{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,13]],"date-time":"2026-05-13T15:12:59Z","timestamp":1778685179756,"version":"3.51.4"},"reference-count":47,"publisher":"Optica Publishing Group","issue":"12","license":[{"start":{"date-parts":[[2026,4,17]],"date-time":"2026-04-17T00:00:00Z","timestamp":1776384000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR"},{"start":{"date-parts":[[2026,4,17]],"date-time":"2026-04-17T00:00:00Z","timestamp":1776384000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"name":"Shaanxi Province Innovation Talent Promotion Program-Science and Technology Innovation Team","award":["2023-CX-TD-03"],"award-info":[{"award-number":["2023-CX-TD-03"]}]},{"DOI":"10.13039\/501100004480","name":"Natural Science Foundation of Shanxi Province","doi-asserted-by":"publisher","award":["2023-JC-YB-587"],"award-info":[{"award-number":["2023-JC-YB-587"]}],"id":[{"id":"10.13039\/501100004480","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Appl. Opt."],"published-print":{"date-parts":[[2026,4,20]]},"abstract":"<jats:p>\n                    Light detection and ranging (LiDAR) systems that rely on wavelength tuning typically employ gratings to realize wavelength-dependent beam steering. In this work, we propose a subwavelength grating (SWG) antenna incorporating shallow-etched auxiliary blocks. These auxiliary blocks break the vertical structural symmetry of the antenna, thereby effectively suppressing downward optical power leakage into the substrate. The geometric parameters are optimized using a particle swarm optimization (PSO) algorithm, resulting in a transmission of 66.2%, a scanning rate of \u22120.233\n                    <jats:sup>\u2218<\/jats:sup>\n                    \/nm, and transmission fluctuations confined within 6.42%. The system uses a coarse wavelength-division multiplexing (CWDM) laser array as the light source and supports bidirectional waveguide propagation, achieving a 28\u00b0 scanning field of view (FOV) over a 60\u00a0nm wavelength range.\n                  <\/jats:p>","DOI":"10.1364\/ao.592178","type":"journal-article","created":{"date-parts":[[2026,4,1]],"date-time":"2026-04-01T15:00:31Z","timestamp":1775055631000},"page":"4143","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["High-performance integrated silicon LiDAR enabled by combined shallow and full etching"],"prefix":"10.1364","volume":"65","author":[{"given":"Qi","family":"Yun","sequence":"first","affiliation":[{"name":"Xi\u2019an Jiaotong University"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chengkun","family":"Yang","sequence":"additional","affiliation":[{"name":"ZhangJiang Laboratory"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiang","family":"Wang","sequence":"additional","affiliation":[{"name":"Angle AI (Tianjin) Technology co. LTD"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhongqi","family":"Pan","sequence":"additional","affiliation":[{"name":"University of Louisiana at Lafayette"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8945-330X","authenticated-orcid":true,"given":"Yang","family":"Yue","sequence":"additional","affiliation":[{"name":"Xi\u2019an Jiaotong University"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"285","published-online":{"date-parts":[[2026,4,17]]},"reference":[{"key":"ao-65-12-4143-R1","doi-asserted-by":"publisher","first-page":"6729","DOI":"10.1364\/AO.396057","type":"journal-article","volume":"59","author":"Mei","year":"2020","journal-title":"Appl. Opt."},{"key":"ao-65-12-4143-R2","doi-asserted-by":"publisher","first-page":"4225","DOI":"10.3390\/app9204225","type":"journal-article","volume":"9","author":"Sun","year":"2019","journal-title":"Appl. Sci."},{"key":"ao-65-12-4143-R3","doi-asserted-by":"publisher","first-page":"7064","DOI":"10.1109\/TVT.2020.2989148","type":"journal-article","volume":"69","author":"Wallace","year":"2020","journal-title":"IEEE Trans. Veh. Technol."},{"key":"ao-65-12-4143-R4","doi-asserted-by":"publisher","first-page":"68","DOI":"10.1016\/j.trc.2019.01.007","type":"journal-article","volume":"100","author":"Zhao","year":"2019","journal-title":"Transp. Res. Part C"},{"key":"ao-65-12-4143-R5","doi-asserted-by":"publisher","first-page":"44","DOI":"10.1109\/TMTT.1975.1128504","type":"journal-article","volume":"23","author":"Evtuhov","year":"1975","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ao-65-12-4143-R6","doi-asserted-by":"publisher","first-page":"083001","DOI":"10.1088\/0268-1242\/29\/8\/083001","type":"journal-article","volume":"29","author":"Smit","year":"2014","journal-title":"Semicond. Sci. Technol."},{"key":"ao-65-12-4143-R7","doi-asserted-by":"publisher","first-page":"4402","DOI":"10.1109\/JLT.2021.3070386","type":"journal-article","volume":"39","author":"Im","year":"2021","journal-title":"J. Lightwave Technol."},{"key":"ao-65-12-4143-R8","doi-asserted-by":"publisher","first-page":"16547","DOI":"10.1364\/OE.418003","type":"journal-article","volume":"29","author":"Li","year":"2021","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R9","doi-asserted-by":"publisher","first-page":"253","DOI":"10.1038\/s41586-022-04415-8","type":"journal-article","volume":"603","author":"Zhang","year":"2022","journal-title":"Nature"},{"key":"ao-65-12-4143-R10","doi-asserted-by":"publisher","first-page":"32266","DOI":"10.1364\/OE.402193","type":"journal-article","volume":"28","author":"Javidi","year":"2020","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R11","doi-asserted-by":"publisher","first-page":"7627","DOI":"10.1364\/OE.27.007627","type":"journal-article","volume":"27","author":"Shi","year":"2019","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R12","doi-asserted-by":"publisher","first-page":"887","DOI":"10.1364\/OPTICA.3.000887","type":"journal-article","volume":"3","author":"Hutchison","year":"2016","journal-title":"Optica"},{"key":"ao-65-12-4143-R13","doi-asserted-by":"publisher","first-page":"8201326","DOI":"10.1109\/JSTQE.2019.2917501","type":"journal-article","volume":"25","author":"Chrostowski","year":"2019","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ao-65-12-4143-R14","doi-asserted-by":"publisher","first-page":"112850G","DOI":"10.1117\/12.2544962","type":"journal-article","volume":"11285","author":"Doylend","year":"2020","journal-title":"Proc. SPIE"},{"key":"ao-65-12-4143-R15","doi-asserted-by":"publisher","first-page":"7700108","DOI":"10.1109\/JSTQE.2019.2908555","type":"journal-article","volume":"25","author":"Poulton","year":"2019","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ao-65-12-4143-R16","doi-asserted-by":"publisher","first-page":"3642","DOI":"10.1364\/OE.27.003642","type":"journal-article","volume":"27","author":"Xie","year":"2019","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R17","doi-asserted-by":"publisher","first-page":"045010","DOI":"10.1088\/2515-7647\/ad6ed4","type":"journal-article","volume":"6","author":"Farheen","year":"2024","journal-title":"J. Phys. Photonics"},{"key":"ao-65-12-4143-R18","doi-asserted-by":"publisher","first-page":"1938","DOI":"10.3390\/nano12111938","type":"journal-article","volume":"12","author":"Liu","year":"2022","journal-title":"Nanomaterials"},{"key":"ao-65-12-4143-R19","doi-asserted-by":"publisher","first-page":"22170","DOI":"10.1364\/OE.493704","type":"journal-article","volume":"31","author":"Suyama","year":"2023","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R20","doi-asserted-by":"publisher","first-page":"919","DOI":"10.1109\/JQE.1973.1077767","type":"journal-article","volume":"9","author":"Yariv","year":"1973","journal-title":"IEEE J. Quantum Electron."},{"key":"ao-65-12-4143-R21","doi-asserted-by":"publisher","first-page":"2765","DOI":"10.1515\/nanoph-2021-0110","type":"journal-article","volume":"10","author":"Luque-Gonz\u00e1lez","year":"2021","journal-title":"Nanophotonics"},{"key":"ao-65-12-4143-R22","doi-asserted-by":"publisher","first-page":"897","DOI":"10.1364\/PRJ.473978","type":"journal-article","volume":"11","author":"Yoon","year":"2023","journal-title":"Photonics Res."},{"key":"ao-65-12-4143-R23","doi-asserted-by":"publisher","first-page":"6600607","DOI":"10.1109\/JPHOT.2021.3059844","type":"journal-article","volume":"13","author":"Li","year":"2021","journal-title":"IEEE Photonics J."},{"key":"ao-65-12-4143-R24","doi-asserted-by":"publisher","first-page":"2072","DOI":"10.1109\/JLT.2021.3133462","type":"journal-article","volume":"40","author":"Wang","year":"2022","journal-title":"J. Lightwave Technol."},{"key":"ao-65-12-4143-R25","doi-asserted-by":"publisher","first-page":"531","DOI":"10.1109\/TNS.2007.896213","type":"journal-article","volume":"54","author":"Manghisoni","year":"2007","journal-title":"IEEE Trans. Nucl. Sci."},{"key":"ao-65-12-4143-R26","doi-asserted-by":"publisher","first-page":"2456","DOI":"10.1109\/TNS.2006.876472","type":"journal-article","volume":"53","author":"Manghisoni","year":"2006","journal-title":"IEEE Trans. Nucl. Sci."},{"key":"ao-65-12-4143-R27","doi-asserted-by":"publisher","first-page":"2528","DOI":"10.1364\/OE.26.002528","type":"journal-article","volume":"26","author":"Zadka","year":"2018","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R28","doi-asserted-by":"publisher","first-page":"3061","DOI":"10.1109\/JSSC.2019.2934601","type":"journal-article","volume":"54","author":"Kim","year":"2019","journal-title":"IEEE J. Solid-State Circuits"},{"key":"ao-65-12-4143-R29","doi-asserted-by":"publisher","first-page":"195","DOI":"10.1038\/nature11727","type":"journal-article","volume":"493","author":"Sun","year":"2013","journal-title":"Nature"},{"key":"ao-65-12-4143-R30","doi-asserted-by":"publisher","first-page":"666","DOI":"10.3390\/mi11070666","type":"journal-article","volume":"11","author":"Cheng","year":"2020","journal-title":"Micromachines"},{"key":"ao-65-12-4143-R31","doi-asserted-by":"publisher","first-page":"72","DOI":"10.1038\/s41377-018-0073-2","type":"journal-article","volume":"7","author":"Kim","year":"2018","journal-title":"Light Sci. Appl."},{"key":"ao-65-12-4143-R32","doi-asserted-by":"publisher","first-page":"075803","DOI":"10.1088\/2040-8986\/ad5361","type":"journal-article","volume":"26","author":"Chen","year":"2024","journal-title":"J. Opt."},{"key":"ao-65-12-4143-R33","doi-asserted-by":"publisher","first-page":"1477","DOI":"10.1364\/OL.34.001477","type":"journal-article","volume":"34","author":"Van Acoleyen","year":"2009","journal-title":"Opt. Lett."},{"key":"ao-65-12-4143-R34","doi-asserted-by":"publisher","first-page":"e1","DOI":"10.1038\/lsa.2012.1","type":"journal-article","volume":"1","author":"Dai","year":"2012","journal-title":"Light Sci. Appl."},{"key":"ao-65-12-4143-R35","doi-asserted-by":"publisher","first-page":"2141","DOI":"10.1016\/j.optcom.2010.12.086","type":"journal-article","volume":"284","author":"Selvaraja","year":"2011","journal-title":"Opt. Commun."},{"key":"ao-65-12-4143-R36","doi-asserted-by":"publisher","first-page":"1622","DOI":"10.1364\/OPEX.12.001622","type":"journal-article","volume":"12","author":"Vlasov","year":"2004","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R37","doi-asserted-by":"publisher","first-page":"153","DOI":"10.1016\/j.chemolab.2015.08.020","type":"journal-article","volume":"149","author":"Marini","year":"2015","journal-title":"Chemom. Intell. Lab. Syst."},{"key":"ao-65-12-4143-R38","doi-asserted-by":"publisher","first-page":"387","DOI":"10.1007\/s00500-016-2474-6","type":"journal-article","volume":"22","author":"Wang","year":"2017","journal-title":"Soft Comput."},{"key":"ao-65-12-4143-R39","doi-asserted-by":"publisher","first-page":"1994","DOI":"10.1364\/JOSAB.493041","type":"journal-article","volume":"40","author":"Wang","year":"2023","journal-title":"J. Opt. Soc. Am. B"},{"key":"ao-65-12-4143-R40","doi-asserted-by":"publisher","first-page":"1043","DOI":"10.1364\/OL.44.001043","type":"journal-article","volume":"44","author":"Cheben","year":"2019","journal-title":"Opt. Lett."},{"key":"ao-65-12-4143-R41","doi-asserted-by":"publisher","first-page":"22122","DOI":"10.1109\/ACCESS.2024.3364077","type":"journal-article","volume":"12","author":"He","year":"2024","journal-title":"IEEE Access"},{"key":"ao-65-12-4143-R42","doi-asserted-by":"publisher","first-page":"3500","DOI":"10.1109\/JLT.2011.2171477","type":"journal-article","volume":"29","author":"Van Acoleyen","year":"2011","journal-title":"J. Lightwave Technol."},{"key":"ao-65-12-4143-R43","doi-asserted-by":"publisher","first-page":"1270","DOI":"10.1109\/LPT.2011.2159785","type":"journal-article","volume":"23","author":"Van Acoleyen","year":"2011","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ao-65-12-4143-R44","doi-asserted-by":"publisher","first-page":"12988","DOI":"10.1038\/s41598-019-49324-5","type":"journal-article","volume":"9","author":"Hong","year":"2019","journal-title":"Sci. Rep."},{"key":"ao-65-12-4143-R45","doi-asserted-by":"publisher","first-page":"21800","DOI":"10.1364\/OE.22.021800","type":"journal-article","volume":"22","author":"Zhang","year":"2014","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R46","doi-asserted-by":"publisher","first-page":"20995","DOI":"10.1364\/OE.427999","type":"journal-article","volume":"29","author":"Chen","year":"2021","journal-title":"Opt. Express"},{"key":"ao-65-12-4143-R47","doi-asserted-by":"publisher","first-page":"16604","DOI":"10.1364\/OE.15.016604","type":"journal-article","volume":"15","author":"Lin","year":"2007","journal-title":"Opt. Express"}],"container-title":["Applied Optics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ao-65-12-4143&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,5,13]],"date-time":"2026-05-13T14:26:19Z","timestamp":1778682379000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=ao-65-12-4143"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,4,17]]},"references-count":47,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2026]]},"published-print":{"date-parts":[[2026]]}},"URL":"https:\/\/doi.org\/10.1364\/ao.592178","relation":{},"ISSN":["1559-128X","2155-3165"],"issn-type":[{"value":"1559-128X","type":"print"},{"value":"2155-3165","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,4,17]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/AO.592178","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"research-article","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"29 January 2026","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"31 March 2026","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"17 April 2026","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2026 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.","name":"copyright","label":"Copyright"}]}}