{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,9]],"date-time":"2026-10-09T15:36:17Z","timestamp":1791560177907,"version":"4.3.4"},"reference-count":32,"publisher":"Springer Science and Business Media LLC","issue":"1","content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Nanoscale Res Lett"],"published-print":{"date-parts":[[2013,12]]},"abstract":"<jats:title>Abstract<\/jats:title>\n          <jats:p>Nanoscale functional structures are indispensable elements in many fields of modern science. In this paper, nanopillar array with a pillar diameter far smaller than Abbe's diffraction limit is realized by a new kind of continuous wave (CW) laser direct lithography technology. With atomic force microscopy technology, the average diameter of nanopillars on thin OIR906 photoresist film is about 65 nm and the smallest diameter is 48 nm, which is about 1\/11 of the incident laser wavelength. Also, the influences of coma and astigmatism effects to the shape and size of nanopillar are numerically simulated by utilizing vector integral. As far as we know, it is the first time that nanopillar array is implemented by a donut-shaped 532-nm visible CW laser. The study presents a new, simple, inexpensive, and effective approach for nanopillar\/pore array fabrication.<\/jats:p>","DOI":"10.1186\/1556-276x-8-280","type":"journal-article","created":{"date-parts":[[2013,6,11]],"date-time":"2013-06-11T00:14:56Z","timestamp":1370909696000},"update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Nanopillar array with a \u03bb\/11 diameter fabricated by a kind of visible CW laser direct lithography system"],"prefix":"10.1186","volume":"8","author":[{"given":"Chen","family":"Zhang","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kaige","family":"Wang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jintao","family":"Bai","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shuang","family":"Wang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wei","family":"Zhao","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Fang","family":"Yang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Changzhi","family":"Gu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Guiren","family":"Wang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"297","published-online":{"date-parts":[[2013,6,11]]},"reference":[{"key":"1529_CR1","doi-asserted-by":"publisher","first-page":"9357","DOI":"10.1364\/OE.15.009357","volume":"15","author":"HJ Chang","year":"2007","unstructured":"Chang HJ, Hsieh YP, Chen TT, Chen YF, Liang CT, Lin TY, Tseng SC, Chen LC: Strong luminescence from strain relaxed InGaN\/GaN nanotips for highly efficient light emitters. Opt Express 2007, 15: 9357\u20139365. 10.1364\/OE.15.009357","journal-title":"Opt Express"},{"key":"1529_CR2","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1016\/j.mser.2010.04.001","volume":"69","author":"S Chattopadhyay","year":"2010","unstructured":"Chattopadhyay S, Huang YF, Jen YJ, Ganguly A, Chen KH, Chen LC: Anti-reflecting and photonic nanostructures. Mater. Sci. Eng. R 2010, 69: 1\u201335. 10.1016\/j.mser.2010.04.001","journal-title":"Mater. Sci. Eng. R"},{"key":"1529_CR3","doi-asserted-by":"publisher","first-page":"2413","DOI":"10.1016\/j.bios.2010.10.022","volume":"26","author":"HC Lo","year":"2011","unstructured":"Lo HC, Hsiung HI, Chattopadhyay S, Han HC, Chen CF, Leu JP, Chen KH, Chen LC: Label free sub-picomole level DNA detection with Ag nanoparticle decorated Au nanotip arrays as surface enhanced Raman spectroscopy platform. Biosen. Bioelectron. 2011, 26: 2413\u20132418. 10.1016\/j.bios.2010.10.022","journal-title":"Biosen. Bioelectron"},{"key":"1529_CR4","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1016\/j.jbbm.2005.02.001","volume":"63","author":"YQ Miao","year":"2005","unstructured":"Miao YQ, Chen JR, Fang KM: New technology for the detection of pH. Journal of Biochem. Biophys. Meth. 2005, 63: 1\u20139. 10.1016\/j.jbbm.2005.02.001","journal-title":"Journal of Biochem. Biophys. Meth"},{"key":"1529_CR5","doi-asserted-by":"publisher","first-page":"40","DOI":"10.1364\/OL.35.000040","volume":"35","author":"F Wang","year":"2010","unstructured":"Wang F, Yu HY, Li JS, Sun XW, Wang XC, Zheng HY: Optical absorption enhancement in nanopore textured-silicon thin film for photovoltaic application. Opt Lett 2010, 35: 40\u201342. 10.1364\/OL.35.000040","journal-title":"Opt Lett"},{"key":"1529_CR6","doi-asserted-by":"publisher","first-page":"3","DOI":"10.1007\/s10404-007-0199-7","volume":"4","author":"H Schmidt","year":"2008","unstructured":"Schmidt H, Hawkins A: Optofluidic waveguides: I. Concepts and implementations. Microfluidics and Nanofluidics 2008, 4: 3\u201316. 10.1007\/s10404-007-0199-7","journal-title":"Microfluidics and Nanofluidics"},{"key":"1529_CR7","doi-asserted-by":"publisher","first-page":"156","DOI":"10.1016\/j.seppur.2005.07.013","volume":"47","author":"AT Bosch","year":"2006","unstructured":"Bosch AT: A model for nanopore gas permeation. Separ. Purif. Technol. 2006, 47: 156\u2013161. 10.1016\/j.seppur.2005.07.013","journal-title":"Separ. Purif. Technol"},{"key":"1529_CR8","doi-asserted-by":"publisher","first-page":"209","DOI":"10.1038\/nnano.2007.27","volume":"2","author":"C Dekker","year":"2007","unstructured":"Dekker C: Solid-state nanopores. Nat Nano 2007, 2: 209\u2013215. 10.1038\/nnano.2007.27","journal-title":"Nat Nano"},{"key":"1529_CR9","doi-asserted-by":"publisher","first-page":"1059","DOI":"10.1021\/nl049615a","volume":"4","author":"HM Kim","year":"2004","unstructured":"Kim HM, Cho YH, Lee H, Kim SI, Ryu SR, Kim DY, Kang TW, Chung KS: High-brightness light emitting diodes using dislocation-free indium gallium nitride\/gallium nitride multiquantum-well nanorod arrays. Nano Lett. 2004, 4: 1059\u20131062. 10.1021\/nl049615a","journal-title":"Nano Lett"},{"key":"1529_CR10","doi-asserted-by":"publisher","first-page":"567","DOI":"10.1002\/adma.200304554","volume":"15","author":"HM Kim","year":"2003","unstructured":"Kim HM, Kang TW, Chung KS: Nanoscale ultraviolet-light-emitting diodes using wide-bandgap gallium nitride nanorods. Adv Mater 2003, 15: 567\u2013569. 10.1002\/adma.200304554","journal-title":"Adv Mater"},{"key":"1529_CR11","doi-asserted-by":"publisher","first-page":"L1524","DOI":"10.1143\/JJAP.43.L1524","volume":"43","author":"A Kikuchi","year":"2004","unstructured":"Kikuchi A, Kawai M, Tada M, Kishiono K: InGaN\/GaN multiple quantum disk nanocolumn light-emitting diodes grown on (111) Si substrate. Jpn. J. Appl. Phys. 2004, 43: L1524-L1526. 10.1143\/JJAP.43.L1524","journal-title":"Jpn. J. Appl. Phys"},{"key":"1529_CR12","doi-asserted-by":"publisher","first-page":"850","DOI":"10.1016\/j.mee.2009.01.059","volume":"86","author":"HB Xu","year":"2009","unstructured":"Xu HB, Lu N, Qi DP, Gao LG, Hao JY, Wang YD, Chi LF: Broadband antireflective Si nanopillar arrays produced by nanosphere lithography. Microelectronic Engineering Journal 2009, 86: 850\u2013852. 10.1016\/j.mee.2009.01.059","journal-title":"Microelectronic Engineering Journal"},{"key":"1529_CR13","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1016\/j.photonics.2012.06.009","volume":"11","author":"Z Szab\u00f3","year":"2013","unstructured":"Szab\u00f3 Z, Volk J, F\u00fcl\u00f6p E, De\u00e1k A, B\u00e1rsony I: Regular ZnO nanopillar arrays by nanosphere photolithography. Photonics and Nanostructures Fundamentals and Appl 2013, 11: 1\u20137. 10.1016\/j.photonics.2012.06.009","journal-title":"Photonics and Nanostructures Fundamentals and Appl"},{"key":"1529_CR14","doi-asserted-by":"publisher","first-page":"443","DOI":"10.1109\/SCED.2005.1504477","volume-title":"Spanish Conference on Electron Devices, February 2\u20134 2005; Tarragona","author":"G Villanueva","year":"2005","unstructured":"Villanueva G, Plaza JA, Sanchez-Amores A, Bausells J, Martinez E, Samitier J, Errachid A: FIB and DRIE combination for nanotip fabrication. In Spanish Conference on Electron Devices, February 2\u20134 2005; Tarragona. Piscataway: IEEE; 2005:443\u2013446."},{"key":"1529_CR15","first-page":"628","volume-title":"7th IEEE Conference on Nanotechnology (IEEE-NANO 2007), August2-5 2007; Hong Kong","author":"SL Yue","year":"2007","unstructured":"Yue SL, Gu CZ: Nanopores fabricated by focused ion beam milling technology. In 7th IEEE Conference on Nanotechnology (IEEE-NANO 2007), August2\u20135 2007; Hong Kong. Piscataway: IEEE; 2007:628\u2013631."},{"key":"1529_CR16","first-page":"263","volume-title":"3th IEEE Conference on Nanotechnology (IEEE-NANO 2003), August 12\u201314 2003; San Francisco","author":"HK Jae","year":"2003","unstructured":"Jae HK, Jung YK, Byung IC: Multi-scale analysis and design of nano imprint process. In 3th IEEE Conference on Nanotechnology (IEEE-NANO 2003), August 12\u201314 2003; San Francisco. Piscataway: IEEE; 2003:263\u2013266."},{"key":"1529_CR17","doi-asserted-by":"publisher","first-page":"344012","DOI":"10.1088\/0957-4484\/23\/34\/344012","volume":"23","author":"D Lee","year":"2012","unstructured":"Lee D, Pan H, Sherry A, Ko SH, Lee MT, Kim E, Grigoropoulos CP: Large-area nanoimprinting on various substrates by reconfigurable maskless laser direct writing. Nanotechnology 2012, 23: 344012. 10.1088\/0957-4484\/23\/34\/344012","journal-title":"Nanotechnology"},{"key":"1529_CR18","doi-asserted-by":"publisher","first-page":"3426","DOI":"10.1364\/OE.15.003426","volume":"15","author":"W Haske","year":"2007","unstructured":"Haske W, Chen VW, Hales JM, Dong WT, Barlow S, Marder SR, Perry JW: 65nm feature sizes using visible wavelength 3-D multiphoton lithography. Opt Express 2007, 15: 3426\u20133436. 10.1364\/OE.15.003426","journal-title":"Opt Express"},{"key":"1529_CR19","doi-asserted-by":"publisher","first-page":"746","DOI":"10.1039\/c2lc21015k","volume":"12","author":"Y Liao","year":"2012","unstructured":"Liao Y, Song JX, Li E, Luo Y, Shen YL, Chen DP, Cheng Y, Xu ZZ, Sugioka K, Midorikawa K: Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing. Lab Chip 2012, 12: 746\u2013749. 10.1039\/c2lc21015k","journal-title":"Lab Chip"},{"key":"1529_CR20","doi-asserted-by":"publisher","first-page":"285306","DOI":"10.1088\/0957-4484\/22\/28\/285306","volume":"22","author":"K Du","year":"2011","unstructured":"Du K, Wathuthanthri I, Mao W, Xu W, Choi C-H: Large-area pattern transfer of metallic nanostructures on glass substrates via interference lithography. Nanotechnology 2011, 22: 285306. 10.1088\/0957-4484\/22\/28\/285306","journal-title":"Nanotechnology"},{"key":"1529_CR21","doi-asserted-by":"publisher","first-page":"5505","DOI":"10.1021\/am301423s","volume":"4","author":"K Du","year":"2012","unstructured":"Du K, Wathuthanthri I, Liu Y, Xu W, Choi C-H: Wafer-Scale pattern transfer of metal nanostructures on polydimethylsiloxane (PDMS) substrates via holographic nanopatterns. Appl. Mater. Interfaces 2012, 4: 5505\u20135514. 10.1021\/am301423s","journal-title":"Appl. Mater. Interfaces"},{"key":"1529_CR22","doi-asserted-by":"publisher","first-page":"06FF04","DOI":"10.1116\/1.4757110","volume":"30","author":"K Du","year":"2012","unstructured":"Du K, Liu Y, Wathuthanthri I, Choi C-H: Dual applications of free-standing holographic nanopatterns for lift-off and stencil lithography. J. Vac. Sci. B 2012, 30: 06FF04. 10.1116\/1.4757110","journal-title":"J. Vac. Sci. B"},{"key":"1529_CR23","doi-asserted-by":"publisher","first-page":"608","DOI":"10.1002\/adfm.201201814","volume":"23","author":"I Wathuthanthri","year":"2013","unstructured":"Wathuthanthri I, Liu Y, Du K, Xu W, Choi C-H: Simple holographic patterning for high-aspect-ratio three-dimensional nanostructures with large coverage area. Adv Funct Mater 2013, 23: 608\u2013618. 10.1002\/adfm.201201814","journal-title":"Adv Funct Mater"},{"key":"1529_CR24","doi-asserted-by":"publisher","first-page":"913","DOI":"10.1126\/science.1167610","volume":"324","author":"TF Scott","year":"2009","unstructured":"Scott TF, Kowalski BA, Sullivan AC, Bowman CN, McLeod RR: Two-color single-photon photoinitiation and photoinhibition for subdiffraction photolithography. Science 2009, 324: 913\u2013917. 10.1126\/science.1167610","journal-title":"Science"},{"key":"1529_CR25","doi-asserted-by":"publisher","first-page":"910","DOI":"10.1126\/science.1168996","volume":"324","author":"LJ Li","year":"2009","unstructured":"Li LJ, Gattass RR, Gershgoren E, Hwang H, Fourkas JT: Achieving \u03bb\/20 resolution by one-color initiation and deactivation of polymerization. Science 2009, 324: 910\u2013913. 10.1126\/science.1168996","journal-title":"Science"},{"key":"1529_CR26","doi-asserted-by":"publisher","first-page":"19486","DOI":"10.1364\/OE.19.019486","volume":"19","author":"YY Cao","year":"2011","unstructured":"Cao YY, Gan ZS, Jia BH, Evans RA, Gu M: High-photosensitive resin for super-resolution direct-laser-writing based on photoinhibited polymerization. Opt Express 2011, 19: 19486\u201319494. 10.1364\/OE.19.019486","journal-title":"Opt Express"},{"key":"1529_CR27","doi-asserted-by":"publisher","first-page":"917","DOI":"10.1126\/science.1167704","volume":"324","author":"TL Andrew","year":"2009","unstructured":"Andrew TL, Tsai HY, Menon R: Confining light to deep subwavelength dimensions to enable optical nanopatterning. Science 2009, 324: 917\u2013921. 10.1126\/science.1167704","journal-title":"Science"},{"key":"1529_CR28","doi-asserted-by":"publisher","first-page":"312","DOI":"10.1063\/1.1432450","volume":"80","author":"T Tanaka","year":"2002","unstructured":"Tanaka T, Sun HB, Kawata S: Rapid sub-diffraction-limit laser micro\/nanoprocessing in a threshold material system. Appl Phys Lett 2002, 80: 312\u2013314. 10.1063\/1.1432450","journal-title":"Appl Phys Lett"},{"key":"1529_CR29","doi-asserted-by":"publisher","first-page":"221102","DOI":"10.1063\/1.3521464","volume":"97","author":"M Thiel","year":"2010","unstructured":"Thiel M, Fischer J, Freymann G, Wegener M: Direct laser writing of three-dimensional submicron structures using a continuous-wave laser at 532nm. Appl Phys Lett 2010, 97: 221102. 10.1063\/1.3521464","journal-title":"Appl Phys Lett"},{"key":"1529_CR30","first-page":"971","volume":"15","author":"FJ Qi","year":"2007","unstructured":"Qi FJ, Li Y, Tan DF, Yang H, Gong QH: Polymerized nanotips via two-photon photopolymerization. Opt. Soc. Am. 2007, 15: 971\u2013976.","journal-title":"Opt. Soc. Am"},{"key":"1529_CR31","doi-asserted-by":"publisher","first-page":"1153","DOI":"10.1126\/science.1137395","volume":"316","author":"SW Hell","year":"2007","unstructured":"Hell SW: Far-field optical nanoscopy. Science 2007, 316: 1153\u20131158. 10.1126\/science.1137395","journal-title":"Science"},{"key":"1529_CR32","doi-asserted-by":"publisher","first-page":"1307","DOI":"10.1364\/JOSAA.25.001307","volume":"25","author":"R Kant","year":"2008","unstructured":"Kant R: Effect of primary spherical aberration on high-numerical aperture focusing of a Laguerre-Gaussian beam. J. Opt. Soc. Am. A 2008, 25: 1307\u20131318. 10.1364\/JOSAA.25.001307","journal-title":"J. Opt. Soc. Am. A"}],"container-title":["Nanoscale Research Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1186\/1556-276X-8-280.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,3,20]],"date-time":"2023-03-20T04:37:17Z","timestamp":1679287037000},"score":1,"resource":{"primary":{"URL":"https:\/\/link.springer.com\/10.1186\/1556-276X-8-280"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,6,11]]},"references-count":32,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2013,12]]}},"alternative-id":["1529"],"URL":"https:\/\/doi.org\/10.1186\/1556-276x-8-280","relation":{},"ISSN":["1556-276X"],"issn-type":[{"value":"1556-276X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,6,11]]},"assertion":[{"value":"12 April 2013","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"1 June 2013","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"11 June 2013","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}}],"article-number":"280"}}