{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,15]],"date-time":"2026-06-15T07:16:03Z","timestamp":1781507763689,"version":"3.54.1"},"reference-count":33,"publisher":"Optica Publishing Group","issue":"2","license":[{"start":{"date-parts":[[2020,1,6]],"date-time":"2020-01-06T00:00:00Z","timestamp":1578268800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v1#VOR-OA"},{"start":{"date-parts":[[2020,1,6]],"date-time":"2020-01-06T00:00:00Z","timestamp":1578268800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61520106013"],"award-info":[{"award-number":["61520106013"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61727816"],"award-info":[{"award-number":["61727816"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012226","name":"Fundamental Research Funds for the Central Universities","doi-asserted-by":"publisher","award":["DUT18ZD215"],"award-info":[{"award-number":["DUT18ZD215"]}],"id":[{"id":"10.13039\/501100012226","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Express"],"published-print":{"date-parts":[[2020,1,20]]},"abstract":"<jats:p>A miniature fiber-optic tip Fabry-Perot (FP) pressure sensor with excellent high-temperature survivability, assembled by hydroxide catalysis bonding (HCB) technology, is proposed and experimentally demonstrated. A standard single-mode fiber is fusion spliced to a fused silica hollow tube with an outer diameter (OD) of 125 \u00b5m, and a 1-\u00b5m-thick circular silicon diaphragm with a diameter slightly larger than the OD is bonded to the other endface of the hollow tube by HCB technology. The ultrathin silicon diaphragm is prepared on a silicon-on-insulator (SOI) wafer produced by microelectromechanical systems (MEMS), providing the capability of large-scale mass production. The HCB technology enables a polymer-free bonding between diaphragm and hollow tube on fiber tip with the obvious advantages of high alignment precision, normal pressure and temperature (NPT) operation, and reliable effectiveness. The static pressure and temperature response of the proposed sensor are discussed. Results show that the sensor has a measurable pressure range of 0\u223c100 kPa, which is well consistent with the measurement range of biological blood pressure. The pressure sensitivity is up to 2.13 nm\/kPa with a resolution of 0.32% (0.32kPa). Besides, the sensor possesses a unique high-temperature resistant capability up to 600 \u00b0C, which can easily survive even in high-temperature sterilization processes, and it has a low temperature dependence of 0.09 kPa\/\u00b0C due to the induced HCB bonding technology and the silicon-based diaphragm. Thus, the proposed fiber tip pressure sensor is desirable for invasive biomedical pressure diagnostics and pressure monitoring in related harsh environments.<\/jats:p>","DOI":"10.1364\/oe.380589","type":"journal-article","created":{"date-parts":[[2019,12,16]],"date-time":"2019-12-16T19:00:06Z","timestamp":1576522806000},"page":"948","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":49,"title":["Miniature fiber-optic tip pressure sensor assembled by hydroxide catalysis bonding technology"],"prefix":"10.1364","volume":"28","author":[{"given":"Yueying","family":"Liu","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhenguo","family":"Jing","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rui","family":"Li","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3722-6807","authenticated-orcid":true,"given":"Yang","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8912-8286","authenticated-orcid":true,"given":"Qiang","family":"Liu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ang","family":"Li","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chao","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wei","family":"Peng","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2020,1,6]]},"reference":[{"key":"oe-28-2-948-R1","doi-asserted-by":"publisher","first-page":"1003","DOI":"10.1364\/AO.42.001003","volume":"42","author":"Bae","year":"2003","journal-title":"Appl. Opt."},{"key":"oe-28-2-948-R2","doi-asserted-by":"publisher","first-page":"15494","DOI":"10.3390\/s150715494","volume":"15","author":"Garc\u00eda","year":"2015","journal-title":"Sensors"},{"key":"oe-28-2-948-R3","doi-asserted-by":"publisher","first-page":"100","DOI":"10.1016\/j.yofte.2010.01.001","volume":"16","author":"Yan","year":"2010","journal-title":"Opt. Fiber Technol."},{"key":"oe-28-2-948-R4","doi-asserted-by":"publisher","first-page":"737","DOI":"10.1007\/s10544-013-9759-7","volume":"15","author":"Murphy","year":"2013","journal-title":"Biomed. Microdevices"},{"key":"oe-28-2-948-R5","doi-asserted-by":"publisher","first-page":"561","DOI":"10.1253\/circj.CJ-13-0161","volume":"77","author":"Pijls","year":"2013","journal-title":"Circ. J."},{"key":"oe-28-2-948-R6","first-page":"71","volume":"15","author":"Kentaro","year":"2004","journal-title":"J. Micromech. Microeng."},{"key":"oe-28-2-948-R7","doi-asserted-by":"publisher","first-page":"277","DOI":"10.1016\/j.jneumeth.2006.07.018","volume":"159","author":"Chavko","year":"2007","journal-title":"J. Neurosci. Methods"},{"key":"oe-28-2-948-R8","doi-asserted-by":"publisher","first-page":"1505","DOI":"10.1364\/OL.37.001505","volume":"37","author":"Guo","year":"2012","journal-title":"Opt. Lett."},{"key":"oe-28-2-948-R9","doi-asserted-by":"publisher","first-page":"14573","DOI":"10.1364\/OE.20.014573","volume":"20","author":"Bae","year":"2012","journal-title":"Opt. Express"},{"key":"oe-28-2-948-R10","doi-asserted-by":"publisher","first-page":"2505","DOI":"10.1109\/LPT.2013.2287289","volume":"25","author":"Dai","year":"2013","journal-title":"IEEE Photonics Technol. Lett."},{"key":"oe-28-2-948-R11","doi-asserted-by":"publisher","first-page":"3241","DOI":"10.1364\/AO.42.003241","volume":"42","author":"Yu","year":"2003","journal-title":"Appl. Opt."},{"key":"oe-28-2-948-R12","doi-asserted-by":"publisher","first-page":"4344","DOI":"10.1109\/JLT.2017.2737639","volume":"35","author":"Wu","year":"2017","journal-title":"J. Lightwave Technol."},{"key":"oe-28-2-948-R13","doi-asserted-by":"publisher","first-page":"9006","DOI":"10.1364\/OE.18.009006","volume":"18","author":"Wang","year":"2010","journal-title":"Opt. Express"},{"key":"oe-28-2-948-R14","doi-asserted-by":"publisher","first-page":"689","DOI":"10.1109\/LPT.2019.2904420","volume":"31","author":"Guo","year":"2019","journal-title":"IEEE Photonics Technol. Lett."},{"key":"oe-28-2-948-R15","doi-asserted-by":"publisher","first-page":"993","DOI":"10.1109\/68.942671","volume":"13","author":"Abeysinghe","year":"2001","journal-title":"IEEE Photonics Technol. Lett."},{"key":"oe-28-2-948-R16","doi-asserted-by":"publisher","first-page":"885","DOI":"10.1364\/OL.31.000885","volume":"31","author":"Wang","year":"2006","journal-title":"Opt. Lett."},{"key":"oe-28-2-948-R17","doi-asserted-by":"publisher","first-page":"97","DOI":"10.1016\/j.optcom.2018.10.064","volume":"435","author":"Wang","year":"2019","journal-title":"Opt. Commun."},{"key":"oe-28-2-948-R20","doi-asserted-by":"publisher","first-page":"045001","DOI":"10.1088\/0264-9381\/31\/4\/045001","volume":"31","author":"Douglas","year":"2014","journal-title":"Classical Quantum Gravity"},{"key":"oe-28-2-948-R21","doi-asserted-by":"publisher","first-page":"136","DOI":"10.1117\/12.323731","volume":"3435","author":"Gwo","year":"1998","journal-title":"Proc. SPIE"},{"key":"oe-28-2-948-R22","doi-asserted-by":"publisher","first-page":"1377","DOI":"10.1088\/0264-9381\/19\/7\/321","volume":"19","author":"Willke","year":"2002","journal-title":"Classical Quantum Gravity"},{"key":"oe-28-2-948-R23","doi-asserted-by":"publisher","first-page":"235004","DOI":"10.1088\/0264-9381\/29\/23\/235004","volume":"29","author":"Aston","year":"2012","journal-title":"Classical Quantum Gravity"},{"key":"oe-28-2-948-R24","doi-asserted-by":"publisher","first-page":"084021","DOI":"10.1088\/0264-9381\/27\/8\/084021","volume":"27","author":"Lorenzini","year":"2010","journal-title":"Classical Quantum Gravity"},{"key":"oe-28-2-948-R25","doi-asserted-by":"publisher","first-page":"S257","DOI":"10.1088\/0264-9381\/22\/10\/018","volume":"22","author":"Elliffe","year":"2005","journal-title":"Classical Quantum Gravity"},{"key":"oe-28-2-948-R26","doi-asserted-by":"publisher","first-page":"S149","DOI":"10.1088\/0264-9381\/22\/10\/003","volume":"22","author":"Heinzel","year":"2005","journal-title":"Classical Quantum Gravity"},{"key":"oe-28-2-948-R27","doi-asserted-by":"publisher","first-page":"2719","DOI":"10.1109\/JLT.2018.2876717","volume":"37","author":"Qi","year":"2019","journal-title":"J. Lightwave Technol."},{"key":"oe-28-2-948-R28","doi-asserted-by":"publisher","first-page":"21746","DOI":"10.1364\/OE.16.021746","volume":"16","author":"Ge","year":"2008","journal-title":"Opt. Express"},{"key":"oe-28-2-948-R29","author":"Bergna","year":"1994"},{"key":"oe-28-2-948-R30","doi-asserted-by":"publisher","first-page":"13003","DOI":"10.1364\/OE.15.013003","volume":"15","author":"Park","year":"2007","journal-title":"Opt. Express"},{"key":"oe-28-2-948-R31","doi-asserted-by":"publisher","first-page":"341","DOI":"10.1016\/j.physleta.2006.11.068","volume":"363","author":"Reid","year":"2007","journal-title":"Phys. Lett. A"},{"key":"oe-28-2-948-R32","doi-asserted-by":"publisher","first-page":"3031","DOI":"10.1021\/nl071492h","volume":"7","author":"Sivasankar","year":"2007","journal-title":"Nano Lett."},{"key":"oe-28-2-948-R33","author":"Giovanni","year":"1982"},{"key":"oe-28-2-948-R36","doi-asserted-by":"publisher","first-page":"289","DOI":"10.1016\/j.optlaseng.2019.04.028","volume":"121","author":"Zhou","year":"2019","journal-title":"Opt. Lasers Eng."},{"key":"oe-28-2-948-R38","doi-asserted-by":"publisher","first-page":"3466","DOI":"10.1016\/j.optcom.2012.04.001","volume":"285","author":"Wang","year":"2012","journal-title":"Opt. Commun."}],"container-title":["Optics Express"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=oe-28-2-948&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,6]],"date-time":"2024-08-06T19:25:33Z","timestamp":1722972333000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=oe-28-2-948"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,1,6]]},"references-count":33,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2020]]},"published-print":{"date-parts":[[2020]]}},"URL":"https:\/\/doi.org\/10.1364\/oe.380589","relation":{},"ISSN":["1094-4087"],"issn-type":[{"value":"1094-4087","type":"electronic"}],"subject":[],"published":{"date-parts":[[2020,1,6]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/OE.380589","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"research-article","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"17 October 2019","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"16 December 2019","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"6 January 2020","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement","name":"copyright","label":"Copyright"}]}}