.51.4"},"reference-count":181,"publisher":"SAGE Publications","issue":"11","license":[{"start":{"date-parts":[[2024,2,22]],"date-time":"2024-02-22T00:00:00Z","timestamp":1708560000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/journals.sagepub.com\/page\/policies\/text-and-data-mining-license"}],"funder":[{"name":"The National Research Foundation of Korea (NRF) grants funded by the MSIT","award":["NRF-2021R1A2B5B03087094"],"award-info":[{"award-number":["NRF-2021R1A2B5B03087094"]}]},{"name":"The National Research Foundation of Korea (NRF) grants funded by the MSIT","award":["NRF-2021R1A4A2001824"],"award-info":[{"award-number":["NRF-2021R1A4A2001824"]}]}],"content-domain":{"domain":["journals.sagepub.com"],"crossmark-restriction":true},"short-container-title":["The International Journal of Robotics Research"],"published-print":{"date-parts":[[2024,9]]},"abstract":"<jats:p>Over the past decade, remotely powered micro actuators have gained increased attention for biomedical and environmental remediation applications, owing to their ability to access confined regions and the nonintrusive nature of control. Recent studies focus on improving the functionality and versatility of micro actuators through the development of new fabrication and actuation techniques. However, there is a possibility that a limited understanding of the scaling impact of various physical principles governing design and control has affected the successful implementation of such devices in practical scenarios. Thus, the main focus of this review is to evaluate the most widely utilized manufacturing methods and remote actuation sources in light of various characteristics such as resolution, productivity, shape complexity, actuation speed, actuation mode, operating medium, and so on. State-of-the-art developments in each type of manufacturing and actuation are introduced and delineated. Finally, the limitations of current devices are reviewed, and the future direction to enable the full potential of this field is provided.<\/jats:p>","DOI":"10.1177\/02783649241235215","type":"journal-article","created":{"date-parts":[[2024,2,22]],"date-time":"2024-02-22T06:39:29Z","timestamp":1708583969000},"page":"1809-1830","update-policy":"https:\/\/doi.org\/10.1177\/sage-journals-update-policy","source":"Crossref","is-referenced-by-count":3,"title":["Scaling effects of manufacturing processes and actuation sources on control of remotely powered micro actuators"],"prefix":"10.1177","volume":"43","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5869-9710","authenticated-orcid":false,"given":"Jae-Kyung","family":"Heo","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6427-9210","authenticated-orcid":false,"family":"Kausthubharam","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Minyong","family":"Jung","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wonjin","family":"Kim","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Suhwan","family":"Jeong","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8372-5901","authenticated-orcid":false,"given":"Dae-Seob","family":"Song","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ying-Jun","family":"Quan","sequence":"additional","affiliation":[{"name":"Institute of Advanced Machines and Design, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ji Ho","family":"Jeon","sequence":"additional","affiliation":[{"name":"Institute of Advanced Machines and Design, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rodrigo","family":"Ribeiro de Moura","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sung-Hoon","family":"Ahn","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Seoul National University, Seoul, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"179","published-online":{"date-parts":[[2024,2,22]]},"reference":[{"key":"bibr1-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-022-00421-y"},{"key":"bibr2-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/LPT.2013.2248354"},{"key":"bibr3-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2016.05.009"},{"key":"bibr4-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1073\/pnas.1920099117"},{"key":"bibr5-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.6b01601"},{"key":"bibr6-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-020-61586-y"},{"key":"bibr7-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adom.201700031"},{"key":"bibr9-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-017-18891-w"},{"key":"bibr10-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/ETFA.2001.997785"},{"key":"bibr11-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.9b09525"},{"key":"bibr12-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.1c04559"},{"key":"bibr13-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.matdes.2020.109212"},{"key":"bibr14-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2014.24"},{"key":"bibr15-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-017-3342-8"},{"key":"bibr16-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1108\/01439910810876373"},{"key":"bibr17-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/ROBOT.2003.1242045"},{"key":"bibr18-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/ISOT.2012.6403233"},{"key":"bibr19-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/DTIP.2017.7984472"},{"key":"bibr20-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevApplied.11.014025"},{"key":"bibr21-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.jmmm.2019.165778"},{"key":"bibr22-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1063\/1.4737646"},{"key":"bibr23-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1039\/b925568k"},{"key":"bibr24-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/MHS.1996.563428"},{"key":"bibr25-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/BFb0029303"},{"key":"bibr26-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-021-00902-6"},{"key":"bibr27-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/nmat1843"},{"key":"bibr28-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/s11051-014-2737-z"},{"key":"bibr31-02783649241235215","doi-asserted-by":"publisher","DOI":"10.3390\/mi8060183"},{"key":"bibr32-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201605458"},{"key":"bibr33-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201705061"},{"key":"bibr29-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2015.7147428"},{"key":"bibr34-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-018-04855-9"},{"key":"bibr30-02783649241235215","unstructured":"Chen K, Wang P, Yang L, et al. (2015b) Rotational movement of \u201cZ\u201d shape Au\/Pt hybrid micro-nanorobot. In: IEEE 15th International Conference on Nanotechnology (IEEE-NANO), Rome, Italy, July 2015, pp. 2769\u20133072. IEEE."},{"key":"bibr35-02783649241235215","doi-asserted-by":"publisher","DOI":"10.3390\/mi7010003"},{"key":"bibr36-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms9686"},{"key":"bibr37-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/2\/3\/005"},{"key":"bibr38-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.0c03686"},{"key":"bibr39-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1177\/0278364913500543"},{"key":"bibr40-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1177\/0278364913483183"},{"key":"bibr41-02783649241235215","volume-title":"Robotics: Science and Systems","author":"Diller ED","year":"2014"},{"key":"bibr42-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2005.863697"},{"key":"bibr43-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.5b05940"},{"key":"bibr44-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/25\/19\/195503"},{"key":"bibr45-02783649241235215","first-page":"1202","volume":"99","author":"Ebefors T","year":"1999","journal-title":"Proc. Transducers"},{"key":"bibr46-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1364\/OME.2.000942"},{"key":"bibr47-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.6b01415"},{"key":"bibr48-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.nantod.2011.05.003"},{"key":"bibr49-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1177\/0278364916631414"},{"key":"bibr50-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1063\/1.5005032"},{"key":"bibr51-02783649241235215","doi-asserted-by":"publisher","DOI":"10.3390\/mi9090454"},{"key":"bibr52-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/TRO.2016.2638446"},{"key":"bibr53-02783649241235215","doi-asserted-by":"crossref","unstructured":"Fukuda T, Arai F (1993) Microrobot and applications. In: Proceedings of IEEE 2nd International Workshop on Emerging Technologies and Factory Automation (ETFA\u201993), Palm Cove-Clairns, Australia, 27-29 September 1993, pp. 1\u20138. IEEE.","DOI":"10.1109\/ETFA.1993.396435"},{"key":"bibr54-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201304098"},{"key":"bibr55-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/nn303309z"},{"key":"bibr56-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/LRA.2019.2891080"},{"key":"bibr57-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1039\/C6LC00981F"},{"key":"bibr58-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/s12555-017-0060-z"},{"key":"bibr59-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/s10544-018-0317-1"},{"key":"bibr60-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/nature01935"},{"key":"bibr61-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2003.809134"},{"key":"bibr62-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1039\/C5NR02347E"},{"key":"bibr63-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1126\/sciadv.1701108"},{"key":"bibr64-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1097\/MAO.0000000000003129"},{"key":"bibr65-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-020-80375-1"},{"key":"bibr66-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/ICRA.2012.6225284"},{"key":"bibr67-02783649241235215","first-page":"5303","volume":"2013","author":"Hu W","year":"2013","journal-title":"Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC)"},{"key":"bibr68-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/25\/9\/095009"},{"key":"bibr69-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1039\/D0TB00789G"},{"key":"bibr70-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/37.45787"},{"key":"bibr71-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2020.112502"},{"key":"bibr72-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/anie.200804704"},{"key":"bibr73-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/24\/9\/095004"},{"key":"bibr74-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2019.111707"},{"key":"bibr75-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/ICRA.2011.5979885"},{"key":"bibr76-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1126\/science.288.5475.2335"},{"key":"bibr77-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6439\/ab087d"},{"key":"bibr78-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1186\/s40486-018-0077-y"},{"key":"bibr79-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1089\/soro.2018.0019"},{"key":"bibr80-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1126\/scirobotics.aav4317"},{"key":"bibr81-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/BioRob.2012.6290280"},{"key":"bibr82-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2020.111973"},{"key":"bibr83-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.0c01729"},{"key":"bibr84-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/ICRA.2011.5980072"},{"key":"bibr85-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/smll.201402215"},{"key":"bibr86-02783649241235215","doi-asserted-by":"crossref","unstructured":"Kai C, Pengbo W, Lijun Y, et al. (2015a) Rotational movement of \u201cZ\u201d shape Au\/Pt hybrid micro-nanorobot. In: IEEE 15th International Conference on Nanotechnology (IEEE-NANO), Rome, Italy, 27\u201330 July 2015, pp. 69\u201372.","DOI":"10.1109\/NANO.2015.7388708"},{"key":"bibr87-02783649241235215","unstructured":"Kai C, Tao C, Huicong L, et al. (2015b) A Pt\/Au hybrid self-actuating nanorobot towards to durg delivery system. In: 10th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems, Xian, China, April 2015, pp. 7286\u201311289."},{"key":"bibr88-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/anie.201603639"},{"key":"bibr89-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202304937"},{"key":"bibr90-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2005.05.004"},{"key":"bibr91-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.tsf.2010.03.160"},{"key":"bibr92-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms4632"},{"key":"bibr93-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/srep30713"},{"key":"bibr94-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.snb.2019.03.030"},{"key":"bibr95-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/admt.201900583"},{"key":"bibr96-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adom.202102024"},{"key":"bibr97-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.1c08136"},{"key":"bibr98-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1163\/156856304773954313"},{"key":"bibr99-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/s41683-021-00080-7"},{"key":"bibr100-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/MAHC.2011.83"},{"key":"bibr101-02783649241235215","first-page":"5007","volume-title":"IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA\u201904. 2004","author":"Lee YP","year":"2004"},{"key":"bibr102-02783649241235215","unstructured":"Lee H-T, Kim C-S, Yoon H-S, et al. (2014) In-situ characterization of nano-structures fabricated by focused ion beam (FIB) and nano particle deposition system (NPDS). In: International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. V004T09A018American Society of Mechanical Engineers, Buffalo, NY, USA, 17-20 August 2014."},{"key":"bibr103-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1039\/C5NR01118C"},{"key":"bibr104-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/smll.201801023"},{"key":"bibr105-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adhm.201700985"},{"key":"bibr106-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/s12541-019-00250-6"},{"key":"bibr107-02783649241235215","volume-title":"Surface Micromachining. Handbook of Silicon Based MEMS Materials and Technologies","author":"Leinenbach C","year":"2010"},{"key":"bibr108-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/978-981-15-2117-1_1"},{"key":"bibr109-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/25\/2\/027001"},{"key":"bibr110-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1080\/02652048.2016.1234514"},{"key":"bibr111-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/AIM.2016.7576856"},{"key":"bibr112-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.7b02383"},{"key":"bibr113-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1039\/C8NR04907F"},{"key":"bibr114-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1126\/scirobotics.aat8829"},{"key":"bibr115-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.0c00381"},{"key":"bibr116-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/nl303405g"},{"key":"bibr117-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adhm.202102253"},{"key":"bibr118-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms1550"},{"key":"bibr119-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1093\/nsr\/nwz083"},{"key":"bibr120-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1117\/1.3642641"},{"key":"bibr121-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acs.jpcc.5b07251"},{"key":"bibr122-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201901677"},{"key":"bibr123-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.0c03311"},{"key":"bibr124-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/nature19755"},{"key":"bibr125-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/ecj.11502"},{"key":"bibr126-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevFluids.2.044202"},{"key":"bibr127-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201604825"},{"key":"bibr128-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/nmat4569"},{"key":"bibr129-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2020.111466"},{"key":"bibr130-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.8b04794"},{"key":"bibr131-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/jacs.8b03460"},{"key":"bibr132-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1177\/0278364909341413"},{"key":"bibr133-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1063\/1.3123231"},{"key":"bibr134-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-642-39802-5_19"},{"key":"bibr135-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/TMRB.2020.3027871"},{"key":"bibr136-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.neuron.2014.04.041"},{"key":"bibr137-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.proeng.2016.07.072"},{"key":"bibr138-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/anie.201609121"},{"key":"bibr139-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.cirp.2019.04.037"},{"key":"bibr140-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.9b08953"},{"key":"bibr141-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-017-03525-y"},{"key":"bibr142-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.1c01172"},{"key":"bibr143-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2018.02.010"},{"key":"bibr144-02783649241235215","doi-asserted-by":"publisher","DOI":"10.32657\/10220\/47391"},{"key":"bibr145-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/anie.201202044"},{"key":"bibr146-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.5b06311"},{"key":"bibr147-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.addma.2020.101834"},{"key":"bibr148-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.201502129"},{"key":"bibr149-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms3607"},{"key":"bibr150-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/TNB.2020.3042266"},{"key":"bibr151-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.xcrp.2021.100439"},{"key":"bibr152-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.5b07080"},{"key":"bibr153-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1073\/pnas.2007362117"},{"key":"bibr154-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/smll.201603679"},{"key":"bibr155-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1177\/0278364912472381"},{"key":"bibr156-02783649241235215","first-page":"237","volume":"17","author":"Takahashi N","year":"2016","journal-title":"IEEE 11th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"},{"key":"bibr157-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1039\/D0NR02496A"},{"key":"bibr158-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms4124"},{"key":"bibr159-02783649241235215","volume-title":"Handbook of Silicon Based MEMS Materials and Technologies","author":"Tilli M","year":"2020"},{"key":"bibr160-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/0250-6874(89)87079-9"},{"key":"bibr161-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.124.223902"},{"key":"bibr162-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/BIOROB.2016.7523671"},{"key":"bibr163-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/la5001254"},{"key":"bibr164-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.eml.2020.101023"},{"key":"bibr165-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.0c01705"},{"key":"bibr166-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202002047"},{"key":"bibr167-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/smll.201502605"},{"key":"bibr168-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1016\/j.apmt.2020.100621"},{"key":"bibr169-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.0c03022"},{"key":"bibr170-02783649241235215","first-page":"902","volume":"24","author":"Xie H","year":"2019","journal-title":"IEEE"},{"key":"bibr171-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1126\/scirobotics.aav8006"},{"key":"bibr172-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1021\/jacs.6b00902"},{"key":"bibr173-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2019.2937232"},{"key":"bibr174-02783649241235215","unstructured":"Yang X, Zhang S, Wang B, et al. (2022) Pushing the feature size down to 11 Nm by interference photolithography with hyperbolic metamaterials under conventional UV light source. arXiv preprint arXiv:2209.02383."},{"key":"bibr175-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1002\/advs.201801837"},{"key":"bibr176-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1109\/TRO.2017.2693999"},{"key":"bibr177-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevApplied.18.024060"},{"key":"bibr178-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-012-1567-0"},{"key":"bibr179-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1073\/pnas.1903406116"},{"key":"bibr180-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1039\/D1NA00641J"},{"key":"bibr181-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1007\/s42235-021-0063-6"},{"key":"bibr182-02783649241235215","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevFluids.4.061701"}],"container-title":["The International Journal of Robotics Research"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/journals.sagepub.com\/doi\/pdf\/10.1177\/02783649241235215","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/journals.sagepub.com\/doi\/full-xml\/10.1177\/02783649241235215","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/journals.sagepub.com\/doi\/pdf\/10.1177\/02783649241235215","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,4,29]],"date-time":"2026-04-29T10:17:11Z","timestamp":1777457831000},"score":1,"resource":{"primary":{"URL":"https:\/\/journals.sagepub.com\/doi\/10.1177\/02783649241235215"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,2,22]]},"references-count":181,"journal-issue":{"issue":"11","published-print":{"date-parts":[[2024,9]]}},"alternative-id":["10.1177\/02783649241235215"],"URL":"https:\/\/doi.org\/10.1177\/02783649241235215","relation":{},"ISSN":["0278-3649","1741-3176"],"issn-type":[{"value":"0278-3649","type":"print"},{"value":"1741-3176","type":"electronic"}],"subject":[],"published":{"date-parts":[[2024,2,22]]}}}