{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,30]],"date-time":"2026-07-30T12:25:00Z","timestamp":1785414300007,"version":"3.56.0"},"reference-count":38,"publisher":"Optica Publishing Group","issue":"6","license":[{"start":{"date-parts":[[2024,3,6]],"date-time":"2024-03-06T00:00:00Z","timestamp":1709683200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR-OA"},{"start":{"date-parts":[[2024,3,6]],"date-time":"2024-03-06T00:00:00Z","timestamp":1709683200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62005253"],"award-info":[{"award-number":["62005253"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Express"],"published-print":{"date-parts":[[2024,3,11]]},"abstract":"<jats:p>\n                    This paper proposes what we believe to be a novel linearization signal conditioning circuit for a tri-axial micro-grating micro-opto-electro-mechanical systems (MOEMS) accelerometer. The output of a micro-grating accelerometer varies as a sine\/cosine function of the acceleration. The proposed circuit utilizes a subdivision interpolation technique to process these nonlinear intensity variations and render a linear digital output across the full range. Such a linearization circuit was achieved through a 90-degree phase-shift circuit, high-precision DC bias-voltage and subdivision interpolation circuits to reduce the influence of phase, magnitude, and offset errors of the sine-cosine signals on the interpolation factor, improving the resolution and accuracy of acceleration detection. Experimental results demonstrated that the micro-grating MOEMS accelerometer achieves a resolution of\n                    <jats:italic toggle=\"yes\">sub<\/jats:italic>\n                    -mg, cross-axis errors of 3.57%, 1.22% and 0.89% for\n                    <jats:italic toggle=\"yes\">x<\/jats:italic>\n                    -,\n                    <jats:italic toggle=\"yes\">y<\/jats:italic>\n                    - and\n                    <jats:italic toggle=\"yes\">z<\/jats:italic>\n                    -aixs, respectively. The bias instabilities and velocity random walks for the vertical and lateral accelerometer are superior to 26 \u00b5g and 38.7 \u00b5g\/\u221aHz. The tri-axial micro-grating MOEMS accelerometer exhibits significant potential for applications requiring high sensitivity and large operation ranges, including the automotive industry and military equipment.\n                  <\/jats:p>","DOI":"10.1364\/oe.518469","type":"journal-article","created":{"date-parts":[[2024,2,27]],"date-time":"2024-02-27T11:00:38Z","timestamp":1709031638000},"page":"10241","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Linearization signal conditioning circuit for tri-axial micro-grating MOEMS accelerometer"],"prefix":"10.1364","volume":"32","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-4100-3198","authenticated-orcid":true,"given":"Li","family":"Jin","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/047bp1713","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kunyang","family":"Xie","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/047bp1713","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yixin","family":"Du","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/047bp1713","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Mengwei","family":"Li","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/047bp1713","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2024,3,6]]},"reference":[{"key":"oe-32-6-10241-R1","doi-asserted-by":"publisher","first-page":"100","DOI":"10.1109\/MCOM.2013.6495768","volume":"51","author":"Shaeffer","year":"2013","journal-title":"IEEE Commun. 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