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The silicon substrate with a high thermal conductivity could provide satisfactory heat dissipation, leading to micro-LED arrays that had a stable emission spectrum with increasing current density from 20 to 420 A\/cm<jats:sup>2<\/jats:sup> along with a red-shift of the peak position from 624.69 to 627.12 nm (<jats:inline-formula>\n      <mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\" display=\"inline\">\n\t<mml:mi mathvariant=\"normal\">\u0394<\/mml:mi>\n\t<mml:mrow class=\"MJX-TeXAtom-ORD\">\n\t  <mml:mrow class=\"MJX-TeXAtom-ORD\">\n\t    <mml:mi>\u03bb<\/mml:mi>\n\t  <\/mml:mrow>\n\t<\/mml:mrow>\n      <\/mml:math>\n    <\/jats:inline-formula>\u2009=\u20092.43 nm). Additionally, increasing the injection current density had little effect on the CIE (x, y) of the micro-LED arrays. 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