{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,27]],"date-time":"2025-10-27T16:05:44Z","timestamp":1761581144546,"version":"3.38.0"},"reference-count":23,"publisher":"SAGE Publications","issue":"2","license":[{"start":{"date-parts":[[2013,11,20]],"date-time":"2013-11-20T00:00:00Z","timestamp":1384905600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/journals.sagepub.com\/page\/policies\/text-and-data-mining-license"}],"content-domain":{"domain":["journals.sagepub.com"],"crossmark-restriction":true},"short-container-title":["Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering"],"published-print":{"date-parts":[[2014,2]]},"abstract":"<jats:p> To meet the ever-increasing requirements for accurate manufacturing equipment, feedforward control has been widely regarded as an effective method. A nominal feedforward controller equals to the inverse model, which conventional model-based approaches could not acquire accurately due to the inevitable model error, the stability of the inverse model and so on. Therefore, a data-based feedforward control based on a parametric structure is proposed. The structure takes acceleration and snap set-points as signal inputs and both paths equip finite impulse response filters. Each finite impulse response filter is parameterized by a series of coefficients, assuming that the difference between the actual output and nominal output is an affine function of these coefficients. The coefficients are obtained from a gradient and Hessian approximation\u2013based algorithm and optimized by minimizing a quadratic objective function. Two methods are proposed to approximate the gradient: the direct approach and the Toeplitz matrix approach. Finally, the proposed algorithm is assessed on a developed wafer stage. The results show that the proposed parametric structure improves the scanning tracking performance and provides a more desirable way to deal with the model with several resonances in low frequency. <\/jats:p>","DOI":"10.1177\/0959651813506897","type":"journal-article","created":{"date-parts":[[2013,11,21]],"date-time":"2013-11-21T01:58:58Z","timestamp":1384999138000},"page":"97-106","update-policy":"https:\/\/doi.org\/10.1177\/sage-journals-update-policy","source":"Crossref","is-referenced-by-count":11,"title":["Optimal feedforward control with a parametric structure applied to a wafer stage"],"prefix":"10.1177","volume":"228","author":[{"given":"Yi","family":"Jiang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China"}]},{"given":"Kaiming","family":"Yang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China"}]},{"given":"Yu","family":"Zhu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China"}]},{"given":"Xin","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China"}]},{"given":"Dongdong","family":"Yu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China"}]}],"member":"179","published-online":{"date-parts":[[2013,11,20]]},"reference":[{"key":"bibr1-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1299\/jamdsm.4.976"},{"key":"bibr2-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1109\/MCS.2011.941882"},{"volume-title":"Proceedings of the SPIE 6040, ICMIT 2005: mechatronics, MEMS, and smart materials","author":"Kim KH","key":"bibr3-0959651813506897"},{"key":"bibr4-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1098\/rsta.2011.0054"},{"key":"bibr5-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1243\/09596518JSCE564"},{"key":"bibr6-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2004.02.010"},{"first-page":"4843","volume-title":"Proceeding of the 2004 American control conference","author":"Boerlage M","key":"bibr7-0959651813506897"},{"first-page":"1158","volume-title":"Proceeding of the 2003 IEEE conference on control application","author":"Boerlage M","key":"bibr8-0959651813506897"},{"key":"bibr9-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1115\/1.3143822"},{"first-page":"188","volume-title":"5th IFAC symposium on mechatronic systems","author":"Fujimoto H","key":"bibr10-0959651813506897"},{"key":"bibr11-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1109\/TSMCC.2007.905759"},{"key":"bibr12-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1109\/MCS.2006.1636313"},{"key":"bibr13-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1002\/acs.714"},{"key":"bibr14-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1177\/0959651811426062"},{"first-page":"3011","volume-title":"American control conference","author":"Baggen M","key":"bibr15-0959651813506897"},{"key":"bibr16-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2010.01.006"},{"key":"bibr17-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1016\/j.conengprac.2011.07.016"},{"first-page":"2473","volume-title":"American control conference","author":"Bruijnen D","key":"bibr18-0959651813506897"},{"key":"bibr19-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1016\/S0959-1524(01)00018-X"},{"key":"bibr20-0959651813506897","doi-asserted-by":"publisher","DOI":"10.1137\/1.9781611971323"},{"first-page":"505","volume-title":"Proceedings of the 2004 American control conference","author":"Schneiders M","key":"bibr21-0959651813506897"},{"key":"bibr22-0959651813506897","unstructured":"Kim W. High-precision planar magnetic levitation. PhD Thesis, Massachusetts Institute of Technology, Cambridge, MA, 1997."},{"key":"bibr23-0959651813506897","unstructured":"Jabben L. Mechatronic design of a magnetically suspended rotating platform. PhD Thesis, Delft University of Technology, Delft, 2007."}],"container-title":["Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/journals.sagepub.com\/doi\/pdf\/10.1177\/0959651813506897","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/journals.sagepub.com\/doi\/full-xml\/10.1177\/0959651813506897","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/journals.sagepub.com\/doi\/pdf\/10.1177\/0959651813506897","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,3,2]],"date-time":"2025-03-02T10:56:08Z","timestamp":1740912968000},"score":1,"resource":{"primary":{"URL":"https:\/\/journals.sagepub.com\/doi\/10.1177\/0959651813506897"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,11,20]]},"references-count":23,"journal-issue":{"issue":"2","published-print":{"date-parts":[[2014,2]]}},"alternative-id":["10.1177\/0959651813506897"],"URL":"https:\/\/doi.org\/10.1177\/0959651813506897","relation":{},"ISSN":["0959-6518","2041-3041"],"issn-type":[{"type":"print","value":"0959-6518"},{"type":"electronic","value":"2041-3041"}],"subject":[],"published":{"date-parts":[[2013,11,20]]}}}