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Express"],"published-print":{"date-parts":[[2020,6,8]]},"abstract":"<jats:p>We report on the development of 2D integrated multilayer Laue lens (MLL) nanofocusing optics used for high-resolution x-ray microscopy. A Micro-Electro-Mechanical-Systems (MEMS) - based template has been designed and fabricated to accommodate two linear MLL optics in pre-aligned configuration. The orthogonality requirement between two MLLs has been satisfied to a better than 6 millidegrees level, and the separation along the x-ray beam direction was controlled on a micrometer scale. Developed planar 2D MLL structure has demonstrated astigmatism free point focus of \u223c14 nm by \u223c13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy. 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