{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,2]],"date-time":"2025-10-02T16:32:01Z","timestamp":1759422721783},"reference-count":10,"publisher":"Optica Publishing Group","issue":"1","license":[{"start":{"date-parts":[[2001,1,1]],"date-time":"2001-01-01T00:00:00Z","timestamp":978307200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v1#VOR"},{"start":{"date-parts":[[2001,1,1]],"date-time":"2001-01-01T00:00:00Z","timestamp":978307200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Appl. Opt."],"published-print":{"date-parts":[[2001,1,1]]},"DOI":"10.1364\/ao.40.000062","type":"journal-article","created":{"date-parts":[[2007,8,16]],"date-time":"2007-08-16T16:48:39Z","timestamp":1187282919000},"page":"62","source":"Crossref","is-referenced-by-count":7,"title":["Recovery of multilayer-coated Zerodur and ULE optics for extreme-ultraviolet lithography by recoating, reactive-ion etching, and wet-chemical processes"],"prefix":"10.1364","volume":"40","author":[{"given":"Paul B.","family":"Mirkarimi","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sherry L.","family":"Baker","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Claude","family":"Montcalm","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"James A.","family":"Folta","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"285","published-online":{"date-parts":[[2001,1,1]]},"reference":[{"key":"ao-40-1-62-R1","doi-asserted-by":"crossref","first-page":"694","DOI":"10.1109\/3.760315","volume":"35","author":"Stulen","year":"1999","journal-title":"IEEE J. Quantum Electron."},{"key":"ao-40-1-62-R2","doi-asserted-by":"crossref","first-page":"3142","DOI":"10.1116\/1.590453","volume":"16","author":"Gwyn","year":"1998","journal-title":"J. Vac. Sci. Technol. B"},{"key":"ao-40-1-62-R3","doi-asserted-by":"crossref","first-page":"107","DOI":"10.1063\/1.354140","volume":"74","author":"Spiller","year":"1993","journal-title":"J. Appl. Phys."},{"key":"ao-40-1-62-R4","doi-asserted-by":"crossref","first-page":"6952","DOI":"10.1364\/AO.32.006952","volume":"32","author":"Stearns","year":"1993","journal-title":"Appl. Opt."},{"key":"ao-40-1-62-R5","doi-asserted-by":"crossref","first-page":"2025","DOI":"10.1364\/AO.33.002025","volume":"33","author":"Windt","year":"1994","journal-title":"Appl. Opt."},{"key":"ao-40-1-62-R6","doi-asserted-by":"crossref","first-page":"1003","DOI":"10.1063\/1.368098","volume":"84","author":"Stearns","year":"1998","journal-title":"J. Appl. Phys."},{"key":"ao-40-1-62-R7","doi-asserted-by":"crossref","first-page":"1617","DOI":"10.1364\/AO.39.001617","volume":"39","author":"Mirkarimi","year":"2000","journal-title":"Appl. Opt."},{"key":"ao-40-1-62-R8","doi-asserted-by":"crossref","first-page":"2926","DOI":"10.1116\/1.586562","volume":"11","author":"Early","year":"1993","journal-title":"J. Vac. Sci. Technol. B"},{"key":"ao-40-1-62-R9","doi-asserted-by":"crossref","first-page":"1246","DOI":"10.1117\/1.602170","volume":"38","author":"Mirkarimi","year":"1999","journal-title":"Opt. Eng."},{"key":"ao-40-1-62-R10","doi-asserted-by":"crossref","first-page":"2662","DOI":"10.1116\/1.577221","volume":"9","author":"Stearns","year":"1991","journal-title":"J. Vac. Sci. Technol. A"}],"container-title":["Applied Optics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.osapublishing.org\/viewmedia.cfm?URI=ao-40-1-62&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,7,18]],"date-time":"2024-07-18T20:34:12Z","timestamp":1721334852000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=ao-40-1-62"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2001,1,1]]},"references-count":10,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2001]]},"published-print":{"date-parts":[[2001]]}},"URL":"https:\/\/doi.org\/10.1364\/ao.40.000062","relation":{},"ISSN":["0003-6935","1539-4522"],"issn-type":[{"value":"0003-6935","type":"print"},{"value":"1539-4522","type":"electronic"}],"subject":[],"published":{"date-parts":[[2001,1,1]]}}}