{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,30]],"date-time":"2026-07-30T18:53:36Z","timestamp":1785437616780,"version":"3.56.0"},"reference-count":22,"publisher":"Optica Publishing Group","issue":"36","license":[{"start":{"date-parts":[[2023,12,11]],"date-time":"2023-12-11T00:00:00Z","timestamp":1702252800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR"},{"start":{"date-parts":[[2023,12,11]],"date-time":"2023-12-11T00:00:00Z","timestamp":1702252800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61804069"],"award-info":[{"award-number":["61804069"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Appl. Opt."],"published-print":{"date-parts":[[2023,12,20]]},"abstract":"<jats:p>The thermal process of a (001) silicon wafer subjected to a continuous-wave (CW) laser and 100\u201310000\u00a0Hz pulsed laser irradiation is investigated experimentally and numerically. The temperature evolution of the spot center is measured using an infrared radiation pyrometer. The waveforms of the temperature evolution curves provide valuable information about melting, solidification, vaporization, and fracture. To gain a better understanding of the thermal process, a three-dimensional finite element model is established, and numerical simulations are conducted to analyze the temperature, stress, and dislocation field. The results show that the 10\u00a0kHz laser exhibits the highest heating efficiency before vaporization, but the lowest ablation efficiency after vaporization due to the shielding effect of vapor. The diffusion time of vapor is found to be more than 50\u00a0\u00b5s. Fracture occurs during 1\u00a0kHz laser irradiation. The motion of liquid may play a significant role, but it cannot be evidenced by a simulation due to complex dependence of material parameters on dislocation. This issue should be addressed as a priority in future studies.<\/jats:p>","DOI":"10.1364\/ao.501947","type":"journal-article","created":{"date-parts":[[2023,11,29]],"date-time":"2023-11-29T12:00:25Z","timestamp":1701259225000},"page":"9577","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Thermal process of a silicon wafer under a CW laser and 100\u201310000\u2009\u2009Hz pulsed laser irradiation"],"prefix":"10.1364","volume":"62","author":[{"given":"Zhichao","family":"Jia","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05em1gq62","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Nanjing Key Laboratory of Optometric Materials and Technology"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Luanhong","family":"Sun","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05em1gq62","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Nanjing Key Laboratory of Optometric Materials and Technology"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiang","family":"Chen","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05em1gq62","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Nanjing Key Laboratory of Optometric Materials and Technology"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xinhua","family":"Li","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05em1gq62","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Nanjing Key Laboratory of Optometric Materials and Technology"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zewen","family":"Li","sequence":"additional","affiliation":[{"name":"Nanjing University of Science & Technology"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lingyun","family":"Hao","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05em1gq62","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Nanjing Key Laboratory of Optometric Materials and Technology"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2023,12,11]]},"reference":[{"key":"ao-62-36-9577-R1","doi-asserted-by":"publisher","first-page":"6770","DOI":"10.1364\/AO.459788","volume":"61","author":"Panda","year":"2022","journal-title":"Appl. Opt."},{"key":"ao-62-36-9577-R2","doi-asserted-by":"publisher","first-page":"40756","DOI":"10.1364\/OE.475169","volume":"30","author":"Yang","year":"2022","journal-title":"Opt. Express"},{"key":"ao-62-36-9577-R3","doi-asserted-by":"publisher","first-page":"2473","DOI":"10.1364\/AO.450317","volume":"61","author":"Th\u00e9berge","year":"2022","journal-title":"Appl. Opt."},{"key":"ao-62-36-9577-R4","doi-asserted-by":"publisher","first-page":"067106","DOI":"10.1117\/1.OE.61.6.067106","volume":"61","author":"Yang","year":"2022","journal-title":"Opt. Eng."},{"key":"ao-62-36-9577-R5","doi-asserted-by":"publisher","first-page":"033103","DOI":"10.1063\/1.3466996","volume":"108","author":"Wang","year":"2010","journal-title":"J. Appl. Phys."},{"key":"ao-62-36-9577-R6","doi-asserted-by":"publisher","first-page":"1583","DOI":"10.1016\/j.apsusc.2010.08.098","volume":"257","author":"Wang","year":"2010","journal-title":"Appl. Surf. Sci."},{"key":"ao-62-36-9577-R7","doi-asserted-by":"publisher","first-page":"011404","DOI":"10.3788\/COL201816.011404","volume":"16","author":"Jia","year":"2018","journal-title":"Chin. Opt. Lett."},{"key":"ao-62-36-9577-R8","doi-asserted-by":"publisher","first-page":"101011","DOI":"10.1016\/j.surfin.2021.101011","volume":"23","author":"Zhou","year":"2021","journal-title":"Surf. Interfaces"},{"key":"ao-62-36-9577-R9","doi-asserted-by":"publisher","first-page":"62","DOI":"10.1016\/j.optlastec.2010.05.005","volume":"43","author":"Wee","year":"2011","journal-title":"Opt. Laser Technol."},{"key":"ao-62-36-9577-R10","doi-asserted-by":"publisher","first-page":"715","DOI":"10.4028\/www.scientific.net\/KEM.447-448.715","volume":"447448","author":"Farrokhi","year":"2010","journal-title":"Key Eng. Mater."},{"key":"ao-62-36-9577-R11","doi-asserted-by":"publisher","first-page":"2886","DOI":"10.1016\/j.apsusc.2010.10.086","volume":"257","author":"Zhou","year":"2011","journal-title":"Appl. Surf. Sci."},{"key":"ao-62-36-9577-R12","doi-asserted-by":"publisher","first-page":"15468","DOI":"10.1364\/OE.24.015468","volume":"24","author":"Sobierajski","year":"2016","journal-title":"Opt. Express"},{"key":"ao-62-36-9577-R13","doi-asserted-by":"publisher","first-page":"1593","DOI":"10.1023\/A:1012869710173","volume":"22","author":"Ravindra","year":"2001","journal-title":"Int. J. Thermophys."},{"key":"ao-62-36-9577-R14","doi-asserted-by":"publisher","first-page":"6803","DOI":"10.1364\/AO.387936","volume":"59","author":"Sha","year":"2020","journal-title":"Appl. Opt."},{"key":"ao-62-36-9577-R15","doi-asserted-by":"publisher","first-page":"2661","DOI":"10.1021\/cg400428z","volume":"13","author":"Gao","year":"2013","journal-title":"Cryst. Growth Des."},{"key":"ao-62-36-9577-R16","doi-asserted-by":"publisher","first-page":"13","DOI":"10.1016\/j.jcrysgro.2013.09.002","volume":"384","author":"Gao","year":"2013","journal-title":"J. Cryst. Growth"},{"key":"ao-62-36-9577-R17","doi-asserted-by":"publisher","first-page":"033104","DOI":"10.1063\/1.4815872","volume":"114","author":"Li","year":"2013","journal-title":"J. Appl. Phys."},{"key":"ao-62-36-9577-R18","doi-asserted-by":"publisher","first-page":"4900","DOI":"10.1364\/AO.56.004900","volume":"56","author":"Jia","year":"2017","journal-title":"Appl. Opt."},{"key":"ao-62-36-9577-R19","doi-asserted-by":"publisher","first-page":"4278","DOI":"10.1364\/OL.39.004278","volume":"39","author":"Choi","year":"2014","journal-title":"Opt. Lett."},{"key":"ao-62-36-9577-R20","doi-asserted-by":"publisher","first-page":"429","DOI":"10.1016\/j.ijheatmasstransfer.2014.02.037","volume":"73","author":"Zhang","year":"2014","journal-title":"Int. J. Heat Mass Transfer"},{"key":"ao-62-36-9577-R21","doi-asserted-by":"publisher","first-page":"097101","DOI":"10.1117\/1.OE.60.9.097101","volume":"60","author":"Jia","year":"2021","journal-title":"Opt. Eng."},{"key":"ao-62-36-9577-R22","doi-asserted-by":"publisher","first-page":"021303","DOI":"10.1063\/1.4919540","volume":"2","author":"DelRio","year":"2015","journal-title":"Appl. Phys. Rev."}],"container-title":["Applied Optics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ao-62-36-9577&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,6]],"date-time":"2024-08-06T15:32:14Z","timestamp":1722958334000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=ao-62-36-9577"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,12,11]]},"references-count":22,"journal-issue":{"issue":"36","published-online":{"date-parts":[[2023]]},"published-print":{"date-parts":[[2023]]}},"URL":"https:\/\/doi.org\/10.1364\/ao.501947","relation":{},"ISSN":["1559-128X","2155-3165"],"issn-type":[{"value":"1559-128X","type":"print"},{"value":"2155-3165","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,12,11]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/AO.501947","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"research-article","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"28 July 2023","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"27 November 2023","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"11 December 2023","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2023 Optica Publishing Group","name":"copyright","label":"Copyright"}]}}